Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 39, 2001 - Issue 1-4
15
Views
3
CrossRef citations to date
0
Altmetric
Section I: Materials and processing for ferams

Stacked Pt/BLT/Pt/IrOx/Ir capacitor for high density feram

, , , , &
Pages 81-89 | Received 14 Mar 2001, Published online: 03 Sep 2006

References

  • Jang , N. W. , Song , Y. J. , Kim , H. H. , Jung , D. J. , Koo , B. J. , Lee , S. Y. , Joo , S. H. , Lee , K. M. and Kim , Kinam . 2000 . Symposium on VLSI Technology Digest of Technical Papers , : 34 – 35 .
  • Celinska , J. , Joshi , V. , Narayan , S. , Macmillan , L. D. and Paz DeAraujo , C. A. 2000 . Integrated Ferroelectrics , 30 : 1
  • Park , B. H. , Kang , B. S. , Bu , S. D. , Noh , T. W. , Lee , J. and Jo , W. 1999 . 401 : 682
  • Ichinose , N. and Nomura , M. 1996 . Jpn. J. Appl. Phys. , 35 : 4960
  • Zhu , J. , Yu , C. , Xiao , D. , Zhang , W. , Yuan , X. , Zhu , J. and Yue , X. 2000 . 12th IEEE International Symposium on the Applications of Ferroelectrics . 2000 .
  • Wu , D. , Li , A. , Zhu , T. , Liu , Z. and Ming , N. 2000 . J. Appl. Phys. , 88 : 5941
  • Chon , U. , Yi , G. C. and Jang , H. M. 2001 . Appl. Phys. Lett. , 78 : 658
  • Cummins , S. E. and Cross , L. E. 1968 . J. Appl. Phys. , 39 : 2268
  • Yang , W. S. , Kim , N. K. , Yeom , S. J. , Kweon , S. Y. and Roh , J. S. Jpn. J. Appl. Phys. , submitted to

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.