Pimod processing and electrical characterization of ferroelectric thin film capacitors for nonvolatile memories

Charles H.-J. Huang Department of Electrical and Computer Engineering, Rice University, P. O. Box 1892, Houston, TX, 77251, USA; Texas Instruments Inc., P. O. Box 650311, MS 387, Dallas, TX, 75265

He Lin Department of Electrical and Computer Engineering, Rice University, P. O. Box 1892, Houston, TX, 77251, USA; University of Houston, S&R1, Houston, TX, 77004

Thomas A. Rabson Department of Electrical and Computer Engineering, Rice University, P. O. Box 1892, Houston, TX, 77251, USA

References

Rabson , T. A. and Huang , H.-J. C. Proceedings ISIF . Vol. 9 , pp. 2
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Huang , H.-J. C. and Rabson , T. A. 1992 . IEEE Elec. Dev. Lett. , 13 : 609
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Schroder , D. K. 1990 . “ Semiconductor Material and Device Characterization ” . 261 John Wiley & Sons .
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