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Integrated Ferroelectrics
An International Journal
Volume 88, 2007 - Issue 1
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SECTION I: MEMS, PYROELECTRIC/IR, OPTOELECTRONIC MATERIALS: THIN-FILM PROCESSING

FABRICATION AND CHARACTERIZATION OF IN-PLANE POLARIZED PZT FILMS WITH INTERDIGITAL ELECTRODES

CHAO WANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
TIANLING REN Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
ZHEYAO WANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
YIPING ZHU Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
NINGXIN ZHANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
&
LITIAN LIU Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
Pages 3-11 | Received 31 May 2006, Published online: 12 Oct 2011

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