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Integrated Ferroelectrics
An International Journal
Volume 105, 2009 - Issue 1
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Original Articles

A LOW POWER, LOW PHASE NOISE FBAR OSCILLATOR

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Pages 75-86 | Received 23 Apr 2009, Published online: 20 Sep 2010

REFERENCES

  • Zhang , H. and Kim , E. S. 2005 . Micromachined acoustic resonant mass sensor . Journal of Microelectromechanical Systems , 14 ( 4 ) : 699 – 706 .
  • Norling , M. , Enlund , J. , Katardjiev , I. and Gevorgian , S. 2008 . Oscillators based on monolithically integrated AlN TFBARs . IEEE Transactions on Microwave Theory and Techniques , 56 ( 12 ) : 3209 – 3216 .
  • Weber , J. , Albers , W. M. , Tuppurainen , J. , Link , M. , Gabl , R. , Wersing , W. and Schreiter , M. 2006 . Shear mode FBARs as highly sensitive liquid biosensors . Sensors and Actuators A-Physical. , 128 ( 1 ) : 84 – 88 .
  • Wingqvist , G. , Yantchev , V. and Katardjiev , I. 2008 . Mass sensitivity of multilayer thin film resonant BAW sensors . Sensors and Actuators A-Physical. , 148 ( 1 ) : 88 – 95 .
  • Schreiter , M. , Link , M. and Weber , J. 2008 . Application potential of integrated thin film resonators in liquid and gaseous media . Tm-Technisches Messen , 75 ( 2 ) : 120 – 128 .
  • Gabl , R. , Feucht , H. D. , Zeininger , H. , Eckstein , G. , Schreiter , M. , Primig , R. , Pitzer , D. and Wersing , W. 2004 . First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles . Biosensors & Bioelectronics , 19 ( 6 ) : 615 – 620 .
  • Wingqvist , G. , Bjurstrom , J. , Hellgren , A. C. and Katardjiev , I. Immunosensor utilizing a shear mode thin film bulk acoustic sensor . 20th European Conference on Solid-State Transducers . pp. 248 – 252 .
  • Zhang , H. , Marma , M. S. , Bahl , S. K. , Kim , E. S. and McKenna , C. E. 2007 . Sequence specific label-free DNA sensing using film-bulk-acoustic-resonators . IEEE Sensors Journal , 7 ( 11–12 ) : 1587 – 1588 .
  • Dickherber , A. , Corso , C. D. and Hunt , W. D. 2008 . Optimization and characterization of a ZnO biosensor array . Sensors and Actuators , AV144 : 7 – 12 .
  • Zhang , H. , Marma , M. S. , Kim , E. S. , McKenna , C. E. and Thompson , M. E. 2007 . Mercuric ion sensing by a film bulk acoustic resonator . IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control , 54 ( 9 ) : 1723 – 1725 .
  • Wingqvist , G. , Bjurstrom , J. , Liljeholm , L. , Yantchev , V. and Katardjiev , I. 2007 . Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media . Sensors and Actuators B-Chemical , 123 ( 1 ) : 466 – 473 .
  • Link , M. , Weber , J. , Schreiter , M. , Wersing , W. , Elmazria , O. and Alnot , P. Sensing characteristics of high-frequency shear mode resonators in glycerol solutions . 19th Eurosensors Conference . pp. 372 – 378 .
  • Lin , A. , Yu , H. , Waters , M. S. , Kim , E. S. and Goodman , S. D. Explosive trace detection with FBAR-based sensor . 2008 21st IEEE International Conference on Micro Electro Mechanical Systems - MEMS 1908 . pp. 208 – 211 .
  • Campanella , H. , Esteve , J. , Montserrat , J. , Romano-Rodriguez , A. , Uranga , A. , Abadal , G. and Barniol , N. Sensitivity considerations in localized mass detection based on thin-film bulk acoustic wave resonators . IEEE Ultrasonics Symposium . pp. 1828 – 1831 .
  • Campanella , H. , Uranga , A. Romano-Rodriguez , A. Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects . 20th Eurosensors Conference . pp. 322 – 328 .
  • Ruby , R. C. , Bradley , P. , Oshmyansky , Y. , Chien , A. and Larson , J. D. Thin film bulk wave acoustic resonators (FBAR) for wireless applications . Proceedings of IEEE 2001 Ultrasonics Symposium . pp. 813 – 821 .
  • Otis , B. P. and Rabaey , J. M. 2003 . A 300-μ W 1.9-GHz CMOS oscillator utilizing micromachined resonators . IEEE Journal of Solid-State Circuits , 38 : 1271 – 1274 .
  • Yun , S. J. , Shin , S. B. , Choi , H. C. and Lee , S. G. 2005 . A 1 mW current-reuse CMOS differential LC-VCO with low phase noise . IEEE ISSCC, Digest of Technical Papers , 1 : 540 – 616 .
  • Chee , Y. H. , Niknejad , A. M. and Rabaey , J. A sub-100 μW 1.9 GHz CMOS oscillator using FBAR resonator. Digest of Papers, 2005 Radio . Frequency Integrated Circuits Symposium (RFIC) . pp. 123 – 126 .
  • Ostman , K. B. , Sipila , S. T. , Uzunov , I. S. and Tchamov , N. T. 2006 . Novel VCO architecture using series above-IC FBAR and parallel LC resonance . IEEE Journal of Solid-State Circuits , 41 ( 10 ) : 2248 – 2256 .
  • ElBarkouky , M. , Wambacq , P. and Rolain , Y. A low-power 6.3 GHz FBAR overtone-based oscillator in 90 nm CMOS technology . Conference on Ph D Research in MicroElectronics and Electronics . pp. 61 – 64 .
  • Ito , H. , Lakdawala , H. , Ravi , A. , Pellerano , S. , Ruby , R. , Soumyanath , K. and Masu , K. A 1.7-GHz 1.5-mW Digitally-Controlled FBAR Oscillator with 0.03-ppb Resolution . 34th European Solid-State Circuits Conference . pp. 98 – 101 .
  • Lee , H. , Park , J. , Lee , K. , Ko , Y. and Bu , J. 2005 . Silicon bulk micromachined high q film bulk acoustic resonator devices with mo/aln/mo structures . Integrated Ferroelectrics , 69 : 323 – 332 .
  • Yu , Y. , Ren , T. L. and Liu , L. T. 2005 . High quality silicon-based aln thin films for MEMS application . Integrated Ferroelectrics , 69 : 367 – 374 .
  • Dubois , M. A. , Carpentier , J. F. , Vincent , P. , Billard , C. , Parat , G. , Muller , C. , Ancey , P. and Conti , P. 2006 . Monolithic above-IC resonator technology for integrated architectures in mobile and wireless communication . IEEE Journal of Solid-State Circuits , 41 : 7 – 16 .
  • Park , Y. , Kim , E. K. , Lee , T. Y. and Song , J. T. 2004 . The modeling and fabricating of film bulk acoustic resonators using sputtered PZT films with various thickness . Integrated Ferroelectrics , 66 ( 12 ) : 187 – 194 .
  • Larson , J. D. , Bradley , P. D. , Wartenberg , S. and Ruby , R. C. Modified butterworth-van dyke circuit for FBAR resonators and automated measurement system . IEEE Ultrasonics Symposium . pp. 863 – 868 .
  • Ueda , M. , Nishihara , T. , Tsutsumi , J. , Taniguchi , S. , Yokoyama , T. , Inoue , S. , Miyashita , T. and Satoh , Y. 2005 . High-Q resonators using FBAR/SAW technology and their applications . IEEE MTT-S Dig , 1 : 209 – 212 .
  • Karanicolas , A. N. A 2.7-v 900-mhz cmos lna and mixer . 1996 International Solid-State Circuits Conference (ISSCC) . pp. 1939 – 1944 .
  • Hajimiri , A. and Lee , T. H. 1998 . A general theory of phase noise in electrical oscillators . IEEE Journal of Solid-State Circuits , 33 : 179 – 194 .

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