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Original Articles

Synthesis of polishing fluid and novel approach for nanofinishing of copper using ball-end magnetorheological finishing process

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Pages 1150-1159 | Received 08 Dec 2016, Accepted 22 Apr 2017, Published online: 07 Jun 2017

References

  • Li, Y. (Ed.). Microelectronic Applications of Chemical Mechanical Planarization; Wiley-Interscience: Hoboken, NJ, 2008; 9 pp.
  • Murarka, S.P.; Verner, I.V.; Gutman, R.J. Copper—Fundamental Mechanisms for Microelectronic Applications; John Wiley & Sons, Inc.: New York, 2000; 337 pp.
  • Ein-Eli Y.; Starosvetsky, D. Review on copper chemical–mechanical polishing (CMP) and post-CMP cleaning in ultra large system integrated (ULSI)—An electrochemical perspective. Electrochimica Acta 2007, 52, 1825–1838.
  • Wagal, S.S. Diamond Coated Copper Optics. Patent No. WO 1996024488 A1, Aug. 15, 1996.
  • Ahmad, A. Optomechanical Engineering Handbook; CRC Press LLC: Florida, USA, 1999; Chapter 4.
  • Givi, M.; Fadaei, A.; Mohammadi, A. Polishing of the aluminum sheets with magnetic abrasive finishing method. International Journal of Manufacturing Technology 2012, 61, 989–998.
  • Da Silva, M.F.; Shimizu, K.; Kobayashi, K.; Skeldon, P.; Thompson, G.E.; Wood, G.C. On the nature of the mechanically polished aluminium surface. Corrosion Science 1995, 37 (9), 1511–1514.
  • Barletta, M.; Guarino, S.; Rubino, G.; Tagliaferri, V. Progress in fluidized bed assisted abrasive jet machining (FB-AJM) internal polishing of aluminium tubes. International Journal of Machine Tools and Manufacture 2007, 47, 483–495.
  • Xie, Y.; Bhushan, B. Effect of particle size, polishing pad and contact pressure in free abrasive polishing. Wear 1996, 200 (1–2), 281–295.
  • Ahn, Y.; Yoon, J.; Baek, C.; Kim, Y. Chemical mechanical polishing by colloidal silica-based slurry for micro-scratch reduction. Wear 2004, 257, 785–789.
  • Luo, Q.; Campbell, D.R.; Babu, S.V. Chemical–mechanical polishing of copper in alkaline media. Thin Solid Films 1997, 311, 177–182.
  • Steigerwald, J.M.; Murarka, S.P.; Guttmann, R.J. Chemical Mechanical Planarization of Microelectronical Materials; John Wiley & Sons, Inc.: New York, 1997; 36–47pp.
  • Han, R.; Sampurno, Y.; Philipossian, A. Fractional In Situ Pad Conditioning in Chemical Mechanical Planarization. Tribol Letters 2017, 65 (21), doi:10.1007/s11249-016-0803-7.
  • Zhang, X.; Zhang, Y. Study on the surface quality of a diamond-turned reflector used in a high-power CO 2 laser. Optical Engineering 1997, 36 (3), 825–830.
  • Mahajan, K.A.; Sadaiah, M.; Gawande, S.H. Experimental investigations of surface roughness on OFHC copper by diamond turning machine. International Journal of Engineering Science and Technology 2010, 2 (10), 5215–5220.
  • Kala, P.; Kumar, S.; Pandey, P.M. Polishing of copper alloy using double disk ultrasonic assisted magnetic abrasive polishing. Materials and Manufacturing Processes 2013, 28, 200–206.
  • Hirris, D.C. Hisory of Magnetorheological finishing, in Proceedings of SPIE 8016, 80160N, 2011 doi:10.1117/12.882557
  • Jha, S.; Jain, V.K. Design and development of magnetorheological abrasive flow finishing process. International Journal of Machine Tools and Manufacture 2004, 44 (10), 1019–1029.
  • Sidpara, A.; Jain, V.K. Nano–level finishing of single crystal silicon blank using magnetorheological finishing process. Tribology International 2012, 47, 159–166.
  • Song, W.L.; Choi, S.B.; Cai, Q.C.; Choi, J.Y.; Lee, C.H. Finishing Performance of Magneto-Rheological Fluid under Magnetic Field. Mechanics of Advanced Materials and Structures 2013, 20, 529–535.
  • Singh, A.K.; Jha, S.; Pandey, P.M. Magnetorheological ball end finishing process. Material and Manufacturing Processes 2012, 27 (4), 389–394.
  • Singh, A.K.; Jha, S.; Pandey, P.M. Performance analysis of ball end magnetorheological finishing process with MR polishing fluid. Material and Manufacturing Processes 2015, 30, 1482–1489.
  • Singh, G.; Singh, A.K.; Garg, P. Development of magnetorheological finishing process for external cylindrical surfaces. Material and Manufacturing Processes 2015, doi:10.1080/10426914.2016.1221082
  • Maan, S.; Singh, G.; Singh, A.K. Nano-surface-finishing of permanent mold punch using magnetorheological fluid-based finishing processes. Material and Manufacturing Processes 2016, doi:10.1080/10426914.2016.1232823
  • Saraswathamma, K.; Jha, S.; Rao, P.V. Rheological characterization of MR polishing fluid used for silicon polishing in BEMRF process. Material and Manufacturing Processes 2015, doi:10.1080/10426914.2014.994767
  • Singh, A.K.; Jha.S.; Pandey, P.M. Design and development of nanofinishing process for 3D surfaces using ball end MR finishing. International Journal of Machine tool and Manufacture 2011, 51, 142–151.
  • Singh, A.K.; Jha, S.; Pandey, P.M. Nanofinishing of a typical 3D ferromagnetic workpiece using ball end magnetorheological finishing process. International Journal of Machine Tool and Manufacture 2012, 63, 21–31.

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