Study on mechanical properties of CoCrFeNiN_x high entropy alloy films based on nanoindentation

References

• Cheng G, Choi KS, Hu X, et al. Determining individual phase properties in a multi-phase Q&P steel using multi-scale indentation tests. Mater Sci Eng A. 2016;652:384–395.
   Web of Science ®Google Scholar
• Zhou PF, Xiao DH, Li G, et al. Nanoindentation creep behavior of CoCrFeNiMn high-entropy alloy under different high-pressure torsion deformations. J Mater Eng Perform. 2019;28:2620–2629.
   Web of Science ®Google Scholar
• Zhang LJ, Yu PF, Cheng H, et al. Nanoindentation creep behavior of an Al0.3CoCrFeNi high-entropy alloy. Metall Mater Trans A. 2016;47A:5871–5875.
   Web of Science ®Google Scholar
• Xu ZL, Zhang H, Li WH, et al. Microstructure and nanoindentation creep behavior of CoCrFeMnNi high entropy alloy fabricated by selective laser melting. Addit Manuf. 2019;28:766–771.
   Web of Science ®Google Scholar
• Ma Y, Peng GJ, Wen DH, et al. Nanoindentation creep behavior in a CoCrFeCuNi high-entropy alloy film with two different structure states. Mater Sci Eng A. 2015;621:111–117.
   Web of Science ®Google Scholar
• Li WB, Henshall JL, Hooper R, et al. The mechanisms of indentation creep. Acta Metall Mater. 1991;39:3099–3110.
   Google Scholar
• Syed-Asif SA, Pethica JB. Nanoindentation creep of single-crystal tungsten and gallium arsenide. Philos Mag A. 1997;76:1105–1118.
   Google Scholar
• Yoo BG, Kim KS, Oh JH, et al. Room temperature creep in amorphous alloys: influence of initial strain and free volume. Scripta Mater. 2010;63:1205–1208.
   Web of Science ®Google Scholar
• Cao QP, Sun LJ, Wang C, et al. Effect of loading rate on creep behavior and shear transformation zone in amorphous alloy thin films, and its correlation with deformation mode transition. Thin Solid Films. 2019;681:23–31.
   Web of Science ®Google Scholar
• Wang YQ, Zhang JY, Wu K, et al. Nanoindentation creep behavior of Cu–Zr metallic glass films. Mater Res Lett. 2017;6(1):22–28.
   Web of Science ®Google Scholar
• Chen R, Cai Z, Pu J, et al. Effects of nitriding on the microstructure and properties of VAlTiCrMo high-entropy alloy coatings by sputtering technique. J Alloys Compd. 2020;827:153836.
   Web of Science ®Google Scholar
• Chen LQ, Li W, Liu P, et al. Microstructure and mechanical properties of (AlCrTiZrV)Nx high-entropy alloy nitride films by reactive magnetron sputtering. Vacuum. 2020;181:109706.
   Web of Science ®Google Scholar
• Cui PP, Li W, Liu P, et al. Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films. J Alloys Compd. 2020;834:155063.
   Web of Science ®Google Scholar
• Sha CH, Zhou ZF, Xie ZH, et al. FeMnNiCoCr-based high entropy alloy coatings: effect of nitrogen additions on microstructural development, mechanical properties and tribological performance. Appl Surf Sci. 2020;507:145101.
   Web of Science ®Google Scholar
• Pogrebnjak AD, Yakushchenko IV, Bagdasaryan AA, et al. Microstructure, physical and chemical properties of nanostructured (Ti-Hf-Zr-V-Nb)N coatings under different deposition conditions. Mater Chem Phys. 2014;147:1079–1091.
   Web of Science ®Google Scholar
• Zhang Y, Zuo TT, Tang Z, et al. Microstructures and properties of high-entropy alloys. Prog Mater Sci. 2014;61:1–93.
   Web of Science ®Google Scholar
• Ren B, Liu ZX, Li DM, et al. Effect of elemental interaction on microstructure of CuCrFeNiMn high entropy alloy system. J Alloy Compd. 2010;493(1–2):148–153.
   Web of Science ®Google Scholar
• Liu L, Zhu JB, Hou C, et al. Dense and smooth amorphous films of multicomponent FeCoNiCuVZrAl high-entropy alloy deposited by direct current magnetron sputtering. Mater Design. 2013;46:675–679.
   Web of Science ®Google Scholar
• Hsueh HT, Shen WJ, Tsai MH, et al. Effect of nitrogen content and substrate bias on mechanical and corrosion properties of high-entropy films (AlCrSiTiZr) 100-xNx. Surf Coat Tech. 2012;206(19–20):4106–4112.
   Web of Science ®Google Scholar
• Sheng W, Yang X, Zhu J, et al. Amorphous phase stability of NbTiAlSiNX high-entropy films. Rare Met. 2018;37(8):1–8.
   Web of Science ®Google Scholar
• Liang SC, Tsai DC, Chang ZC, et al. Structural and mechanical properties of multi-element (TiVCrZrHf)N coatings by reactive magnetron sputtering. Appl Surf Sci. 2011;258(1):399–403.
   Web of Science ®Google Scholar
• Huang CK, Li W, Liu P, et al. Study on microstructure and mechanical properties of AlxCoCrFeNi high entropy thin films prepared by magnetron sputtering. J Funct Mater. 2017;48(6):6144–6148.
   Google Scholar
• Huang CK, Li W, Liu P, et al. Synthesis and mechanical properties of (AlCrTiZrNb)N high entropy alloy films grown by RF magnetron sputtering. Chin J Vac Sci Technol. 2018;38(6):487–496.
   Google Scholar
• Chen TK, Wong MS, Shun TT, et al. Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering. Surf Coat Tech. 2005;200:1361–1365.
   Web of Science ®Google Scholar
• Li RB, Qiao BW, Jiang CX, et al. Influence of N2 content on diffusion barrier property of AlCrTaTiZrMoNx high-entropy alloy nitride film. Mater Prot. 2018;51(1):22–27.
   Google Scholar
• Cheng KH, Lai CH, Lin SJ, et al. Structural and mechanical properties of multi-element (AlCrMoTaTiZr)Nx coatings by reactive magnetron sputtering. Thin Solid Films. 2011;519:3185–3190.
   Web of Science ®Google Scholar
• Wall M, Cahill D, Petrov I, et al. Nucleation kinetics versus nitrogen partial pressure during homoepitaxial growth of stoichiometric TiN(001): a scanning tunneling microscopy study. Surf Sci. 2005;581:L122–L127.
   Web of Science ®Google Scholar
• Huo WY, Fang F, Zhou H, et al. Remarkable strength of CoCrFeNi high-entropy alloy wires at cryogenic and elevated temperatures. Scripta Mater. 2017;141:125–128.
   Web of Science ®Google Scholar
• Wang CL, Zhang M, Nieh TG. Nanoindentation creep of nanocrystalline nickel at elevated temperatures. J Phys D Appl Phys. 2009;42:115405.
   Web of Science ®Google Scholar
• Wang F, Xu KW. Effect of loading rate on nanoindentation creep properties of Al films. Acta Metall Sin. 2004;40(11):1138–1142.
   Web of Science ®Google Scholar
• Zhang Z, Yu ZK, Cheng H, et al. Effect of Al content on microstructure and nanoindentation creep behaviors of AlxFeCoNiCu high-entropy alloys. Hot Working Tech. 2019;48(12):62–65.
   Google Scholar
• Zheng HW, Shu XY, Li Y, et al. Nanoindentation mechanical properties of Fe60Cr5Mo2Ni2W2Mn1C4Si7B17 amorphous alloy. Mater Mech Eng. 2018;42(12):36–41.
   Google Scholar
• Ma Y, Peng GJ, Feng YH, et al. Nanoindentation investigation on the creep mechanism in metallic glassy films. Mater Sci Eng A. 2016;651:548–555.
   Web of Science ®Google Scholar
• Chen YH, Huang JC, Wang L, et al. Effect of residual stresses on nanoindentation creep behavior of Zr-based bulk metallic glasses. Intermetallics. 2013;41:58–62.
   Web of Science ®Google Scholar
• Yoo BG, Oh JH, Kim YJ, et al. Nanoindentation analysis of time-dependent deformation in as-cast and annealed Cu-Zr bulk metallic glass. Intermetallics. 2010;18:1898–1901.
   Web of Science ®Google Scholar
• Xu HY, Ke HB, Huang HG, et al. Nanoindentation creep behavior of U65Fe30Al5 amorphous alloy. Acta Metall Sin. 2017;53(7):817–823.
   Web of Science ®Google Scholar