CRYSTALLIZATION BEHAVIOR OF HfO₂ FILMS FOR (Y,Yb)MnO₃/HfO₂/Si STRUCTURES

REFERENCES

• Smolenskii , G. A. and Bokov , V. A. 1964 . Coexistence of magnetic and electric ordering in crystals . J. Appl. Phys. , 35 : 915 – 918 .
   Web of Science ®Google Scholar
• Lee , H. N. , Kim , Y. T. and Choh , S. H. 2000 . Comparison of memory effect between YMnO3 and SrBi2Ta2O3 ferroelectric thin films deposited on Si substrates . Appl. Phys. Lett. , 76 : 1066 – 1068 .
   Web of Science ®Google Scholar
• Fujimura , N. , Ishida , T. , Yoshimura , T. and Ito , T. 1996 . Epitaxially grown YMnO3 film: New candidate for nonvolatile memory devices . Appl. Phys. Lett. , 69 : 1011 – 1013 .
   Web of Science ®Google Scholar
• Imada , S. , Kuraoka , T. , Tokumitsu , E. and Ishiwara , H. 2001 . Ferroelectricity of YMnO3 thin films on Pt(111)/Al2O3(0001) and Pt(111)/Y2O3(111)/Si(111) structures grown by molecular beam epitaxy . Jpn. J. Appl. Phys. , 40 : 666 – 671 .
   Web of Science ®Google Scholar
• Fujimura , N. , Tanaka , H. , Kitahata , H. , Tadanaga , K. , Yoshimura , T. , Ito , T. and Minami , T. 1997 . YMnO3 thin films prepared from solutions for non volatile memory devices . Jpn. J. Appl. Phys. , 36 : L1601 – 1603 .
   Web of Science ®Google Scholar
• Yi , W. , Choe , J. , Moon , C. , Kwun , S. and Yoon , J. 1998 . Ferroelectric characterization of highly (0001)-oriented YMnO3 thin films grown by chemical solution deposition . Appl. Phys. Lett. , 73 : 903 – 905 .
   Web of Science ®Google Scholar
• Suzuki , K. , Fu , D. , Nishizawa , K. , Miki , T. and Kato , K. 2003 . Preparation of (Y,Yb)MnO3/Y2O3/Si (MFIS) structure by chemical solution deposition method . Jpn. J. Appl. Phys. , 42 : 6007 – 6010 .
   Web of Science ®Google Scholar
• Suzuki , K. , Tanaka , K. , Fu , D. , Nishizawa , K. , Miki , T. and Kato , K. 2004 . Construction of MFIS structure using alkoxy-derived (Y,Yb)MnO3 thin films . Key. Eng. Mater. , 269 : 49 – 52 .
   Google Scholar
• Suzuki , K. , Tanaka , K. , Fu , D. , Nishizawa , K. , Miki , T. and Kato , K. 2004 . Novel (Y,Yb)MnO3 thin films for FeRAM application . Integr. Ferroelectr. , 65 : 117
   Web of Science ®Google Scholar
• Suzuki , K. , Tanaka , K. , Nishizawa , K. , Miki , T. and Kato , K. 2006 . Characterization of dielectric properties of alkoxy-derived (Y,Yb)MnO3 ferroelectrics/insulator stacking layers . Key. Eng. Mater. , 301 : 65 – 68 .
   Google Scholar