References
- K. Morito, et al. Electric field induced piezoelectric resonance in the micrometer to millimeter waveband in a thin film SrTiO3 capacitor. J. Appl. Phys. 94 (8), 5199–5205 (2003).
- S. Gevorgian, A. Vorobiev, and T. Lewin. DC field and temperature dependent acoustic resonances in parallel-plate capacitors based on SrTiO3 and Ba0.25Sr0.75TiO3 films: Experiment and modeling. J. Appl. Phys. 99 (12), 4112 (2006).
- Tappe, S., U. Bottger, and R. Waser. Electrostrictive resonances in (Ba0.7Sr0.3)TiO3 thin films at microwave frequencies. Appl. Phys. Lett. 85 (4), 624–626 (2004).
- A. Noeth, T. Yamada, Vladimir O. Sherman, P. Muralt, Alexander K. Tagantsev, and N. Setter. Tuning of direct current bias-induced resonances in micromachined Ba0.3Sr0.7TiO3 thin-film capacitors. J. Appl. Phys. 102 (11), 4110 (2007).
- Toonen, Ryan C., and M. W. Cole. Third-order electric-field-induced dipolar resonances from patterned barium-strontium-titanate thin-films. Appl. Phys. Lett. 100 (22), 222908 (2012).
- X. Zhu, V. Lee, J. Phillips, and A. Mortazawi. An intrinsically switchable FBAR filter based on barium titanate thin films. IEEE Microw. Wirel. Compon. Lett. 19 (6), 359–361 (2009).
- X. Zhu, V. Lee, J. Phillips, and A. Mortazawi. Intrinsically switchable contour mode acoustic wave resonators based on barium titanate thin films. In Microwave Symposium Digest, 2009. MTT'09. IEEE MTT-S International, pp. 93–96. IEEE, 2009.
- M. Capanu, Andrew Cervin-Lawry, and M. Zelner. Electrostrictive resonance suppression for tunable capacitors. U.S. Patent No. 8,693,162. 8 Apr. 2014.
- A. Deleniv, Pär Rundqvist, A. Vorobiev, E. Kollberg, and S. Gevorgian. Experimental characterization of the 3rd order nonlinearities in thin film parallel-plate ferroelectric varactors. In 2007 IEEE/MTT-S International Microwave Symposium, pp. 683–686. IEEE, 2007.
- Cole, M. W., and R. G. Geyer. The dependence of dielectric properties on compositional variation for tunable device applications. Mech. Mater. 36 (10), 1017–1026 (2004).
- Chase, David R., Lee-Yin Chen, and Robert A. York. Modeling the capacitive nonlinearity in thin-film BST varactors. IEEE Trans. Microw. Theory Tech. 53 (10), 3215–3220 (2005).
- Seo, Yong-Jin, and Woo-Sun Lee. Chemical mechanical polishing of Ba0.6Sr0.4TiO3 film prepared by sol–gel method. Microelectron. Eng. 75 (2), 149–154 (2004).
- L. Han, Qing-An Huang, and Xiao-Ping Liao. An inline-type microwave power sensor based on MEMS technology. In 2006 5th IEEE Conference on Sensors, pp. 334–337. IEEE, 2006.
- Z. Zhang, and X. Liao. An inline insertion microwave MEMS power sensor based on GaAs MMIC technology with ultra reflection losses. In IEEE SENSORS 2014 Proceedings, pp. 1463–1466. IEEE, 2014.
- N. Parsa, et al. Microwave power detection from an anharmonic dipolar resonance. Microwave Symposium (IMS), 2016 IEEE MTT-S International. IEEE, 2016.