Electrical properties of magnetron sputtered thin BaSrTiO₃ films depending on deposition conditions

S. Razumov St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

A. Tumarkin St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

O. Buslov St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

M. Gaidukov St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

A. Gagarin St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

A. Ivanov St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

A. Kozyrev St. Petersburg State Electrotechnical University, 5 Prof. Popov str. St., Petersburg, 197376, Russia

Yong-Won Song Materials Evaluation Center, Korea Research Institute of Standards and Science, Taejon, 305-600, Korea

Chan-Sik Park Materials Evaluation Center, Korea Research Institute of Standards and Science, Taejon, 305-600, Korea

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Electrical properties of magnetron sputtered thin BaSrTiO₃ films depending on deposition conditions

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Electrical properties of magnetron sputtered thin BaSrTiO3 films depending on deposition conditions

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Electrical properties of magnetron sputtered thin BaSrTiO₃ films depending on deposition conditions