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Integrated Ferroelectrics
An International Journal
Volume 38, 2001 - Issue 1-4
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Section H: High K materials and processes for frams and gate electrics

Study of tasin diffusion barrier

F. Letendu LCFIO, bat 503, Université Paris Sud, 91405, Orsay cedex, France; LPGP, bat 210, Université, Paris sud, 91405, Orsay, France
,
M. C. Hugon LCFIO, bat 503, Université Paris Sud, 91405, Orsay cedex, France; LPGP, bat 210, Université, Paris sud, 91405, Orsay, France
,
B. Agius LCFIO, bat 503, Université Paris Sud, 91405, Orsay cedex, France; LPGP, bat 210, Université, Paris sud, 91405, Orsay, France
,
P. Aubert LMN, Universite d Evry 91
,
S. Coindeau LMN, Universite d Evry 91
&
A. I. Kingon Dept. of Materials Science and Engineering, North Carolina State University, Raleigh, NC, USA
Pages 221-228 | Received 14 Mar 2001, Published online: 19 Aug 2006

References

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  • Cabral , C. Jr. , Saenger , K. L. , Kotecki , D. E. and Harper , J. M. E. 2000 . J. Mater. Res. , 15 ( 1 ) : 194
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  • Vickridge , I. and Amsel , G. 1996 . Nucl. Instr. And Meth. In Phys. Res. , B45 : 6
  • Hugon , M. C. , Desvignes , J. M. , Agius , B. , Vickridge , I. , Kim , D. J. and Kingon , A. I. IBA . July 26–30 1999 . pp. P1 – 139 .

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