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Integrated Ferroelectrics
An International Journal
Volume 91, 2007 - Issue 1
34
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Original Articles

INITIAL STAGES OF GROWTH OF BaMgF4 ON (111)-SILICON

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Pages 23-36 | Received 21 Dec 2006, Published online: 20 Sep 2010

REFERENCES

  • Ekinci , K. L. and Roukes , M. L. 2005 . “Nanoelectromechanical Systems,” . Rev. Sci. Instr. , 76 : 061101 – 0611012 .
  • Trolier-Mckinstry , S. and Muralt , P. 2004 . “Thin film piezoelectrics for MEMS,” . J. Electroceram. , 12 : 7 – 17 .
  • Yu , Y. , Ren , T. -L. and Liu , L.-T. 2005 . “High quality silicon-based AlN thin films for MEMS application,” . Integr. Ferroelectr. , 69 : 367
  • Muralt , P. 2000 . “Ferroelectric thin films for micro-sensors and actuators: a. review,” . J. Micromech Microeng. , 20 : 136 – 146 .
  • Kügeller , C. , Gerber , P. , Böttger , U. and Waser , R. 2003 . Integr Ferroelectr. , 54 : 527
  • Baborowski , J. 2004 . “Microfabrication of Piezoelectric MEMS,” . Integr. Ferroelectr. , 66 : 3 – 17 .
  • Recker , K. , Wallrafen , F. and Haussuhl , S. 1974 . “Single crystal growth and optical, elastic, and piezoelectric properties of polar magnesium barium fluoride,” . J. Crys. Growth , 26 : 97 – 108 .
  • Sinharoy , S. , Buhay , H. , Francombe , M. H. , Takei , W. J. , Doyle , N. J. and Rieger , J. H. 1991 . “Growth and characterization of BaMgF4 films,” . J. Vac. Sci. Technol. A. , 9 : 409
  • Aizawa , K. , Ishiwara , H. and Kumagai , M. 1993 . “Epitaxial growth of BaMgF4 films on Si(100) and (111) substrates: an approach to ferroelectric/semiconductor heterostructures,” . Appl. Phys. Lett. , 63 : 1765 – 1767 .
  • Aizawa , K. , Okamoto , T. , Tokumitsu , E. and Ishiwara , H. 1996 . “Ferroelectric properties of BaMgF4 Films grown on Si(100), (111) and Pt(111)/SiO2/Si(100) structures,” . Jpn. J. Appl. Phys. , 35 : 1525 – 1530 .
  • Aizawa , K. and Ishiwara , H. 1992 . “Formation of ferroelectric BaMgF4 films on GaAs sustrates,” . Jpn. J. Appl. Phys. , 31 : 3232
  • Hayashi , T. , Yoshihara , M. , Ohmi , S. , Tokumitsu , E. and Ishiwara , H. 1997 . “Electrical properties of ferroelectric BaMgF4 films grown on GaAs substates using AlGaAs buffer layer,” . Appl. Surf. Sci. , 117/118 : 418 – 422 .
  • Ohmi , S. , Tokumitsu , E. and Ishiwara , H. 1995 . “Characterization of ferroelectric BaMgF4 films grown on AlGaAs/GaAs(100) high-electron mobility transistor structures,” . J. Cryst. Growth , : 1501104 – 1107 .
  • Wang , X. , Fujiwara , S. , Kimura , T. and Chen , H. 2001 . “Crystal structures of BaMgF4 − x O x/2 thin films,” . Ferroelectrics , 264 : 121 – 126 .
  • Mankiewich , P. M. , Craighead , H. G. , Harrison , T. R. and Dayem , A. H. 1984 . “High resolution electron lithography on CaF2,” . Appl. Phys. Lett. , 44 : 468 – 449 .
  • Cole , D. A. , Shallenberger , J. R. , Novak , S. W. , Moore , R. L. , Edgell , M. J. , Smith , S. P. , Hitzman , C. J. , Kirchhoff , J. F. , Principe , E. , Nieveen , W. , Huang , F. K. , Biswas , S. , Bleiler , R. J. and Jones , K. 2000 . “SiO2 thickness determination by x-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, Rutherford backscattering, transmission electron microscopy, and ellipsometry,” . J. Vac. Sci. Technol. B , 18 : 440
  • Stumborg , M. F. , Chu , T. K. and Santiago , F. 1993 . “Surface chemical state populations in the molecular beam epitaxy of BaF2 on GaAs by x-ray photoelectron spectroscopy and heavy-ion backscattering spectroscopy,” . Mat. Res. Soc. Symp. Proc. , 281 : 603
  • Weast , R W and Astle , M J , eds. 1983 . CRC Handbook of Chemistry and Physics , B-143 CRC Press, Inc. .
  • Kirsch , P. D. and Eckerdt , J. G. 2001 . “Interfacial chemistry of the Ba/SiOxNy/Si(100) nanostructure,” . J. Vac. Sci. Technol. , A19 : 207
  • Barin , I. 1995 . Thermochemical Data of Pure Substances , Wienheim : VCH .

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