Crystallization behaviour of ALD-Ta₂O₅ thin films: the application of in-situ TEM

References

• Lo , S-H , Buchanan , DA , Taur , Y and Wang , W . 1997 . IEEE Electron Device Lett. , 18 : 209
   Web of Science ®Google Scholar
• Kingon , AI , Maria , J-P and Streiffer , SK . 2000 . Nature , 406 : 1032
   PubMed Web of Science ®Google Scholar
• Green , ML , Gusev , EP , Degraeve , R and Garfunkel , EL . 2001 . J. appl. Phys. , 90 : 2057
   Web of Science ®Google Scholar
• Kwon KW Park IS Han DH Kim ES Ahn ST Lee MY paper presented at International Electron Devices Meeting 1994
   Google Scholar
• Chatterjee A Chapman RA Joyner K Totbe M Hattangady S Bevan M Brown GA Yang H He Q Rogers D Fang SJ Kraft R Rotondaro ALP Terry M Brennan K Aur S-W Hu JC Tsai H-L Jones P Wilk G Aoki M Rodder M Chen I-C paper presented at International Electron Devices Meeting 1998
   Google Scholar
• Shinriki , H and Nakata , M . 1991 . IEEE Trans. Electron Devices , 38 : 455
   Web of Science ®Google Scholar
• Kimura , H , Mizuki , J , Kamiyama , S and Suzuki , H . 1995 . Appl. Phys. Lett. , 66 : 2209
   Google Scholar
• Nakagawa , Y and Okada , T . 1990 . J. appl. Phys. , 68 : 556
   Web of Science ®Google Scholar
• Chaneliere , C , Four , S , Autran , JL , Devine , RAB and Sandler , NP . 1998 . J. appl. Phys. , 83 : 4823
   Google Scholar
• Kim , J-W , Nam , S-D , Lee , S-H , Won , S-J , Kim , W-D , Yoo , C-Y , Park , Y-W , Lee , S-I and Lee , M-Y . 2000 . Jap. J. appl. Phys. , 39 : 2094
   Google Scholar
• Chaneliere , C , Autran , JL , Devine , RAB and Balland , B . 1998 . Mater. Sci. Engng R , 22 : 269
   Google Scholar
• Joint Committee on Powder Diffraction Standards Powder Diffraction File, International Center for Diffraction Data Swarthmore Pennsylvania 1974 card 25-922
   Google Scholar
• Stephenson , NC and Ruth , RS . 1971 . Acta crystallogr. , B 27 : 1037
   Google Scholar
• Khitrova , VI and Klechkovskaya , VV . 1980 . Soviet Phys. Crystallogr. , 25 : 669
   Google Scholar
• Joint Committee on Powder Diffraction Standards Powder Diffraction File, International Center for Diffraction Data Swarthmore Pennsylvania 1974 card 18-1304
   Google Scholar
• Sinclair R Min K-H paper presented at the 15th International Congress on Electron Microscopy 2002
   Google Scholar
• Kolmogorov , AN . 1937 . Bull. Acad. Sci. USSR phys. Ser. , 3 : 355
   Google Scholar
• Johnson , AM and Mehl , RF . 1939 . Trans. Am. Inst. Min. metall. Petrol. Engrs , 135 : 417
   Google Scholar
• Avrami , M . 1939 . J. chem. Phys. , 7 : 1103
   Web of Science ®Google Scholar
• Avrami , M . 1940 . J. chem. Phys. , 8 : 212
   Google Scholar
• Avrami , M . 1941 . J. chem. Phys. , 9 : 177
   Web of Science ®Google Scholar
• Christian JW The Theory of Transformations in Metals and Alloys second edn Pergamon London 1981
   Google Scholar
• Heintz , JM , Besson , JJM , Rabardel , L and Bonnet , JP . 1992 . Ceramics Int. , 18 : 263
   Google Scholar
• Yu , N , Simpson , TW , McIntyre , PC , Nastasi , M and Mitchell , IV . 1995 . Appl. Phys. Lett. , 67 : 924
   Web of Science ®Google Scholar
• Leitoili , A , Wakita , A , Sigmon , TW and Gibbons , JF . 1982 . J. appl. Phys. , 53 : 4399
   Google Scholar
• Smith , DA , Tu , KN and Weiss , BZ . 1989 . Ultramicroscopy , 30 : 90
   Google Scholar
• Olson , GL and Roth , JA . 1988 . Mater. Sci. Rep. , 3 : 1
   Google Scholar
• Sinclair , R and parker , MA . 1986 . Nature , 322 : 531
   Google Scholar
• Sinclair , R , Parker , MA and Kim , KB . 1987 . Ultramicroscopy , 23 : 383
   Google Scholar