Surface texturisation for the reduction of light reflection in ZnO/Si heterojunction

References

• Abdallah, B., A.K. Jazmati, and R. Refaai. 2017. “Oxygen Effect on Structural and Optical Properties of ZnO Thin Films Deposited by RF Magnetron Sputtering.” Materials Research 20 (3): 607–612. doi: 10.1590/1980-5373-MR-2016-0478.
   Web of Science ®Google Scholar
• Abdur-Rahman, E., I. Alghoraibi, and H. Alkurdi. 2017. “Effect of Isopropyl Alcohol Concentration and Etching Time on Wet Chemical Anisotropic Etching of Low-Resistivity Crystalline Silicon Wafer.” International Journal of Analytical Chemistry 7542870–7542879. doi:10.1155/2017/7542870.
   PubMed Web of Science ®Google Scholar
• Ahn, Cheol Hyoun, Young Yi Kim, Dong Chan Kim, Sanjay Kumar Mohanta, and Hyung Koun Cho. 2009. “A Comparative Analysis of Deep Level Emission in ZnO Layers Deposited by Various Methods.” Journal of Applied Physics 105 (1): 13502. doi: 10.1063/1.3054175.
   Web of Science ®Google Scholar
• Al-Husseini, A.M., and B. Lahlouh. 2017. “Silicon Pyramid Structure as a Reflectivity Reduction Mechanism.” Journal of Applied Sciences 17: 374–383. doi: 10.3923/jas.2017.374.383.
   Google Scholar
• Ayouchi, R., F. Martin, D. Leinen, and J.R. Ramos-Barrado. 2003. “Growth of Pure ZnO Thin Films Prepared by Chemical Spray Pyrolysis on Silicon.” Journal of Crystal Growth 247 (3-4): 497–504. doi:10.1016/S0022-0248(02)01917-6.
   Web of Science ®Google Scholar
• Chang, Y.-M., S.-R. Jian, H.-Y. Lee, C.-M. Lin, and J.-Y. Juang. 2010. “Enhanced Visible Photoluminescence from Ultrathin ZnO Films Grown on Si-Nanowires by Atomic Layer Deposition.” Nanotechnology 21 (38): 385705. doi: 10.1088/0957-4484/21/38/385705.
   PubMed Web of Science ®Google Scholar
• Chattopadhyay, S., Y.F. Huang, Y.J. Jen, A. Ganguly, K.H. Chen, and L.C. Chen. 2010. “Anti-Reflecting and Photonic Nanostructures.” Materials Science and Engineering: R: Reports 69 (1–3): 1–35. doi:10.1016/j.mser.2010.04.001.
   Web of Science ®Google Scholar
• Chebil, W., A. Fouzri, A. Fargi, B. Azeza, Z. Zaaboub, and V. Sallet. 2015. “Characterization of ZnO Thin Films Grown on Different p-Si Substrate Elaborated by Solgel Spin-Coating Method.” Materials Research Bulletin 70: 719–727. doi: 10.1016/j.materresbull.2015.06.003.
   Web of Science ®Google Scholar
• Dou, B., R. Jia, Z. Xing, X. Yao, D. Xiao, Z. Jin, and X. Liu. 2021. “Enhanced Performance of Nanotextured Silicon Solar Cells with Excellent Light-Trapping Properties.” Photonics 8: 272. doi: 10.3390/photonics8070272.
   Web of Science ®Google Scholar
• Ellmer, K., and A. Klein. 2008. Transparent Conductive Zinc Oxide, Basics and Applications in Thin Film Solar Cells. Berlin, Heidelberg: Springer.
   Google Scholar
• Fallahazad, P., Nima Naderi, Mohamad Javad Eshraghi, and Abouzar Massoudi. 2018. “Combination of Surface Texturing and Nanostructure Coating for Reduction of Light Reflection in ZnO/Si Heterojunction Thin Film Solar Cell.” Journal of Materials Science: Materials in Electronics 29 (8): 6289–6296. doi: 10.1007/s10854-018-8608-0.
   Web of Science ®Google Scholar
• Fashina, A., K. Adama, L. Abdullah, C. Ani, O. Oyewole, J. Asare, and V. Anye. 2018. “Atomic Force Microscopy Analysis of Alkali Textured Silicon Substrates for Solar Cell Applications.” 6 (1): 13–17. doi: 10.14419/ijpr.v6i1.8795.
   Google Scholar
• Finch, S.C.B., and K.R. Mcintosh. 2011. “Reflection of Normally Incident Light from Silicon Solar Cells with Pyramidal Texture.” Progress in Photovoltaics: Research and Applications 19: 406–416. doi: 10.1002/pip.1050.
   Web of Science ®Google Scholar
• Gao, W., and Z. Li. 2004. “ZnO Thin Films Produced by Magnetron Sputtering.” Ceramics International 30 (7): 1155–1159. doi: 10.1016/j.ceramint.2003.12.197.
   Web of Science ®Google Scholar
• Gfroerer, T.H. 2006. “Encyclopedia of Analytical Chemistry; Wiley: College D.” Photoluminescence in Analysis of Surfaces and Interfaces, 1–23. doi: 10.1002/9780470027318.a2510.
   Google Scholar
• Green, M.A. 2009. “The Path to 25% Silicon Solar Cell Efficiency: History of Silicon Cell Evolution.” Progress in Photovoltaics: Research and Applications 17: 183–189. doi:10.1002/pip.892.
   Web of Science ®Google Scholar
• Ismail, A., and M.J. Abdullah. 2013. “The Structural and Optical Properties of ZnO Thin Films Prepared at Different RF Sputtering Power.” Journal of King Saud University – Science 25 (3): 209–215. doi: 10.1016/j.jksus.2012.12.004.
   Google Scholar
• Jeong, S.H., J.K. Kim, B.S. Kim, S.H. Shim, and B.T. Lee. 2004. “Characterization of SiO2 and TiO2 Films Prepared Using rf Magnetron Sputtering and Their Application to Anti-Reflection Coating.” Vacuum 76 (4): 507–515. doi:10.1016/j.vacuum.2004.06.003.
   Web of Science ®Google Scholar
• Ju, M., N. Balaji, C. Park, H.T.T. Nguyen, J. Cui, D. Oh, M. Jeon, J. Kang, G. Shim, and J. Yi. 2016. “Adv, R. The Effect of Small Pyramid Texturing on the Enhanced Passivation and Efficiency of Single c-Si Solar Cells.” 6: 49831. doi:10.1039/C6RA05321A.
   Google Scholar
• Kabir, A., I. Bouanane, D. Boulainine, S. Zerkout, G. Schmerber, and B. Boudjema. 2018. “Photoluminescence Study of Deep Level Defects in ZnO Thin Films.” Silicon 11 (10). doi:10.1007/s12633-018-9876-2.
   Google Scholar
• Kaim, P., K. Lukaszkowicz, M. Szindler, M.M. Szindler, M. Basiaga, and B. Hajduk. 2021. “The Influence of Magnetron Sputtering Process Temperature on ZnO Thin-Film Properties.” Coatings 11: 1507. doi:10.3390/coatings11121507.
   Web of Science ®Google Scholar
• Kashyap, J., P. Shokeen, M. Rani, U. Singh, and A. Kapoor. 2020. “Absorption Enhancement by Surface Texturing in ZnO/Si Heterojunction.” AIP Conference Proceedings 2220: 020181. doi: 10.1063/5.0001997.
   Google Scholar
• Khan, M.I., K.A. Bhatti, R. Qindeel, Norah Alonizan, and Hayat Saeed Althobaiti. 2017. “Characterizations of Multilayer ZnO Thin Films Deposited by sol-gel Spin Coating Technique.” Results in Physics 7: 651–655. doi: 10.1016/j.rinp.2016.12.029.
   Web of Science ®Google Scholar
• Koynov, S., M.S. Brandt, and M. Stutzmann. 2006. “Black Nonreflecting Silicon Surfaces Solar Cells.” Appl. Phys. Lett 88: 203107. doi:10.1063/1.2204573.
   Web of Science ®Google Scholar
• Kumar, R., G. Kumar, and A. Umar. 2014. “Pulse Laser Deposited Nanostructured ZnO Thin Films: A Review.” Journal of Nanoscience and Nanotechnology 14 (2): 1911–1930. doi: 10.1166/jnn.2014.9120.
   PubMed Web of Science ®Google Scholar
• Li, Jitao, Xinghua Zhu, Peng Gu, Xiaozheng Zhang, Xu Li, Yan Chen, and Dingyu Yang. 2018. “Changes in the Growth Orientation, Morphological and Optical Properties of Solgel Nanocrystalline ZnO Thin Films Coated with Different Thickness.” Materials Technology 34: 80–85. doi: 10.1080/10667857.2018.1523086.
   Web of Science ®Google Scholar
• Lien, S.Y., D.S. Wuu, W.C. Yeh, and J.C. Liu. 2006. “Tri-layer Antireflection Coatings (SiO2/SiO2–TiO2/TiO2) for Silicon Solar Cells Using a sol–gel Technique.” Solar Energy Materials and Solar Cells 90: 2710–2719. doi: 10.1016/j.solmat.2006.04.001.
   Web of Science ®Google Scholar
• Lv, H., H. Shen, Y. Jiang, C. Gao, H. Zhao, and J. Yuan. 2012. “Porous-pyramids Structured Silicon Surface with low Reflectance Over a Broad Band by Electrochemical Etching.” Applied Surface Science 258: 5451–5454. doi: 10.3923/jas.2017.374.383.
   Web of Science ®Google Scholar
• Mandal, L., S.S.A. Askari, M. Kumar, and M.K. Das. 2020. “Band Offset Engineering for p-SnO/n-mc-Si Heterojunction Solar Cell.” Applied Physics Letters 116: 234106. doi: 10.1063/1.5144767.
   Web of Science ®Google Scholar
• Pal, P., V. Swarnalatha, A.V.N. Rao, Ashok Kumar Pandey, Hiroshi Tanaka & Kazuo Sato. 2021. “High Speed Silicon wet Anisotropic Etching for Applications in Bulk Micromachining: A Review.” Micro and Nano Syst Lett 9 (4). doi:10.1186/s40486-021-00129-0.
   Google Scholar
• Park, H., S. Kwon, J.S. Lee, H.J. Lim, S. Yoon, and D. Kim. 2009. “Improvement on Surface Texturing of Single Crystalline Silicon for Solar Cells by saw-Damage Etching Using an Acidic Solution.” Solar Energy Materials and Solar Cells 93 (10): 1773–1778. doi: 10.1016/j.solmat.2009.06.012.
   Web of Science ®Google Scholar
• Rani, M., J. Kashyap, U. Singh, and A. Kapoor. 2021. “Optimisation of Dielectric Spacer Layer Thickness in Ag Nanospheres/ITO/c-Si Structure for Plasmonic Solar Cells Using FDTD Simulation.” Materials Technology, 1–9. doi:10.1080/10667857.2021.1940046.
   Web of Science ®Google Scholar
• Richter, A., M. Hermle, and S.W. Glunz. 2013. “Reassessment of the Limiting Efficiency for Crystalline Silicon Solar Cells.” IEEE Journal of Photovoltaics 3: 1184–1191. doi:10.1109/JPHOTOV.2013.2270351.
   Web of Science ®Google Scholar
• Rodnyi, P., Kirill Chernenko, Aleksejs Zolotarjovs, L. Grigorjeva, E. Gorokhova, and I. Venevtsev. 2016. “Effect of Point Defects on Luminescence Characteristics of ZnO Ceramics.” Physics of the Solid State 58: 2055–2061. doi:10.1134/S1063783416100309.
   Web of Science ®Google Scholar
• Sali, S., M. Boumaour, M. Kechouane, S. Kernadi, and F. Aitmar. 2012. “Nanocrystalline ZnO Film Deposited by Ultrasonic Spray on Textured Silicon Substrate as an Anti-Reflection Coating Layer.” Physica B: Condensed Matter 407: 2626–2631. doi: 10.1016/j.physb.2012.04.009.
   Web of Science ®Google Scholar
• Sannakashappanavar, B.S., A.B. Yadav, C.R. Byrareddy, and N.V.L. Narasimha Murty. 2020. “Synthesis of ZnO Ultra-Thin Film-Based Bottom-Gate Phototransistors for UV Detection.” Journal of Electronic Materials 49: 5272–5280. doi: 10.1007/s11664-020-08280-x.
   Web of Science ®Google Scholar
• Seidel, H., L. Csepregi, A. Heuberger, and H. Baumgartel. 1990. “Anisotropic Etching of Crystalline Silicon in Alkaline Solutions.” Journal of the Electrochemical Society 137 (11): 249–260. doi: 10.1016/j.apsadv.2021.100169.
   Web of Science ®Google Scholar
• Sethi, C., V. Anand, K. Walia, and S.C. Sood. 2012. “Optimization of Surface Reflectance for Alkaline Textured Monocrystalline Silicon Solar Cell.” International Journal of Computing Science and Communication Technologies 5: 785–788. ISSN 0974-3375.
   Google Scholar
• Sievert, W., K.U. Zimmermann, B. Hartmann, C. Klimm, K. Jacob, and H. Angermann. 2009. “Surface Texturization and Interface Passivation of Mono-Crystalline Silicon Substrates by Wet Chemical Treatments.” Solid State Phenomena 2 (145-146): 223–226. doi:10.4028/www.scientific.net/SSP.145-146.223.
   Google Scholar
• Strehlke, S., S. Bastide, and C. Lévy-Clément. 1999. “Optimization of Porous Silicon Reflectance for Silicon Photovoltaic Cells.” Solar Energy Materials and Solar Cells 58: 399–409. doi:10.1016/S0927-0248(99)00016-1.
   Web of Science ®Google Scholar
• Taylor, P. 2008. “Energy Technology Perspectives Scenarios and Strategies to 2050.” in: IEEJ Workshop, International Energy Agency.” Tokyo.
   Google Scholar
• Vazsonyi, E., K.D. Clercq, R. Einhaus, E.V. Kerschaver, K. Said, J. Poortmans, J. Szlufcik, and J. Nijs. 1999. “Novel and Efficient Texturing Approach for Large-Scale Industrial Production Line of Large-Area Monocrystalline Silicon Solar Cell.” Solar Energy Materials and Solar Cells 57: 179–188. doi: 10.1007/s40243-013-0015-0.
   Google Scholar
• Vishnoi, S., R. Kumar, and B.P. Singh. 2014. “Effect of Substrate on Physical Properties of Pulse Laser Deposited ZnO Thin Films.” Journal of Intense Pulsed Lasers and Applications in Advanced Physics 4 (1): 35–39.
   Google Scholar
• Yadav, A.B., and B.S. Sannakashappanavar. 2019. “True Ohmic Contact on RF Sputtered ZnO Thin Film by Using the Nonalloy Ti/Au Metallization Scheme.” Journal of Alloys and Compounds 770: 701–709. doi:10.1016/j.jallcom.2018.08.166.
   Web of Science ®Google Scholar