Composition measurement of paraelectric SrTiO₃ layer

References

• Hashimoto , T. , Aoki , H. , Ikawa , E. , Kikkawa , T. , Yamamichi , S. , Sakuma , T. and Miyasaka , Y. 1992 . Jpn. J. Appl. Phys. Extended Abstracts , 53 : 390
   Google Scholar
• Yamamichi , S. , Sakuma , T. , Takemura , K. and Miyasaka , Y. 1991 . Jpn. J. Appl. Phys. , 30 : 2193
   Web of Science ®Google Scholar
• Kuroiwa , T. , Honda , T. , Watarai , H. and Sato , K. 1992 . Jpn. J. Appl. Phys. , 31 : 3025
   Web of Science ®Google Scholar
• Sakuma , T. , Yamauchi , S. , Matsubara , S. , Yamaguchi , H. and Miyasaka , Y. 1990 . Appl. Phys. Lett. , 57 : 243
   Web of Science ®Google Scholar
• Montaser , A. and Golightly , D. W. , eds. 1987 . “ Inductively Coupled Plasmas in Analytical Atomic Spectrometry ” . New York : VCH Publishers .
   Google Scholar
• Hara , T. and Hayashida , H. 1988 . J. Electrochem. Soc. , 135 : 970
   Web of Science ®Google Scholar
• Hara , T. and Murota , M. 1990 . J. Appl. Phys. , 68 : 183
   Web of Science ®Google Scholar
• Chen , S.-C. , Tamura , H. , Hara , T. , Kinoshita , K. , Inoue , K. , Endo , N. , Washidzu , G. and Nakamura , S. 1992 . Jpn. J. Appl. Phys., Pt. 1 , 31 : 201
   Google Scholar
• Chu , W. K. , Mayer , J. W. and Nicolet , M. A. 1978 . “ Backscattering Spectrometry ” . New York : Academic Press .
   Google Scholar
• Hara , T. and Enomoto , S. 1984 . Proc. 2nd Ion Beam Symp. Hosei Univ. , 33 Tokyo : Hosei Univ. Publishing .
   Google Scholar