Integrated PNZT Structures for MEMS Gyroscope

CORINA NISTORICA Electrical & Computer Engineering Department, The University of Alabama, Tuscaloosa, AL, U.S.A, 35487-0286

JIAN ZHANG Electrical & Computer Engineering Department, The University of Alabama, Tuscaloosa, AL, U.S.A, 35487-0286

P. PADMINI Electrical & Computer Engineering Department, The University of Alabama, Tuscaloosa, AL, U.S.A, 35487-0286

SUSHMA KOTRU Electrical & Computer Engineering Department, The University of Alabama, Tuscaloosa, AL, U.S.A, 35487-0286

R. K. PANDEY Electrical & Computer Engineering Department, The University of Alabama, Tuscaloosa, AL, U.S.A, 35487-0286

REFERENCES

Jaffe , B. , Cook , W. R. and Jaffe , H. 1971 . Piezoelectric Ceramics , London : Academic .
Google Scholar
Kim , W. S. , Ha , S.-M. , Park , H. H. and Kim , C. E. 1999 . “The effects of cation-substitution on the ferroelectric properties of sol-gel derived PZT thin film for FRAM applications” . Thin Solid Films , 355–356 : 531 – 535 .
Google Scholar
Haccart , T. , Cattan , E. and Remiens , D. 2000 . “Evaluation of Niobium effects on the longitudinal coefficients of Pb(Zr, Ti)O3 thin films” . Appl. Phys. Lett. , 76 : 3292 – 3294 .
Web of Science ®Google Scholar
Kholkin , A. L. , Brooks , K. G. , Taylor , D. V. , Hiboux , S. and Setter , N. 1998 . “Self-polarization effect in Pb (Zr,Ti)O3 thin films” . Integrated Ferroelectrics , : 525 – 533 .
Google Scholar
Warren , W. L. , Dimos , D. , Pike , G. E. , Tuttle , B. A. , Raymond , M. V. , Ramesh , R. and Evans , J. T. Jr. 1995 . “Voltage shifts and imprint in ferroelectric capacitors” . Appl. Phys. Lett. , 67 : 866 – 868 .
Web of Science ®Google Scholar
Shepard , J. F. , Chu , F. , Kanno , I. and Trolier-Mc-Kinstry , S. 1999 . “Characterization and aging response of the d 31 piezoelectric coefficient of lead zirconate titanate thin films” . J. Appl. Phys. , 85 : 6711 – 6716 .
Web of Science ®Google Scholar

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Integrated PNZT Structures for MEMS Gyroscope

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