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Integrated Ferroelectrics
An International Journal
Volume 12, 1996 - Issue 2-4
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Session III: Thin films

High-deposition-rate growth of PZT thin films by reactive electron beam coevaporation using Ti/Zr alloy

Shoichi Mochizuki Osaka National Research Institute, AIST, Ikeda, Osaka, 563, Japan
,
Toshiyuki Mihara Osaka National Research Institute, AIST, Ikeda, Osaka, 563, Japan
&
Tadashi Ishida Osaka National Research Institute, AIST, Ikeda, Osaka, 563, Japan
Pages 125-130 | Received 27 May 1996, Published online: 19 Aug 2006

References

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  • Tabata , H. , Kawai , T. , Kawai , S. , Murata , O. , Fujioka , J. and Minakata , S. 1991 . Appl. Phys Lett. , 59 : 2354
  • Okamura , T. , Oda , K. , Takada , J. , Osaka , A. , Miura , Y. , Terashima , T. and Bando , Y. 1990 . Nihon Seramikkusu Kyoukai Gakujutu Ronbunshi , 98 : 749 in Japanese
  • Mochizuki , S. , Mihara , T. , Kimura , S. and Ishida , T. 1992 . Ferroelectrics , 134 : 319
  • Mochizuki , S. , Mihara , T. , Kimura , S. and Ishida , T. 1993 . Ferroelectrics , 152 : 121
  • Mochizuki , S. , Mihara , T. and Ishida , T. 1994 . Jpn. J. Appl. Phys. , 33 : 5291

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