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Integrated Ferroelectrics
An International Journal
Volume 3, 1993 - Issue 3
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Original Articles

Dielectric breakdown in high-ε films for ULSI DRAMs

, , &
Pages 225-243 | Received 10 Sep 1992, Accepted 20 Mar 1993, Published online: 19 Aug 2006

References

  • Waser , R. and Klee , M. 1991 . Proc. 3rd Int. Symp. Integrated Ferroelectrics (ISIF '91) . April 1991 , Colorado Springs, CO.
  • 1992 . Integrated Ferroelectrics , 2 : 288
  • Melnick , B. M. , Scott , J. F. , Araujo , C. A. and McMillan , L. D. 1992 . Ferroelectrics Edited by: Schmidt , V. H. in press; special Von Hippel Issue
  • Scott , J. F. , Paz de Araujo , C. A. and McMillan , L. D. 1992 . Condensed Matter News , 1 : 16
  • Moazzami , R. , Hu , C. and Shepherd , W. H. 1992 . IEEE Trans. Elec. Dev. , 39 : 2044
  • Carrano , J. , Sudhama , C. , Lee , J. , Tasch , A. and Miller , W. IEDM Conf. Proc. pp. 255
  • O'Dwyer , J. J. 1964 . The Theory of Dielectric Breakdown of Solids , Oxford : Clarendon Press .
  • Neumann , H. and Arlt , G. 1977 . Proc. Int. Sym. Applic. Ferro. , 357 Bethlehem, PA : IEEE .
  • NJ : Piscataway .
  • Davisson , J. W. 1959 . Edited by: Birks , J. B. and Hart , J. Vol. 1 , 59 New York : Academic Press . There are also a number of reviews on electrical breakdown in dielectric insulators in the series Progress in Dielectrics): see
  • Stratton , R. 1961 . Vol. 3 , 233
  • Cooper , R. 1963 . Vol. 5 , 95
  • Croitoru , Z. 1965 . Vol. 6 , 103
  • Mott , N. F. and Gurney , R. W. 1940 . Electronic Processes in Ionic Crystals , London : Oxford Univ. Press .
  • Lampert , M. A. 1956 . Phys. Rev. , 103 : 1648
  • Scott , J. F. , Araujo , C. A. , Melnick , B. M. , McMillan , L. D. and Zulegg , R. 1991 . J. Appl. Phys. , 70 : 382
  • Scott , J. F. and Paz de Araujo , C. A. 1989 . Science , 246 : 1400
  • Melnick , B. M. 1992 . Ph.D. thesis Univ. Colo. .
  • Waser , R. M. , Baiatu , T. and Hardtl , K.-H. 1990 . J. Am. Ceram. Soc. , 73 : 1645
  • 1990 . 73 : 1654
  • 1990 . 73 : 1663
  • Waser , R. M. 1989 . J. Am. Ceram. Soc. , 72 : 2234
  • Chen , X. Kingon , A. I. 1992 . Proc. 4th Int. Symp. Integrated Ferroelectrics (ISIF '92) . March 1992 , Monterey, CA. [Integrated Ferroelec, in press]
  • Plumlee , R. 1967 . Sandia Laboratories Report No. SC-RR-67–730 (unpublished)
  • Von Hippel , A. 1935 . Ergeb. exakt Naturwiss. , 14 : 118
  • 1937 . J. Appl. Phys. , 8 : 815
  • Scott , J. F. , Pouligny , B. , Parris , M. , Dimmler , K. , Butler , D. and Eaton , S. 1990 . J. Appl. Phys. , 62 : 4510
  • Rose , A. 1955 . Phys. Rev. , 97 : 1537 see also the earlier work by
  • Zener , C. 1934 . Proc. Roy. Soc. , A145 : 523
  • Duiker , H. M. and Beale , P. D. 1990 . Phys. Rev. , 41 : 490
  • Duiker , H. M. , Beale , P. D. , Scott , J. F. , Melnick , B. M. , Araujo , C. A. and McMillan , L. D. 1990 . J. Appl. Phys. , 68 : 5783
  • Scott , J. F. , Melnick , B. M. , Araujo , C. A. , McMillan , L. D. and Zuleeg , R. 1991 . Proc. Int. Symp. Integrated Ferroelectrics (ISIF '91) . April 1991 , Colorado Springs, CO.
  • 1992 . Integrated Ferroelectrics , 2 : 176
  • Sze , S. 1981 . Physics of Semiconductor Devices , New York : Wiley .
  • Li , P. and Lu , T. M. 1991 . Phys. Rev. , B43 : 14261
  • Offenbacher , E. L. and Callen , H. B. 1953 . Phys. Rev. , 90 : 401
  • 1953 . 91 : 1580
  • Godefroy , G. 1959 . C. R. Acad. Sci. (Paris) , 249 : 2540
  • Mihara , T. , Watanabe , H. , Yoshimori , H. , Paz de Araujo , C. A. , Melnick , B. M. and McMillan , L. 1992 . Integrated Ferroelectrics , 1 : 268
  • Wang , D. Y. and Umeda , K. 1990 . J. Am. Ceram. Soc. , 73 : 1574
  • Dey , S. K. and Zuleeg , R. 1990 . Ferroelectrics , 109 : 1643
  • Lampert , M. A. and Mark , P. 1970 . Current Injection in Solids , New York : Academic Press .
  • Zheng , Wu and Sayer , M. IEEE Int. Sym. Applic. Ferroelec. (ISAF '92) . Greenville, SC. Edited by: Liu , S. T. pp. 78 (IEEE, in press;paper 5C-10)
  • Chen , X. and Kingon , A. I. private communication
  • Mayer , J. W. , Baron , R. and Marsh , O. J. 1965 . Phys. Rev. , 137 : A286
  • Sudhama , C. , Carrano , J. C. , Parker , L. H. , Chikarmane , V. , Lee , J. C. , Tasch , A. F. , Miller , W. , Abt , N. and Shepherd , W. H. 1990 . MRS Proc. , 200 : 331
  • Nowotny , J. and Sloma , N. 1988 . “Work Function of Oxide Ceramic Materials,” . In Surface and Near-Surface Chemistry of Oxide Ceramic Materials , Edited by: Nowotny , J. and Dufour , L. C. Amsterdam : Elsevier .
  • Hamann , C. , Burghardt , H. and Frauenheim , T. 1988 . Electrical Conduction Mechanisms in Solids , Berlin : VEB Pub. Co. .
  • Ramesh , R. , Inam , A. , Wilkens , B. , Chan , W. K. , Hart , D. L. , Luther , K. and Tarascon , J. M. 1991 . Science , 252 : 944
  • Tredgold , R. H. 1966 . Space Charge Conduction in Solids , 75 – 79 . Amsterdam : Elsevier .
  • Hughes , O. H. , Tredgold , R. H. and Williams , R. H. 1965 . J. Phys. Chem. Sol. ,
  • Branwood , A. , Hughes , O. H. , Hurd , J. D. and Tredgold , R. H. 1962 . Proc. Phys. Soc. , 79 : 1161
  • Bardeen , J. 1947 . Phys. Rev. , 71 : 717
  • Moazzami , R. , Hu , C. and Shepherd , W. H. 1990 . IEEE Elec Dev. Lett. , 11 : 454
  • Parker , L. H. and Tasch , A. F. 1990 . IEEE Circ. Dev. Mag. , : 17
  • Guy , J. L. , Tansley , T. L. , Arafin , P. and Moroney , C. M. MRS Conf. Proc. Vol. 243 , pp. 349
  • Kingon , A. I. , Myers , E. R. and Tuttle , B. , eds. 1992 . Pittsburgh : MRS .
  • Melnick , B. M. , Araujo , C. A. , McMillan , L. D. , Carver arid , D. A. and Scott , J. F. 1991 . Ferroelectrics , 116 : 79
  • Sudhama , C. , Carrano , J. C. , Parker , L. H. , Chikarmane , V. , Lee , J. C. , Tasch , A. F. , Miller , W. , Abt , N. and Shepherd , W. H. 1990 . MRS Conf. Proc. , 200 : 331
  • Myers , E. R. and Kingon , A. I. , eds. 1990 . Pittsburgh : MRS .
  • Gerson , R. and Marshall , T. C. 1959 . J. Appl. Phys. , 30 : 1650
  • Gundel , H. 501 Reference 20
  • Rozenman , G. I. , Okhapkin , V. A. , Chepelev , Yu. L. and Shur , Ya. V. 1984 . JETP Lett. , 39 : 477
  • Biedrzycki , K. 1986 . Phys. Stat. Sol. , A93 : 503
  • Triebwasser , S. 1960 . Phys. Rev. , 118 : 105
  • Lang , S. B. and Qing-rui , Yin . 718 Reference 32
  • Thakoor , S. , Thakoor , A. P. and Bernacki , S. E. 262 Reference 1
  • Thakoor , S. , Lakata , M. and Maserjian , J. (in press)
  • Merz , W. J. 1956 . J. Appl. Phys. , 27 : 938
  • Mihara , T. Araujo , C. A. 1992 . Proc. 4th Int. Symp. Integ. Ferroelectrics . April 1992 , Monterey, CA. (in press)
  • Kaeniz , W. 1955 . Phys. Rev. , 98 : 549
  • Drougard , M. E. , Funk , H. L. and Young , D. R. 1954 . J. Appl. Phys. , 25 : 1166
  • Chynoweth , A. G. 1956 . Phys. Rev. , 102 : 705
  • Zen'iti , K. , Husimi , K. and Kataoka , K. 1957 . J. Phys. Soc. Jpn. , 12 : 432
  • Okazaki , K. , Igarishi , H. , Nagata , K. and Hasegawa , A. 1974 . Ferroelectrics , 7 : 153
  • Levanyuk , A. P. , Uyukin , E. M. , Pashkov , V. A. and Solovyeva , N. M. 1980 . Fiz. Tverd. Tela , 22 : 1161
  • Anikiev , A. , Reznik , L. G. , Umarov , B. S. and Scott , J. F. 1985 . Ferroelectrics Letters , 3 : 89
  • Reznik , L. G. , Anikiev , A. A. , Umarov , B. S. and Scott , J. F. 1985 . Ferroelectrics , 64 : 215
  • Chen , F. S. 1969 . J. Appl. Phys. , 40 : 3389
  • Fridkin , V. 1980 . Ferroelectric Semiconductors , New York : Plenum .
  • Dimos , Duane . 1992 . TMS Conf. March 1992 , San Diego. (in press)
  • Chynoweth , A. G. 1959 . J. Appl. Phys. , 30 : 280
  • Wright , G. T. 1961 . Sol. St. Electronics , Vol. 2 , Oxford : Pergamon .
  • Azuma , M. , Nasu , T. , Katsu , S. , Otsuki , T. and Kano , G. Reference 1, first citation, p. 414. The breakdown field is quoted as 8 MV/cm across a 500 nm PZT film. However, most of the voltage drop was actually across a layer of Ta2O5 that formed on the pure Ta electrodes. With their reported values: V ' 400 V; d(PZT) ' 500 mm; κ(eff) ' 40; we estimate that 90% of the voltage drop was across the 100 nm thick tantalum oxide electrode-layers (of ∊ ≈ 18) and 10% across the PZT film (of ∊ ≈ 300). This yields E B ' 80 MV/m for the PZT
  • Shohata , N. , Matsubara , S. , Miyasaka , Y. and Yonezawa , M. Proc. 6th IEEE Int. Sym. Appl. Ferroelec. June 11 1986 , Bethlehem, PA. pp. 580 Piscataway, NJ : IEEE . published by
  • Naik , I. K. , Sanchez , L. E. , Wu , S.-Y. and Maderic , B. P. 431 Reference 1, first citation
  • Hren , P. D. , Rou , S. H. , Al-Shareef , H. N. , Ameen , M. S. , Auciello , O. and Kingon , A. I. 612 Reference 1, first citation
  • Harmer , M. P. , Hu , Y. H. , Lai , M. and Smyth , D. M. 1983 . Ferroelectrics , 49 : 71
  • Von Hippel , A. 1936 . Z. Phys. , 98 : 580
  • Anderson , J. R. , Brady , G. W. , Merz , W. and Remeika , J. P. 1955 . J. Appl. Phys. , 26 : 1387
  • Scott , J. F. , Godfrey , R. B. , Araujo , C. A. , McMillan , L. D. , Meadows , H. B. and Golabi , M. 569 Reference 32
  • Scott , J. F. and Araujo , C. A. 1989 . Science , 246 : 1400
  • Greener , E. H. and Whitmore , D. H. 1961 . J. Appl. Phys. , 32 : 1320
  • Cardon , G. 1961 . Physica , 27 : 841
  • Von Hippel , A. , Kalnajs , J. and Westphal , W. B. 1962 . J. Phys. Chem. Sol. , 22 : 285
  • Srivastava , K. G. 1960 . Phys. Rev. , 119 : 520
  • van Raalte , J. A. 1965 . J. Appl. Phys. , 36 : 3365
  • Glower , D. D. and Heckman , R. C. 1964 . J. Chem. Phys. , 41 : 877

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