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Integrated Ferroelectrics
An International Journal
Volume 36, 2001 - Issue 1-4
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Original Articles

Dielectric and piezoelectric thin films for hf-modules

M. Klee Philips GmbH Forschungslaboratorien Aachen, Weiβhausstr. 2, 52066, Aachen, Germany E-mail: [email protected]
,
R. Kiewitt Philips GmbH Forschungslaboratorien Aachen, Weiβhausstr. 2, 52066, Aachen, Germany E-mail: [email protected]
,
W. Brand Philips GmbH Forschungslaboratorien Aachen, Weiβhausstr. 2, 52066, Aachen, Germany E-mail: [email protected]
,
P. Loebl Philips GmbH Forschungslaboratorien Aachen, Weiβhausstr. 2, 52066, Aachen, Germany E-mail: [email protected]
,
P. Lok Philips Semiconductors, Nijmegen
&
F. van Straten Philips Semiconductors, Nijmegen
Pages 201-214 | Received 14 Mar 2001, Published online: 19 Aug 2006

References

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