References: Fabrication of PZT films on SI substrates by SOL-GEL method using Y2O3 buffer layers

Views

CrossRef citations to date

Altmetric

References

Park , B. E. , Sakai , I. , Tokumitsu , E. and Ishiwara , H. 1997 . Appl. Surf. Sci. , 117/118 : 423
Google Scholar
Park , B. E. , Imada , S. , Tokumitsu , E. and Ishiwara , H. 1998 . J. Kor. A. Phys. Soc. , 32 : S1390
Google Scholar
Park , B. E. , Shouriki , S. , Tokumitsu , E. and Ishiwara , H. 1998 . Jpn. J. Appl. Phys. , 37 : 5145
Web of Science ®Google Scholar

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Fabrication of PZT films on SI substrates by SOL-GEL method using Y₂O₃ buffer layers

References

Information for

Open access

Opportunities

Help and information

Your download is now in progress and you may close this window

Login or register to access this feature

Fabrication of PZT films on SI substrates by SOL-GEL method using Y2O3 buffer layers

References

Reprints and Corporate Permissions

Academic Permissions

Related research

To cite this article:

Download citation

Information for

Open access

Opportunities

Help and information

Keep up to date

Fabrication of PZT films on SI substrates by SOL-GEL method using Y₂O₃ buffer layers