Sr₂(Ta, Nb)₂O₇ ferroelectric thin film for ferroelectric memory FET

Yoshikazu Fujimori ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan

Naoki Izumi ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan

Takashi Nakamura ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan

Akira Kamisawa ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan

References

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Sr₂(Ta, Nb)₂O₇ ferroelectric thin film for ferroelectric memory FET

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Sr2(Ta, Nb)2O7 ferroelectric thin film for ferroelectric memory FET

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Sr₂(Ta, Nb)₂O₇ ferroelectric thin film for ferroelectric memory FET