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Integrated Ferroelectrics
An International Journal
Volume 61, 2004 - Issue 1
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Original Articles

Understanding Thickness Effects in Thin Film Capacitors

A. LOOKMAN Department of Pure & Applied Physics, BT7 1NN, Belfast, UK
,
R. M. BOWMAN Department of Pure & Applied Physics, BT7 1NN, Belfast, UK
,
J. M. GREGG Department of Pure & Applied Physics, BT7 1NN, Belfast, UK
,
J. F. SCOTT Symetrix Centre for Ferroics, Earth Sciences Department, CB2 3EQ, Cambridge, UK
,
MATT DAWBER Symetrix Centre for Ferroics, Earth Sciences Department, CB2 3EQ, Cambridge, UK
&
A. RUEDIGER Symetrix Centre for Ferroics, Earth Sciences Department, CB2 3EQ, Cambridge, UK
Pages 51-58 | Received 01 Aug 2003, Accepted 01 Jan 2004, Published online: 11 Oct 2011

REFERENCES

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  • Scott , J. F. , Galt , D. , Price , J. C. , Beall , J. A. , Ono , R. H. , Paz de Araujo , C. A. and McMillan , L. D. 1995 . “A model of voltage-dependent dielectric losses for ferroelectric MMIC devices” . Integrated Ferroelectrics , 6 : 189 – 203 .
  • Basceri , C. , Streiffer , S. K. , Kingon , A. I. and Waser , R. 1997 . “The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapour deposition” . J. Appl. Phys. , 82 : 2497 – 2503 .
  • Sinnamon , L. J. , Bowman , R. M. and Gregg , J. M. 2001 . “Investigation of dead layer thickness in SrRuO3/Ba0.5Sr0.5TiO3/Au thin film capacitors” . Appl. Phys. Lett. , 78 : 1724 – 1726 .
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  • Sinnamon , L. J. , McAneney , J. , Bowman , R. M. and Gregg , J. M. 2003 . “Dependence of the interfacial capacitance on measurement regime used for investigation of thin film ferroelectric capacitors” . J. Appl. Phys. , 93 : 736 – 744 . http://dx.doi.org/10.1063/1.1522476
  • Parker , C. B. , Maria , J. P. and Kingon , A. I. 2002 . “Temperature and thickness dependent permittivity of (Ba,Sr)TiO3 thin films” . Appl. Phys. Lett. , 81 : 340 – 342 .
  • Kut , John . June 2003 . June , Cambridge University . Part III Thesis
  • Dawber , Matthew . August 2003 . Cambridge University . Ph.D. thesis
  • Dawber , Matthew , Rabe , Karin and Scott , JamesF. 2004 . Rev. Mod. Phys. , in press

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