MATERIALS PROCESSING WITH EXCIMER LASERS

REFERENCES

• Ewing , J. , “ Excimer Lasers ”, Laser Handbook , Vol. 3 , M.L. Stitch , Ed. North Holland Publishing Company, p. 135 , ( 1979 ).
   Google Scholar
• Siegman , A. , Lasers , Mill Valley , University Science Books, Ch 17.6 , ( 1986 ).
   Google Scholar
• Rhodes , C.K. (ed.) Excimer Lasers, Topics in Applied Physics , Springer-Verlag, , Vol. 30 New York , ( 1979 ).
   Google Scholar
• Austin , L. , D. Basting , H.-J. Kahlert , U. Rebhan , and W. Muckenheim , “ Numbers of Merit in Excimer Reliability Analysis ”, Proceedings SPIE , Vol. 1023 , p. 114 ( 1988 ).
   Google Scholar
• Basting , D. , K. Hohla , E. Albers , and H. Bergmann , “ Thyratrons with Magnetic Switches: The Key to Reliable Excimer Lasers ”, Lasers und Optoelektronik , p. 128 , ( 1984 ).
   Google Scholar
• Jain , K. , and R.T. Karth , “ Excimer laser projection lithography ”, Applied Optics , Vol. 23 , p. 648 , ( 1984 ).
   Google Scholar
• Pol , V. , and G. Escher , “ Excimer laser based lithography ”, SPIE Conference on Microlithography , ( 1986 ).
   Google Scholar
• Pummer , H. , U. Sowada , P. Oesterlin , U. Rebhan , and D. Basting , “ Kommerzielle Excimer Laser ”, Laser und Optoelektronik , Vol. 17 , No. 2 , p. 141 , ( 1985 ).
   Google Scholar
• Cullman , E. , Karl Suss KG-GmbH & Co., “ Excimer Laser Printing with 193 nm Wavelength ”, Highlights No. 4, Lambda Physik , ( 1987 ).
   Google Scholar
• Ehrlich , D. , and M. Rothschild , “ A Review of Excimer Laser Projection Lithography ”, Journal of Vacuum Science & Technology B , Vol. 6 , p. l , ( 1988 ).
   Google Scholar
• Srinivasan , R. , K. Casey , and B. Braren , “ Subnanosecond probing of the ablation of polyimide (Kaptontm) by ultraviolet laser pulses ”, Chemtronics , Vol. 4 , p. 153 , ( 1989 ).
   Google Scholar
• Sowada , U. , S. Ishizaka , H.-J. Kahlert , and D. Basting , “ Excimer laser processing of aluminum oxide ceramics ”, Chemtronics , Vol. 4 , p. 162 , ( 1989 ).
   Google Scholar
• Laser Focus World Magazine, p. 28 , ( December 1989 ).
   Google Scholar
• Kitahama , K. , H. Kazuhiko , K. Nakamatsu , S. Kawai , N. Fujimori , T. Imai , H. Yoshino , and A. Doi , Applied Physics Letters , Vol. 49 , p. 634 , ( 1986 ).
   Google Scholar
• Dijkkamp , D. , T. Venkatesan , X.D. Wu , S.A. Shaheen , N. Jisrowi , Y.H. Min-Lee , W.L. McLean , and M. Croft , Applied Physics Letters , Vol. 51 , p. 619 , ( 1987 ).
   Web of Science ®Google Scholar
• Inam , A. , X.D. Wu , T. Venkatesan , S.B. Ogale , C.C. Chang , and D. Dijkkamp , Applied Physics Letters , Vol. 51 , p. 1112 , ( 1987 ).
   Web of Science ®Google Scholar
• Mannhart , J. , M. Scheuermann , C.C. Tsuei , M.M. Oprysko , C.C. Chi , C.P. Umbach , R.H. Koch , and C. Miller , Applied Physics Letters , Vol. 52 , p. 1271 , ( 1988 ).
   Google Scholar