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Articles

Analysis and monitoring of mode transitions during afm nanomachining of IZO-Coated pyrex glass

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References

  • Ahn, B.W.; Lee, S.H. (2009) Characterization and acoustic emission monitoring of AFM nanomachining. Journal of Micromechanics and Microengineering, 19(4): 045028.
  • Bifano, T.G.; Dow, T.A.; Scattergood, T.G. (1991) Ductile-regime grinding: a new technology for machining brittle materials. Journal of Engineering for Industry, 113(22): 184–189.
  • Bull, S.J.; Berasetegui, E.G. (2006) An overview of the potential of quantitative coating adhesion measurement by scratch testing. Tribology International, 39: 99–114.
  • Chen, X.; Vlassak, J. J. (2001) Numerical study on the measurement of thin film mechanical properties by means of nanoindentation. Journal of Materials Research, 16(10): 2974–2982.
  • Dornfeld, D.; Lee, Y.; Chang, A. (2003) Monitoring of ultra-precision machining processes. International Journal of Advanced Manufacturing Technology, 21: 571–578.
  • Elwenspoek, M.; Wiegerink, R. (2001) Mechanical Microsensors. Springer-Verlag, Berlin.
  • Fang, F.Z.; Wu, H.; Liu, Y.C. (2005) Modeling and experimental investigation on nanometric cutting of monocrystalline silicon. International Journal of Machine Tools and Manufacture, 45(15): 1681–1686.
  • Fang, T.H.; Weng, C.I.; Chang, J.G. (2000) Machining characterization of the nano-lithography process using atomic force microscopy. Nanotechnology, 11(3): 181–187.
  • Holmberg, K.; Matthews, A.; Ronkainen, H. (1998) Coatings tribology-contact mechanisms and surface design. Tribology International, 31: 107–120.
  • Kapakijian, S.; Schmid, R. (2009) Manufacturing Engineering and Technology, 6th edition, Prentice Hall, New York.
  • Komanduri, R.; Chandrasekaran, N.; Raff L.M. (2000) MD simulation of nanometric cutting of single crystal aluminum effect of crystal orientation and direction of cutting. Wear, 242: 60–88.
  • Koshimizu, S.; Otsuka, J. (2001) Detection of ductile to brittle transition in micro indentation and micro scratching of single crystal silicon using acoustic emission. Machining Science and Technology, 5: 101–114.
  • Lee, S.H. (2012) Analysis of ductile mode and brittle transition of AFM nanomachining of Silicon. International Journal of Machine Tools and Manufacture, 61: 6171–6179.
  • Li, X; Bhushan, B. (2001) Micro/nanomechanical and tribological studies of bulk and thin-film materials used in magnetic recording heads. Thin Solid Films, 398–399: 313–319.
  • Li, X; Bhushan, B.; Takashima, K.; Baek, C.W.; Kim, Y.K. (2003) Micro/nanomechanical and tribological studies of bulk and thin-film materials used in magnetic recording heads. Ultramicroscopy, 97: 481–494.
  • Liu, J.B. (1991) Monitoring the precision machining process: Sensors, signal processing and information analysis. Ph.D. Thesis, University of California, Berkeley.
  • Malzbender, J.; With, G.; Toonder, J.M.J. (2000) Determination of the elastic modulus and hardness of sol-gel coatings on glass: influence of indentor geometry. Thin Solid Films, 372: 134–143.
  • McGeough, J.A. (2002) Micromachining of Engineering Materials. Marcel Dekker, New York.
  • Mulliah, D.; Kenny, S.D.; McGee, E.; Smith, R.; Wolf, B. (2006) Atomistic modeling of ploughing friction in silver, iron and silicon. Nanotechnology, 17(8): 1807–1818.
  • Ng, C.K.; Melkote, S.N.; Rahman, M.; Kumar, A.S. (2006) Experimental study of micro-and nano-scale cutting of aluminum 7075-T6. International Journal of Machine Tools and Manufacture, 46(9): 929–936.
  • Oh, J.H.; Lee, S.H. (2011) Prediction of surface roughness in magnetic abrasive finishing using acoustic emission and force sensor data fusion. Proceedings of Institution of Mechanical Engineers Part B: Journal of Engineering Manufacture, 225: 853–865.
  • Santinacci, L.; Zhang, Y.; Schmuki, P. (2006) AFM scratching and metal deposition through insulating layers on silicon. Surface Science, 597: 11–19.
  • Shi, J.; Liu, L.; Li G. (2016) The co-design of interface sensing and tailoring of ultra-thin film with ultrasonic vibration-assisted AFM system. Nanotechnology, 27(23): 235302.
  • Soare, S.; Bull, S.J.; O'Neilb, A.G.; Wright, N.; Horsfall, A.; dos Santos, J.M.M. (2004) Nanoindentation assessment of aluminium metallisation; the effect of creep and pile-up. Surface and Coatings Technology, 177–178: 497–503.
  • Teo, E.H.T.; Bolke, A.; Kalish, R.; Saguy, C. (2011) Nano-patterning of through-film conductivity in anisotropic amorphous carbon induced using conductive atomic force microscopy. Carbon, 49(8): 2679–2682.
  • Xue, B.; Yan, Y.; JiranLi, J.; Yu, B.; Hu, Z.; Zhao, X.; Cai, Q. (2017) Study on the micro-machining process with a micro three-sided pyramidal tip and the circular machining trajectory. Journal of Materials Processing Technology, 217: 122–130.
  • Yan, Y.; Geng, Y.; Hu, Z. (2015) Recent advances in AFM tip-based nanomechanical machining. International Journal of Machine Tools and Manufacture, 99:1–18.
  • Yan, Y.; Sun, T.; Liang, Y.; Dong, S. (2007) Investigation on AFM-based micro/nano-CNC machining system. International Journal of Machine Tools and Manufacture, 47(11): 1651–1659
  • Yan, Y.D.; Sun, T.; Dong, D.; Luo, X.C.; Liang, Y.C. (2006) Molecular dynamics simulation of processing using AFM pin tool. Applied Surface Science, 252: 7523–7531.
  • Zhang, L.; Tanaka, H.L. (1997) Towards a deeper understanding of wear and friction on the atomic scale—a molecular dynamics analysis. Wear, 211: 44–53.
  • Zhang, Y.; Balaur, E.; Schmuki, P. (2006) Nanopatterning of an organic monolayer covered Si (1 1 1) surfaces by atomic force microscope scratching. Electrochimica Acta, 51(18): 3674–3679.
  • Zhao, X.; Bhushan, B. (1998) Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads. Wear, 223: 66–78.

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