References
- Taylor , T. C. and Harper , H. A. presented at Tegal 20th Annual Plasma Seminar Proceedings, San Francisco, Ca. (July, 1994) Chemically Assisted Etching of PZT-Based Ferroelectric Dielectric and Noble Metal Capacitor Electrodes
- Nishioka , Y. , Shiozawa , K. , Oishi , T. , Kanamoto , K. , Tokuda , Y. , Sumitani , H. , Aya , S. , Yabe , H. , Itoga , K. , Hifumi , T. , Marumoto , K. , Kuroiwa , T. , Kawahara , T. , Nishikawa , K. , Oomori , T. , Fujino , T. , Yamamoto , S. , Uzawa , S. , Kimata , M. , Nunoshita , M. and Abe , H. IEDM 95-903, Giga-bit Scale DRAM Cell with New Simple Ru/(Ba, Sr)TiO3/Ru Stacked Capacitors Using X-ray Lithography