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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 132, 1994 - Issue 4
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Section B: Crystal lattice defects and amorphous materials

Depth distribution of SiD and SiD2 complexes in silicon bombarded by 10 keV D+2 ion

M. A. Lomidze Institute of Physical Chemistry, Russian Academy of Sciences, Leninsky pr. 31, 117915, Moscow, Russia
,
A. E. Gorodetsky Institute of Physical Chemistry, Russian Academy of Sciences, Leninsky pr. 31, 117915, Moscow, Russia
&
A. P. Zakharov Institute of Physical Chemistry, Russian Academy of Sciences, Leninsky pr. 31, 117915, Moscow, Russia
Pages 387-392 | Published online: 19 Aug 2006

References

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  • Lomidze , M. A. , Gorodetsky , A. E. and Zakharov , A. P. Rad. Effects , submitted
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  • Behrisch , R. , ed. 1981 . Topics in Appl. Phys. , Vol. 47 , 336 Berlin : Springer Verlag . Sputtering by Particle Bombardment
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