Diffusion pattern in MSi₂ and M₅Si₃ silicides in group VB (M = V, Nb, Ta) and VIB (M = Mo, W) refractory metal-silicon systems

References

• J.J. Petrovic, R.E. Honnell and W.S. Gibbs, Moly Disilicide Alloy Matrix Composites, U.S. Patent No. 4,970,179, 1990.
   Google Scholar
• A.D. Remenyuk and N.M. Schmidt, Appl. Surf. Sci. 91 (1995) p.352.
   Google Scholar
• J.C. Zhao, M.R. Jackson and L.A. Peluso, Mat. Sci. Eng.: A 372 (2004) p.21.
   Google Scholar
• B.P. Bewlay, M.R. Jackson, J.C. Zhao, P.R. Subramanian, M.G. Mendiratta and J.J. Lewandowski, MRS Bull. 28 (2003) p.646.
   Web of Science ®Google Scholar
• S.Y. Jang, S.M. Lee and H.K. Baik, J. Mater. Sci. Mater. Electron. 7 (1996) p.271.
   Web of Science ®Google Scholar
• K. Holloway and P.M. Fryer, Appl. Phys. Lett. 57 (1990) p.1736.
   Web of Science ®Google Scholar
• T. Laurila, K. Zeng, J.K. Kivilahti, J. Molarius and I. Suni, Thin Solid Films 373 (2000) p.64.
   Web of Science ®Google Scholar
• J.H. Liang and D.S. Chao, Surf. Coat. Technol. 140 (2001) p.116.
   Google Scholar
• C. Gelain, A. Cassuto and P. Le Goff, Oxid. Met. 3 (1971) p.153.
   Google Scholar
• C.K. Hu, M.B. Small and J.E. Lewis, Proceedings of the 3rd IEEE VLSI Multilevel Interconnection Conference, Santa Clara, CA, 1986, p.181.
   Google Scholar
• Y. Yamamoto, H. Miyanaga, T. Amazawa and T. Sakai, IEEE Trans. Electron Devices 32 (1985) p.1231.
   Google Scholar
• S.S. Simeonov, E.I. Kafedjiiska and A.L. Guerassimov, Thin Solid Films 115 (1984) p.291.
   Google Scholar
• V.Q. Ho, J. Electron. Mater. 16 (1987) p.329.
   Google Scholar
• M. Yamana, M. Lamantia, V. Philipsen, S. Wada, T. Nagatomo and Y. Tonooka, Proc. SPIE, 2009, p.7379.
   Google Scholar
• E. Schubert, F. Frost, B. Ziberi, G. Wagner, H. Neumann and B. Rauschenbach, J. Vac. Sci. Technol., B: Microelectron. Nanometer Struct. 23 (2005) p.959.
   Google Scholar
• H. Takenaka, H. Ito, T. Haga, T. Kawamura and J. Synchrot, Radiation 5 (1998) p.708.
   Google Scholar
• M.Z. Alam, B. Venkataraman, B. Sarma, D.K. Das and J. Alloy, J. Alloys Compd. 487 (2009) p.335.
   Google Scholar
• K. Kurokawa, H. Matsuoka and H. Takahashi. High temperature oxidation of MoSi2-WSi2 solid solutions, in High Temperature Corrosion and Protection of Materials 4, Pts 1 and 2, R. Streiff, J. Stringer, R.C. Krutenat, M. Caillet, and R.A. Rapp, eds., Transtec Publications, Zurich-Uetikon, 1997, p. 885.
   Google Scholar
• F. Nava, E. Mazzega, M. Michelini, O. Laborde, O. Thomas, J.P. Senateur and R. Madar, J. Appl. Phys. 65 (1989) p.1584.
   Web of Science ®Google Scholar
• J.K. Yoon, J.Y. Byun, G.H. Kim, J.S. Kim and C.S. Choi, Thin Solid Films 405 (2002) p.170.
   Google Scholar
• J.K. Yoon, J.K. Lee, K.H. Lee, J.Y. Byun, G.H. Kim and K.T. Hong, Intermetallics 11 (2003) p.687.
   Google Scholar
• R.W. Bartlett, P.R. Gage and P.A. Larssen, Jom-J. Met. 16 (1964) p.92.
   Google Scholar
• R.W. Bartlett, P.A. Larssen and P.R. Gage, Trans. Metall. Soc. Aime 230 (1964) p.1528.
   Google Scholar
• F. Christian, H. Sohma, T. Tanaka, H. Tanaka, K. Ohsasa and T. Narita, Mater. Trans. JIM 39 (1998) p.286.
   Web of Science ®Google Scholar
• H.A. Chatilyan, S.L. Kharatyan and A.B. Harutyunyan, Mater. Sci. Eng.: A 459 (2007) p.227.
   Google Scholar
• S.L. Kharatyan, H.A. Chatilyan and G.S. Galstyan, Thin Solid Films 516 (2008) p.4876.
   Google Scholar
• T. Nakanishi, M. Takeyama, A. Noya and K. Sasaki, J. Appl. Phys. 77 (1995) p.948.
   Google Scholar
• S. Matteson, J. Rothi and M.A. Nicolet, Radiat. Eff. 42 (1979) p.217.
   Web of Science ®Google Scholar
• J.Y. Cheng and L.J. Chen, J. Appl. Phys. 69 (1991) p.2161.
   Web of Science ®Google Scholar
• J.Y. Cheng and L.J. Chen, Appl. Phys. Lett. 58 (1991) p.45.
   Web of Science ®Google Scholar
• J.K. Yoon, K.W. Lee, S.J. Chung, I.J. Shon, J.M. Doh, and G.H. Kim, J. Alloys Compd. 420 (2006) p.199.
   Google Scholar
• E. Ma, B.S. Lim, M.A. Nicolet, N.S. Alvi and A.H. Hamdi, J. Electron. Mater. 17 (1988) p.207.
   Google Scholar
• R. Anderson, J. Baglin, J. Dempsey, W. Hammer, F. d’Heurle and S. Petersson, Appl. Phys. Lett. 35 (1979) p.285.
   Google Scholar
• J. Baglin, J. Dempsey, W. Hammer, F. D’Heurle, S. Petersson and C. Serrano, J. Electron. Mater. 8 (1979) p.641.
   Web of Science ®Google Scholar
• X.M. Tao, P. Jund, C. Colinet and J.C. Tedenac, Phys. Rev. B. 80 (2009) p.10.
   Google Scholar
• K.H. Lee, J.K. Yoon, J.K. Lee, J.M. Doh, K.T. Hong and W.Y. Yoon, Surf. Coat. Technol. 187 (2004) p.146.
   Google Scholar
• B.S. Kang, S.M. Lee, J.S. Kwak, D.S. Yoon and H.K. Baik, J. Electrochem. Soc. 144 (1997) p.1807.
   Google Scholar
• H.S. Kim, J.K. Yoon, G.H. Kim, J.M. Doh, S.I. Kwun and K.T. Hong, Intermetallics 16 (2008) p.360.
   Web of Science ®Google Scholar
• F.J.J. van Loo, Prog. Solid State Chem. 20 (1990) p.47.
   Web of Science ®Google Scholar
• U. Gösele and K.N. Tu, J. Appl. Phys. 53 (1982) p.3252.
   Web of Science ®Google Scholar
• F.M. d'Heurle and P. Gas, J. Mater. Res. 1 (1986) p.205.
   Web of Science ®Google Scholar
• C. Milanese, V. Buscaglia, F. Maglia and U. Anselmi-Tamburini, J. Phys. Chem. B 106 (2002) p.5859.
   Web of Science ®Google Scholar
• P.C. Tortorici and M.A. Dayananda, Metall. Mater. Trans. A 30 (1999) p.545.
   Google Scholar
• S. Prasad and A. Paul, J. Phase Equilib. Diffus. 32 (2011) p.212.
   Web of Science ®Google Scholar
• S. Prasad and A. Paul, Acta Mater. 59 (2011) p.1577.
   Web of Science ®Google Scholar
• S. Roy and A. Paul, Philos. Mag. 92 (2012) p.4215.
   Web of Science ®Google Scholar
• S. Prasad and A. Paul, Intermetallics 19 (2011) p.1191.
   Web of Science ®Google Scholar
• S. Roy and A. Paul, Intermetallics 37 (2013) p.83.
   Web of Science ®Google Scholar
• A. Paul, M.J.H. Van Dal, A.A. Kodentsov and F.J.J. Van Loo, Acta Mater. 52 (2004) p.623.
   Web of Science ®Google Scholar
• F. Sauer and V. Freise, Zeitschrift Fur Elektrochemie 66 (1962) p.353.
   Google Scholar
• C. Wagner, Acta Metall. 17 (1969) p.99.
   Google Scholar
• A. Paul, The Kirkendall effect in solid state diffusion, Ph.D. thesis, Technische Universiteit Eindhoven, 2004.
   Google Scholar
• J.R. Manning, Phys. Rev. 124 (1961) p.470.
   Web of Science ®Google Scholar
• J.R. Manning, Acta Metall. 15 (1967) p.817.
   Google Scholar
• A. Paul, A.A. Kodentsov, F.J.J. Van Loo and J. Alloy, J. Alloys Compd. 403 (2005) p.147.
   Web of Science ®Google Scholar
• V.D. Divya, U. Ramamurty and A. Paul, J. Mater. Res. 26 (2011) p.2384.
   Web of Science ®Google Scholar
• C. Milanese, V. Buscaglia, F. Maglia and U. Anselmi-Tamburini, Acta Mater. 50 (2002) p.1393.
   Web of Science ®Google Scholar
• A.A. Kodentsov, A. Paul and F.J.J. van Loo, Zeitschrift für Metallkunde 95 (2004) p. 258.
   Google Scholar
• A.A. Kodentsov, A. Paul and F.J.J. van Loo, Defect Diffus. Forum 258–260 (2006) p.182.
   Google Scholar
• A. Paul, A.A. Kodentsov and F.J.J. van Loo, Intermetallics 14 (2006) p.1428.
   Web of Science ®Google Scholar
• C. Ghosh and A. Paul, Acta Mater. 55 (2007) p.1927.
   Web of Science ®Google Scholar
• C. Ghosh and A. Paul, Acta Mater. 57 (2009) p.493.
   Web of Science ®Google Scholar
• A. Paul, J. Mater. Sci.: Mater. Electron. 22 (2011) p.833.
   Web of Science ®Google Scholar
• M. Salamon, A. Strohm, T. Voss, P. Laitinen, I. Riihimäki, S. Divinski, W. Frank, J. Räisänen and H. Mehrer, Philos. Mag. 84 (2004) p.737.
   Web of Science ®Google Scholar
• M. Salamon and H. Mehrer, Z. Metallk. 96 (2005) p.833.
   Google Scholar
• S. Divinski, M. Salamon and H. Mehrer, Philos. Mag. 84 (2004) p.757.
   Web of Science ®Google Scholar
• I.V. Belova, H. Mehrer and G.E. Murch, Philos. Mag. 91 (2011) p.3727.
   Web of Science ®Google Scholar
• P.B. Fernandes, G.C. Coelho, F. Ferreira, C.A. Nunes and B. Sundman, Intermetallics 10 (2002) p.993.
   Google Scholar
• Z.N. Guo, W.X. Yuan, Y. Sun, Z.F. Cai and Z.Y. Qiao, J. Phase Equilib. Diffus. 30 (2009) p.564.
   Google Scholar
• A.B. Gokhale and G.J. Abbaschian, J. Phase Equilib. 12 (1991) p.493.
   Google Scholar
• M.B. Thieme and S. Gemming, Acta Mater. 57 (2009) p.50.
   Google Scholar
• J.C. Lasjaunias, O. Laborde, U. Gottlieb, R. Madar and O. Thomas, J. Low Temp. Phys. 92 (1993) p.335.
   Google Scholar
• M.E. Schlesinger, H. Okamoto, A.B. Gokhale and R. Abbaschian, J. Phase Equilib. 14 (1993) p.502.
   Google Scholar
• K. Tanaka, K. Nawata, H. Inui, M. Yamaguchi and M. Koiwa, Intermetallics 9 (2001) p.603.
   Web of Science ®Google Scholar
• D.A. Pankhurst, D. Nguyen-Manh and D.G. Pettifor, Phys. Rev. B. 69 (2004) p.9.
   Google Scholar
• X.Y. Zhang, W. Sprengel, K. Blaurock, A.A. Rempel, K.J. Reichle, K. Reimann, H. Inui and H.E. Schaefer, Phys. Rev. B. 66 (2002) p.5.
   Google Scholar
• H. Okamoto, Mo-Si (Molybdenum-Silicon), ASM Int. 32 (2011) p.176.
   Google Scholar
• S. Itoh, Mater. Sci. Eng. B-Solid State Mater. Adv. Technol. 6 (1990) p. 37.
   Google Scholar
• H. Kawanowa and Y. Gotoh, J. Cryst. Growth 197 (1999) p.163.
   Web of Science ®Google Scholar
• C. Herzig and S. Divinski, Intermetallics 12 (2004) p.993.
   Web of Science ®Google Scholar
• A.D. Le Claire, Phys. Chem. – Adv. Treat., Vol. X, Academic Press, New York, 1970. Chapter 5.
   Google Scholar
• S.V. Divinski, S. Frank, U. Södervall and C. Herzig, Acta Mater. 46 (1998) p.4369.
   Google Scholar
• Y. Chen, A.N. Kolmogorov, D.G. Pettifor, J.X. Shang and Y. Zhang, Phys. Rev. B 82 (2010) p.184104.
   Google Scholar