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Original Articles

Machining Characteristics of Polycrystalline Silicon by Wire Electrical Discharge Machining

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Pages 1443-1450 | Received 06 Feb 2010, Accepted 26 Nov 2010, Published online: 19 Oct 2011

REFERENCES

  • Moller , H.J. ; Funke , C. ; Rinio , M. ; Scholz , S. Multicrystalline silicon for solar cells . Thin Solid Films 2005 , 487 ( 1–2 ), 179 – 187 .
  • Moller , H.J. Basic mechanisms and models of multi-wire sawing . Advanced Engineering Materials 2004 , 6 ( 7 ), 501 – 513 .
  • Moller , H.J. Wafering of silicon crystals . Physica Status Solidi A—Applications and Materials Science 2006 , 203 ( 4 ), 659 – 669 .
  • Keskin , Y. ; Halkaci , H.S. ; Kizil , M. An experimental study for determination of the effects of machining parameters on surface roughness in electrical discharge machining (EDM) . International Journal of Advanced Manufacturing Technology 2006 , 28 ( 11–12 ), 1118 – 1121 .
  • Bleys , P. ; Kruth , J.P. ; Lauwers , B. ; Schacht , B. ; Balasubramanian , V. ; Froyen , L. Surface and sub-surface quality of steel after EDM . Advanced Engineering Materials 2006 , 8 ( 1–2 ), 15 – 25 .
  • Seo , Y.W. ; Kim , D. ; Ramulu , M. Electrical discharge machining of functionally graded 15–35 Vol% SiCp/Al composites . Materials and Manufacturing Processes 2006 , 21 ( 5 ), 479 – 487 .
  • Lin , Y.C. ; Cheng , C.H. ; Su , B.L. ; Hwang , L.R. Machining characteristics and optimization of machining parameters of SKH 57 high-speed steel using electrical-discharge machining based on Taguchi Method . Materials and Manufacturing Processes 2006 , 21 ( 8 ), 922 – 929 .
  • Guu , Y.H. ; Tsai , K.L. ; Chen , L.K. An experimental study on electrical discharge machining of manganese-zinc ferrite magnetic material . Materials and Manufacturing Processes 2007 , 22 ( 1 ), 66 – 70 .
  • Ghoreishi , M. ; Tabari , C. Investigation into the effect of voltage excitation of pre-ignition spark pulse on the electro-discharge machining (EDM) process . Materials and Manufacturing Processes 2007 , 22 ( 7–8 ), 833 – 841 .
  • Patel , K.M. ; Pandey , P.M. ; Rao , P.V. Understanding the role of weight percentage and size of silicon carbide particulate reinforcement on electro-discharge machining of aluminium-based composites . Materials and Manufacturing Processes 2008 , 23 ( 7 ), 665 – 673 .
  • Liu , J.W. ; Yue , T.M. ; Guo , Z.N. Wire electrochemical discharge machining of Al2O3 particle reinforced aluminum alloy 6061 . Materials and Manufacturing Processes 2009 , 24 ( 4 ), 446 – 453 .
  • Kung , K.Y. ; Chiang K.T. Modeling and analysis of machinability evaluation in the wire electrical discharge machining (WEDM) process of aluminum oxide-based ceramic . Materials and Manufacturing Processes 2008 , 23 ( 3–4 ), 241 – 250 .
  • Luo , Y.F. ; Chen , C.G. ; Tong , Z.F. Investigation of silicon wafering by wire edm . Journal of Materials Science 1992 , 27 ( 21 ), 5805 – 5810 .
  • Peng , W.Y. ; Liao , Y.S. Study of electrical discharge machining technology for slicing silicon ingots . Journal of Materials Processing Technology 2003 , 140 , 274 – 279 .
  • Takion , H. ; Ichinohe , T. ; Tanimoto , K. ; Yamaguchi , S. ; Nomura , K. ; Kunieda , M. Cutting of polished single-crystal silicon by wire electrical discharge machining . Precision Engineering 2004 , 28 ( 3 ), 314 – 319 .
  • Takion , H. ; Ichinohe , T. ; Tanimoto , K. ; Yamaguchi , S. ; Nomura , K. ; Kunieda , M. High-quality cutting of polished single-crystal silicon by wire electrical discharge machining . Precision Engineering 2005 , 29 ( 4 ), 423 – 430 .
  • Takion , H. ; Ichinohe , T. ; Tanimoto , K. ; Nomurak , K. ; Kuniedai , N. Contouring of polished single-crystal silicon plates by wire electrical discharge machining . Precision Engineering 2007 , 31 ( 4 ), 358 – 363 .
  • Wang , W. ; Liu , Z.D. ; Tian , Z.J. ; Huang , Y.H. ; Huang , Y.H. ; Liu , Z.X. High efficiency slicing of low resistance silicon ingot by wire electrolytic-spark hybrid machining . Journal of Materials Processing Technology 2009 , 209 ( 7 ), 3149 – 3155 .
  • Kunieda , M. ; Qjima , S. Improvement of EDM efficiency of silicon single crystal through ohmic contact . Precision Engineering 2000 , 24 ( 3 ), 185 – 190 .
  • Lin , Y.C. ; Chen , Y.F. ; Lin , C.T. ; Tzeng , H.J. Electrical discharge machining (EDM) characteristics associated with electrical discharge energy on machining of cemented tungsten carbide . Materials and Manufacturing Processes 2008 , 23 ( 3–4 ), 391 – 399 .
  • Ali , M.Y. ; Mohammad , A.S. Experimental study of conventional wire electrical discharge machining for microfabrication . Materials and Manufacturing Processes 2008 , 23 ( 7 ), 641 – 645 .

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