REFERENCES
- Polla , D. L. 1995 . Microelectromechanical systems based ferroelectric thin films . Microelectronic Eng. , 29 : 51 – 58 .
- Whatmore , R. W. 1999 . Ferroelectrics, microsystems and nanotechnology . Ferroelectrics , 225 : 179 – 192 .
- Jenkins , D. F. , Clegg , W. W. , Velu , G. , Cattan , E. and Remiens , D. 1999 . The characterization of PZT films of different orientations for MEMS applications . Ferroelectrics , 224 : 259 – 266 .
- Kholkin , A. L. , Brooks , K. G. , Taylor , D. V. , Hiboux , S. and Setter , N. 1998 . Self-polarization effect in Pb(Zr,Ti)O3 thin films . Integr. Ferroelectrics , 22 : 525 – 533 .
- Bruchhaus , R. , Pitzer , D. , Schreiter , M. and Wersing , W. 1999 . Optimized PZT thin films for pyroelectric IR detector arrays . J. of Electroceramics , 3 : 151 – 162 .
- Gerlach , G. , Suchaneck , G. , Kohler , R. , Sandler , T. , Padmini , P. , Krawietz , R. , Pompe , W. , Frey , J. , Jost , O. and Schonecker , A. 1999 . Properties of sputter and sol-gel deposited PZT thin films for sensor and actuator applications: preparation, stress and space charge distribution, self poling . Ferroelectrics , 230 : 109 – 114 .
- Afanasjev , V. P. , Petrov , A. A. , Pronin , I. P. , Tarakanov , E. A. , Kaptelov , E. Ju. and Graul , J. 2001 . Polarization and self-polarization in PZT thin films . J.Phys.D.: Condens. Matter. , 13 : 8755 – 8763 .
- Bogomolov , A. A. , Sergeeva , O. N. , Kiselev , D. A. , Kaptelov , E. Yu. and Pronin , I. P. 2005 . Special features in the pyroelectric properties of PZT films containing excess lead oxide . Tech. Phys. Lett. , 31 : 468 – 471 .
- Harmagea , C. , Pignolet , A. , Alexe , M. and Gusele , M. 2000 . Quantitative ferroelectric characterization of single submicrons grains in Bi-layered perovskite thin films . Appl. Phys. , A70 : 261 – 267 .
- Yang , J. -S. , Kim , S. -H. , Yeom , J. -H. , Hwang , C. -S. , Yoon , E. , Kim , D.-J. and Ha , J. 2003 . Piezoelectric and pyroelectric properties of Pb(Zr,Ti)O3 films for micro-sensors and actuators . Integr. Ferroelectrics. , 54 : 515 – 525 .