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Integrated Ferroelectrics
An International Journal
Volume 36, 2001 - Issue 1-4
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Original Articles

Metal organic chemical vapor deposition of ru electrode for (ba,sr)tio3 capacitors

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Pages 285-294 | Received 14 Mar 2001, Published online: 19 Aug 2006

References

  • Won , S.-J. , Kim , W.-D. , Yoo , C.-Y. , Kim , S.-T. , Park , Y.-W. , Moon , J. T. and Lee , M. Y. 2000 . IEDM technical digest , : 789
  • Fukuzumi , Y. , Suzuki , T. , Sato , A. , Ishibashi , Y. , Hatada , A. , Nakamura , K. , Tsunoda , K. , Fukuda , M. , Lin , J. , Minakata , H. , Shimada , A. , Kurahashi , T. , Tomita , H. , Matsunaga , D. , Hieda , K. , Hashimoto , K. , Nakamura , S. and Kohyama , Y. 2000 . IEDM technical digest , : 793
  • Aoyama , T. , Kiyotoshi , M. , Yamazaki , S. and Eguchi , K. 1999 . Jpn. J. Appl. Phys. , 38 : 2194
  • Aoyama , T. and Eguchi , K. 1999 . Jpn. J. Appl. Phys. , 38 : L1134
  • Livingstone , S. E. 1973 . Comprehensive Inorganic Chemistry , vol. 3 , 1163 New York : Pergamon .

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