Deposition of high dielectric (Ba, Sr)TiO₃ thin films by rf magnetron co-sputtering

Cheng-Chung Jaing Precision Instrument Development Center, 20 R&D Road VI, Hsinchu, Taiwan, 300, R.O.C.

Chun-Hsi Lai Institute of Electronic Engineering, Chung Yuan Christian University, Chungli, Taiwan, 320, R.O.C.

H. L. Kao Institute of Electronic Engineering, Chung Yuan Christian University, Chungli, Taiwan, 320, R.O.C.

Jyh-shin Chen Precision Instrument Development Center, 20 R&D Road VI, Hsinchu, Taiwan, 300, R.O.C.

References

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Deposition of high dielectric (Ba, Sr)TiO₃ thin films by rf magnetron co-sputtering

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Deposition of high dielectric (Ba, Sr)TiO3 thin films by rf magnetron co-sputtering

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Deposition of high dielectric (Ba, Sr)TiO₃ thin films by rf magnetron co-sputtering