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Integrated Ferroelectrics
An International Journal
Volume 10, 1995 - Issue 1-4
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Applications and devices—microwave and diverse

High frequency dielectric properties of thin-film PZT capacitors

W. Williamson Iii Special Purpose Processor Development Group, Mayo Foundation, Rochester, MN, 55905
,
B. K. Gilbert Special Purpose Processor Development Group, Mayo Foundation, Rochester, MN, 55905
,
H. D. Chen Materials Research Laboratory, Pennsylvania State University, University Park, PA, 16802-4801
,
K. R. Udayakumar Materials Research Laboratory, Pennsylvania State University, University Park, PA, 16802-4801
,
L. E. Cross Materials Research Laboratory, Pennsylvania State University, University Park, PA, 16802-4801
&
C. M. Bozler High Speed Microelectronics Group, MIT Lincoln Laboratory, Lexington, MA, 02173-9108
Pages 335-342 | Received 28 Apr 1995, Published online: 19 Aug 2006

References

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  • Dimos , D. , Lockwood , S. J. , Schwartz , R. W. and Rodgers , M. S. 1995 . IEEE Transactions on Components, Packaging, and Manuf. Tech. , 18 ( 1 )
  • Garino , T. , Dimos , D. and Lockwood , S. Proc. of 1994 Intl. Symp. on Microelectronics . pp. 179 – 184 .
  • Udayakumar , K. R. , Chen , J. , Krupanidhi , S. B. and Cross , L. E. Proc. Intl. Symp. on Applications of Ferroelectrics . pp. 741 – 743 .
  • Shimizu , Y. , Udayakumar , K. R. and Cross , L. E. 1991 . J. Amer. Cer. Soc. , 74 ( 12 ) : 3023 – 3027 .
  • Udayakumar , K. R. , Schuele , P. J. , Chen , J. , Krupanidhi , S. B. and Cross , L. E. 1995 . J. Appl. Phys. , 77 ( 8 ) 15 April
  • Mancha , S. 1992 . Ferroelectrics , Vol. 135 : 132 – 137 .
  • Pozar , D. M. 1990 . Microwave Engineering , 231 – 235 . Addison Wesley .

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