References
- Reedy , R. , Cable , J. , Kelly , D. , Stuber , M. , Wright , F. and Wu , G. 2000 . UTSi CMOS: A Complete RF SOI Solution . Analog Integrated Circuits and Signal Processing , 25 : 171 – 179 .
- Lee , T.-H. , Huang , C.-H. , Yang , Y.-Y. , Li , P.-W. , Suryasindhu , T. and Lee , S. 2007 . Fabrication of a Nanoscale Single-Crystalline Silicon Thin Film on Insulator . Electrochemical and Solid-State Letters , 10 : K17 – K19 . January 1
- Bruel , M. 1995 . Silicon on insulator material technology . Electronics Letters , 31 : 1201 – 1202 .
- Lu , X. , Iyer , S. S. K. , Hu , C. , Cheung , N. W. , Min , J. Fan , Z. 1997 . Ion-cut silicon-on-insulator fabrication with plasma immersion ion implantation . Applied Physics Letters , 71 : 2767 – 2769 .
- Dross , F. , Robbelein , J. , Vandevelde , B. , Van Kerschaver , E. , Gordon , I. Beaucarne , G. 2007 . Stress-induced large-area lift-off of crystalline Si films . Applied Physics A: Materials Science & Processing , 89 : 149 – 152 .
- Vaes , J. , Masolin , A. , Pesquera , A. and Dross , F. 2010 . SLiM-cut thin silicon wafering with enhanced crack and stress control, 777212 – 11 . San Diego, California , , USA
- Murray , J. and McAlister , A. 1984 . The Al-Si (Aluminum-Silicon) system . Journal of Phase Equilibria , 5 : 4 – 84 .