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Articles

Deterministic removal of atmospheric pressure plasma polishing based on the lucy–richardson algorithm

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References

  • Akhsakhalyan, A.A.; Akhsakhalyan, A.D.; Zorina, M.V.; Kharitonov, A.I. (2011) A method for measuring the shape of a surface of an ellipsoid of rotation on a Talysurf CCI 2000 interference microscope. Bulletin of the Russian Academy of Sciences Physics, 75(1): 97–99.
  • Amnieh, S.K.; Mosaddegh, P.; Tehrani, A.F. (2017) Study on magnetic abrasive finishing of spiral grooves inside of aluminum cylinders. International Journal of Advanced Manufacturing Technology, 91(5–8): 2885–2894.
  • Castelli, M.; Jourdain, R.; Morantz, P.; Shore, P. (2012) Rapid optical surface figuring using reactive atom plasma. Precision Engineering, 36(3): 467–476.
  • Chen, F.; Miao, X.; Tang, Y.; Yin, S. (2016) A review on recent advances in machining methods based on abrasive jet polishing (AJP). International Journal of Advanced Manufacturing Technology, 90(1–4): 785–799.
  • Chen, J.; Li, B.; Zhang, J. (2017) Modelling and application of particle distribution for atmospheric plasma excitation. International Journal of Nanomanufacturing, 13(1): 43–56.
  • Deng, H.; Endo, K.; Yamamura, K. (2017) Damage-free finishing of CVD-SiC by a combination of dry plasma etching and plasma-assisted polishing. International Journal of Machine Tools and Manufacture, 115: 38–46.
  • Deng, H.; Endo, K.; Yamamura, K. (2015) Competition between surface modification and abrasive polishing: a method of controlling the surface atomic structure of 4H-SiC (0001). Scientific Reports volume 5, Article number: 8947, Scientific Reports.
  • Deng, H.; Yamamura, K. (2013) Atomic-scale flattening mechanism of 4H-SiC (0 0 0 1) in plasma assisted polishing. CIRP Annals – Manufacturing Technology, 62(1): 575–578.
  • Deng, W.J.; Zheng, L.G.; Shi, Y.L.; Wang, X.K.; Zhang, X.J. (2007) Dwell time algorithm based on matrix algebra and regularization method. Optics and Precision Engineering, 15(7): 1009–1015.
  • Feng, Y.; Wu, H.; Cheng, H. (2016) Tool removal function modeling and processing parameters optimization for bonnet polishing. International Journal of Optomechatronics, 10(3–4): 141–153.
  • Guo, P.; Fang, H.; Yu, J. (2006). Edge effect in fluid jet polishing. Applied Optics, 45(26): 6729–6735.
  • Jia, G.L.; Li, B.; Zhang, J.F. (2016) Study on influence of silicon crystal dislocation on removal in atmospheric pressure plasma polishing. Materials Science Forum, 878: 83–88.
  • Jourdain, R.; Castelli, M.; Shore, P.; Sommer, P.; Proscia, D. (2013) Reactive atom plasma (RAP) figuring machine for meter class optical surfaces. Production Engineering, 7(6): 665–673.
  • Ke, X.L.; Wang, C.J.; Guo, Y.B. (2016) Modeling of tool influence function for high-efficiency polishing. International Journal of Advanced Manufacturing Technology, 84(9–12): 2479–2489.
  • Lee, H.; Yang, M. (2001) Dwell time algorithm for computer-controlled polishing of small axis-symmetrical aspherical lens mold. Optical Engineering, 40(9): 1936–1943.
  • Liu, Y.; Cheng, H.; Dong, Z.; Tam, H.Y. (2014) Edge effect of optical surfacing process with different data extension algorithms. Frontiers of Optoelectronics, 7(1): 77–83.
  • Lucy, L.B. (1974) An iterative technique for the rectification of observed distributions. Astronomical Journal, 79(6): 745–749.
  • Sano, Y.; Nishikawa, H.; Okada, Y.; Yamamura, K.; Matsuyama, S.; Yamauchi, K. (2014) Dicing of SiC wafer by atmospheric-pressure plasma etching process with slit mask for plasma confinement. Materials Science Forum, 778-780: 759–762.
  • Shu, L.; Wu, F.; Shi, C. (2012) Optimization of the edge extension in dwell time algorithm for ion beam figuring. International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 8416: Article no. 84162M.
  • Subrahmanyan, P.K.; Gardopée, G. (2008) Reactive atom plasma (RAP) processing of mirrors for astronomy. Proceedings of SPIE, 7018: Article no. 701809.
  • Su, X.; Wu, Y.; Zhang, P.; Xin, Q.; Wang, B. (2016) Development of atmospheric pressure plasma processing machine tool for large aperture optics. Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology, 9683: Article no. 96830O.
  • Takino, H.; Shibata, N.; Itoh, H.; Kobayashi, T.; Nemoto, K.; Fujii, T.; Goto, N.; Yamamura, K.; Sano, Y.; Mori, Y. (2006) Fabrication of small complex-shaped optics by plasma chemical vaporization machining with a microelectrode. Applied Optics, 45(23): 5897–5902.
  • Thomas, A.; Böhm, G. (2012) Application of atmospheric plasma jet machining (PJM) for effective surface figuring of SiC. Precision Engineering, 36(4): 546–553.
  • Wang, L.; Zhou, P.; Yan, Y.; Zhang, B.; Kang, R.; Guo, D. (2017) Chemical-mechanical wear of monocrystalline silicon by a single pad asperity. International Journal of Machine Tools and Manufacture, 120: 61–71.
  • Xin, Q.; Li, N.; Wang, J.; Wang, B.; Li, G.; Ding, F., et al. (2015) Surface roughening of ground fused silica processed by atmospheric inductively coupled plasma. Applied Surface Science, 341: 142–148.
  • Xie, X.; Zhou, L.; Dai, Y.; Li, S. (2011) Ion beam machining error control and correction for small scale optics. Applied Optics, 50(27): 5221–5227.
  • Zhang, J.; Li, B.; Dang, W.; Wang, Y. (2013) Topography-selective removal of atmospheric pressure plasma polishing. Lecture Notes in Mechanical Engineering.
  • Zhang, J.F.; Wang, B.; Dong, S. (2007) The design of an atmospheric pressure plasma torch used for polishing ultra-smooth surfaces. Key Engineering Materials, 364–366: 340–345.
  • Zhang, J.F.; Wang, B.; Dong, S. (2008) Analysis of factors impacting atmospheric pressure plasma polishing. International Journal of Precision Engineering and Manufacturing, 9(2): 39–43.
  • Zhang, J.; Dang, W.; Li, B.; Zhu, X. (2014) Improvement of plasma jet in atmospheric pressure plasma polishing. International Journal of Manufacturing Research, 9(3): 245–257.

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