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Integrated Ferroelectrics
An International Journal
Volume 81, 2006 - Issue 1
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SECTION I: FeRAM PROCESSING

STUDY ON STRESS OF THE FILMS APPLIED TO FeRAM

ZE JIA Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
,
HONG HU Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
,
DAN XIE Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
,
ZHI-GANG ZHANG Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
,
NING-XIN ZHANG Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
,
TIAN-LING REN Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
&
LI-TIAN LIU Institute of Microelectronics of Tsinghua University, Beijing, 100084, China
 show all
Pages 97-103 | Received 17 Apr 2005, Accepted 23 Jan 2006, Published online: 17 Aug 2006

REFERENCES

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