RECENT DEVELOPMENTS IN MICRO AND NANOSCALE THERMOMETRY

References

• Majumdar , A. 1999 . Scanning Thermal Microscopy . Ann. Rev. Mater. Sci. , 29 : 505 – 585 .
   Web of Science ®Google Scholar
• Binnig , G. , Quate , C. F. and Gerber , Ch. 1986 . Atomic Force Microscope . Phys. Rev. Lett. , 56 : 930 – 933 .
   PubMed Web of Science ®Google Scholar
• R. J. Pylkki, P. J. Moyer, and P. E. West, Scanning Near-Field Optical Microscopy and Scanning
   Google Scholar
• Thermal Microscopy, Jpn. J. Appl. Phys., vol. 33, pp. 3785-3790, 1994.
   Google Scholar
• Luo , K. , Z. SM , Lai , J. and Majumdar , A. 1996 . Nanofabrication of Sensors on Cantilever Probe Tips for Scanning Multiprobe Microscopy . Appl. Phys. Lett. , 68 : 325 – 327 .
   Web of Science ®Google Scholar
• Luo , K. , Shi , Z. , Varesi , J. and Majumdar , A. 1997 . Sensor Nanofabrication, Performance, and Conduction Mechanisms in Scanning Thermal Microscopy . J. Vacuum Sci. Technol. B , 15 : 349 – 360 .
   Web of Science ®Google Scholar
• Leinhos , T. , Stopka , M. and Oesterschulze , E. 1998 . Micromachined Fabrication of Si Cantilevers with Schottky Diodes Integrated in the Tip . Appl. Phys. A , 66 : S65 – S69 .
   Google Scholar
• Y. Zhang, Y. Zhang, J. Blaser, T. S. Sriram, A. Enver, and R. B. Marcus, A Thermal Microprobe Fabricated with Wafer-Stage Processing, Rev. Sci. Instrum., vol. 69, pp. 2081-2084.
   Google Scholar
• L. Shi, O. Kwon, G. Wu, and A. Majumdar, Quantitative Thermal Probing of Devices at Sub-100 nm Resolution, IEEE Proc. Int. Reliab. Physics Symp., p. 394, 2000.
   Google Scholar
• Igeta , M. , Banerjee , K. , Wu , G. , Hu , C. and Majumdar , A. 2000 . Thermal Characteristics of Submicron Vias Studied by Scanning Joule Expansion Microscopy . IEEE Electron Device Lett. , 21 : 224 – 226 .
   Google Scholar
• Shi , L. , Plyasunov , S. , Bachtold , A. , McEuen , P. L. and Majumdar , A. 2000 . Scanning Thermal Microscopy of Carbon Nanotubes Using Batch Fabricated Probes . Appl. Phys. Lett. , 77 : 4295 – 4297 .
   Web of Science ®Google Scholar
• Grahn , H. T. , Maris , H. J. and Tuac , J. 1989 . Picosecond Ultrasonics . IEEE J. Quantum Electron. , 25 : 2562 – 2569 .
   Web of Science ®Google Scholar
• Morath , C. J. and Maris , H. J. 1996 . Phonon Attenuation in Amorphous Solids Studied by Picosecond Ultrasonics . Phys. Rev. B , 54 : 203 – 213 .
   Web of Science ®Google Scholar
• H. J. Maris, Picosecond Ultrasonics, Sd. Am., p. 86, January 1998.
   Google Scholar
• Binnig , G. , Rohrer , H. , Gerber , Ch. and Weibel , E. 1982 . Surface Studies by Scanning Tunneling Microscopy . Phys. Rev. Lett. , 49 : 57 – 61 .
   Web of Science ®Google Scholar
• Williams , C. C. and Wickramasinghe , H. K. 1986 . Scanning Thermal profiler . Appl. Phys. Lett. , 49 : 1587 – 1589 .
   Web of Science ®Google Scholar
• Mills , G. , Zhou , H. , Midha , A. , Donaldson , L. and Weaver , J. M. R. 1998 . Scanning Thermal Microscopy Using Batch Fabricated Thermocouple Probes . Appl. Phys. Lett. , 72 : 2900 – 2902 .
   Web of Science ®Google Scholar
• Shi , L. , Kwon , O. , Miner , A. and Majumdar , A. 2001 . Design and Batch-Fabrication of Probes for Sub-100 nm Quantitative Scanning Thermal Microscopy . J. MEMS , 10 : 370 – 378 .
   Google Scholar
• Fletcher , D. A. , Crazier , K. B. , Quate , C. F. , Kino , G. S. , Goodson , K. E. , Simanovskii , D. and Palanker , D. V. 2000 . Near-Field Infrared Imaging with a Microfabricated Solid Immersion Lens . Appl. Phys. Lett. , 77 : 2109 – 2111 .
   Google Scholar
• Nonnenmacher , M. and Wickramasinghe , H. K. 1992 . Scanning Probe Microscopy of Thermal Conductivity and Substrate Properties . Appl. Phys. Lett. , 61 : 168 – 170 .
   Web of Science ®Google Scholar
• Majumdar , A. , Carrejo , J. P. and Lai , J. 1993 . Thermal Imaging Using the Atomic Force Microscope . Appl. Phys. Lett. , 62 : 2501 – 2503 .
   Web of Science ®Google Scholar