Parametric Studies of CCRF in Ar on 1D Model: Effect of Pressure and Dielectric Layers

References

• Y. P. RAIZER, Gas Discharge Physics, Springer-Verlag, Berlin (1991).
   Google Scholar
• Y. P. RAISER, Physics of Gas Discharge, Intellect nPublishing House, Dolgoprudny (2009).
   Google Scholar
• Y. P. RAISER et al., High-Frequency Capacitive Discharge. Physics. Experimental Procedures. Attachments, MPhTI-Affiliated Publishing House, Moscow (1995).
   Google Scholar
• M. S. MOKROV and Y. P. RAISER, “Application of Monte-Carlo Method Aimed to Determine Ionization Factors, Secondary Emission and current-voltage Characteristics of Townsend Discharge on Hydrogen,” Tech. Phys. Mag., 78, 47 (2008).
   Google Scholar
• M. MEYYAPPAN and J. P. L. KRESKOVSKY, “Glow Discharge Simulation Through Solutions to the Moments of the Boltzmann Transport Equation,” J. Appl. Phys., 68, 1506 (1990); https://doi.org/10.1063/1.346652.
   Web of Science ®Google Scholar
• M. M. BECKER et al., “A Stabilized Finite Element Method for Modeling of Gas Discharges,” Comp. Phys. Com., 180, 1230 (2009); https://doi.org/10.1016/j.cpc.2009.02.001.
   Web of Science ®Google Scholar
• T. ALILI et al., “Investigations of Argon and Neon Abnormal Glow Discharges in the Presence of Metastable Atom Density with Fluid Model,” Can. J. Phys., 94, 731 (2016); https://doi.org/10.1139/cjp-2015-0692.
   Web of Science ®Google Scholar
• M. M. BECKER and D. LOFFHAGEN, “Enhanced Reliability of Drift-Diffusion Approximation for Electrons in Fluid Models for Nonthermal Plasmas,” AIP Adv., 3, 12108 (2013); https://doi.org/10.1063/1.4775771.
   Web of Science ®Google Scholar
• B. HECHELEF and A. BOUCHIKHI, “Identification of the Normal and Abnormal Glow Discharge Modes in a Neon-Xenon Gas Mixture at Low Pressure,” Plasma Sci. Tech., 20, 115401 (2018); https://doi.org/10.1088/2058-6272/aac693.
   Web of Science ®Google Scholar
• A. BOUCHIKHI, “Modeling of a DC Glow Discharge in a Neon-Xenon Gas Mixture at Low Pressure and with Metastable Atom Densities,” Plasma Sci. Tech., 19, 95403 (2017); https://doi.org/10.1088/2058-6272/aa74ad.
   Web of Science ®Google Scholar
• A. BOUCHIKHI, “Physical Proprieties of DC Glow Discharges in a Neon-Argon Gas Mixture,” Can. J. Phys., 96, 62 (2018); https://doi.org/10.1139/cjp-2017-0120.
   Web of Science ®Google Scholar
• A. BOUCHIKHI, “Nonlocal Ionization Theory and Secondary Electron Emission Coefficient: Application in Helium and Neon DC Microdischarge at High Pressure,” IEEE Trans. Plasma Sci., 9, 4260 (2019); https://doi.org/10.1109/TPS.2019.2933455.
   Google Scholar
• T. SAMIR et al., “Effect of Driving Frequency on Electron Heating in Capacitively Coupled RF Argon Glow Discharges at Low Pressure,” Chin. Phys. B., 26, 115201 (2017); https://doi.org/10.1088/1674-1056/26/11/115201.
   Web of Science ®Google Scholar
• L. -L. ZHAO et al., “Effects of Gas Pressure on Plasma Characteristics in Dual Frequency Argon Capacitive Glow Discharges at Low Pressure by a Self-Consistent Fluid Model,” Chin. Phys. B., 26, 125201 (2017); https://doi.org/10.1088/1674-1056/26/12/125201.
   Web of Science ®Google Scholar
• Y. LIN and R. A. ADOMAITIS, “Simulation and Model Reduction Methods for an RF Plasma Glow Discharge,” J. Comp. Phys., 171, 731 (2001); https://doi.org/10.1006/jcph.2001.6808.
   Web of Science ®Google Scholar
• E. ESLAMI et al., “Numerical Investigation of the Effect of Driving Voltage Pulse Shapes on the Characteristics of Low-Pressure Argon Dielectric Barrier Discharge,” Plasma Phys. Rep., 41, 519 (2015); https://doi.org/10.1134/S1063780X15060021.
   Web of Science ®Google Scholar
• H. HÖFT et al., “Breakdown Characteristics in Pulsed-Driven Dielectric Barrier Discharges: Influence of the Pre-breakdown Phase due to Volume Memory Effects,” J. Phys. D: Appl. Phys., 47, 465206 (2014); 10.1088/0022-3727/47/46/465206.
   Web of Science ®Google Scholar
• S. PONDURI et al., “Fluid Modelling of CO2 Dissociation in a Dielectric Barrier Discharge,” J. Appl. Phys., 119, 93301 (2016); https://doi.org/10.1063/1.4941530.
   Web of Science ®Google Scholar
• D. LOFFHAGEN et al., “Impact of Hexamethyldisiloxane Admixtures on the Discharge Characteristics of a Dielectric Barrier Discharge in Argon for Thin Film Deposition,” Contrib. Plasma Phys., 58, 337 (2018); https://doi.org/10.1002/ctpp.201700060.
   Web of Science ®Google Scholar
• M. M. BECKER et al., “Analysis of Microdischarges in Asymmetric Dielectric Barrier Discharges in Argon,” J. Phys. D: Appl. Phys., 46, 355203 (2013); https://doi.org/10.1088/0022-3727/46/35/355203.
   Web of Science ®Google Scholar
• M. M. BECKER et al., “Advanced Fluid Modeling and PIC/MCC Simulations of Low-Pressure CCRF Discharges,” Plasma Sources Sci. Technol., 26, 44001 (2017); https://doi.org/10.1088/1361-6595/aa5cce.
   Web of Science ®Google Scholar
• Q. LIU et al., “Numerical Study of Effect of Secondary Electron Emission on Discharge Characteristics in Low Pressure Capacitive RF Argon Discharge,” Phys. Plasmas, 21, 83511 (2014); https://doi.org/10.1063/1.4894223.
   Web of Science ®Google Scholar
• T. SAMIR et al., “Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling,” IEEE Trans. Plasma Sci., 46, 1738 (2018); https://doi.org/10.1109/TPS.2018.2818164.
   Web of Science ®Google Scholar
• W. V. GAENS and A. BOGAERTS, “Kinetic Modelling for an Atmospheric Pressure Argon Plasma Jet in Humid Air,” J. Phys. D Appl.Phys., 47, 79502 (2014); https://doi.org/10.1088/0022-3727/47/7/079502.
   Web of Science ®Google Scholar
• G. J. M. HAGELAAR and L. C. PITCHFORD, “Solving the Boltzmann Equation to Obtain Electron Transport Coefficients and Rate Coefficients for Fluid Models,” Plasma Sources Sci. Tech., 14, 722 (2005); https://doi.org/10.1088/0963-0252/14/4/011.
   Web of Science ®Google Scholar
• N. B. KOLOKOLOV et al., “Interaction Processes with Creation of Fast Electrons in the Low Temperature Plasma,” Phys. Scri., 50, 371 (1994); https://doi.org/10.1088/0031-8949/50/4/010.
   Web of Science ®Google Scholar
• H. KATORI and F. SHIMIZU, “Lifetime Measurement of the 1s5 Metastable State of Argon and Krypton with a Magneto-Optical Trap,” Phys. Rev. Lett., 70, 3545 (1993); https://doi.org/10.1103/PhysRevLett.70.3545.
   Web of Science ®Google Scholar
• L. VRIENS and A. H. M. SMEETS, “Cross-Section and Rate Formulas for Electron-Impact Ionization, Excitation, Deexcitation, and Total Depopulation of Excited Atoms,” Phys. Rev. A, 22, 940 (1980); https://doi.org/10.1103/PhysRevA.22.940.
   Web of Science ®Google Scholar
• J. H. KOLTS and D. W. SETSER, “Decay Rates of Ar(4s,3P 2), Ar(4 S′,3 P 0), Kr(5s,3 P2), and Xe(6s,3 P2) Atoms in Argon,” J. Chem. Phys., 68, 4848 (1978); https://doi.org/10.1063/1.435638.
   Web of Science ®Google Scholar
• A. BOUCHIKHI and A. HAMID, “2D DC Subnormal Glow Discharge in Argon,” Plasma Sci. Tech., 12, 59 (2010); https://doi.org/10.1088/1009-0630/12/1/13.
   Web of Science ®Google Scholar
• A. BOUCHIKHI, “Two-Dimensional Numerical Simulation of the DC Glow Discharge in the Normal Mode and with Einstein’s Relation of Electron Diffusivity,” Plasma Sci. Tech., 14, 965 (2012); https://doi.org/10.1088/1009-0630/14/11/04.
   Web of Science ®Google Scholar
• G. J. M. HAGELAAR et al., “Modeling of the Microdischarges in Plasma Addressed Liquid Crystal Displays,” J. Appl. Phys., 88, 2252 (2000); https://doi.org/10.1063/1.1287529.
   Web of Science ®Google Scholar
• V. E. GOLANT et al., Fundamentals of Plasma Physics, Wiley, New York (1980).
   Google Scholar
• D. L. SCHARFETTER and H. K. GUMMEL, “Large-Signal Analysis of a Silicon Read Diode Oscillator,” IEEE Trans. Elec. Dev., 16, 64 (1969); https://doi.org/10.1109/T-ED.1969.16566.
   Web of Science ®Google Scholar
• A. BOUCHIKHI, “Proposition of a New Geometry of the Electrodes in a Particular Discharge,” Indian J. Phys., 94, 353 (2020); https://doi.org/10.1007/s12648-019-01452-4.
   Web of Science ®Google Scholar
• A. BOUCHIKHI, “Parametric Study on the DC Microdischarge in a 90%Helium–10%Xenon Gas Mixture at Intermediate Pressure,” Indian J. Phys., 96, 1443 (2022); https://doi.org/10.1007/s12648-021-02070-9.
   Web of Science ®Google Scholar
• D. P. LYMBEROPOULOS and D. J. ECONOMOU, “Fluid Simulations of Glow Discharges: Effect of Metastable Atoms in Argon,” J. Appl. Phys., 73, 3668 (1993); https://doi.org/10.1063/1.352926.
   Web of Science ®Google Scholar
• S. K. PARK and D. J. ECONOMOU, “Parametric Study of a Radio‐Frequency Glow Discharge Using a Continuum Model,” J. Appl. Phys., 68, 4888 (1990); https://doi.org/10.1063/1.346122.
   Web of Science ®Google Scholar
• M. MEYYAPPAN and T. R. GOVINDAN, “Radio Frequency Discharge Modeling: Moment Equations Approach,” J. Appl. Phys., 74, 2250 (1993); https://doi.org/10.1063/1.354708.
   Web of Science ®Google Scholar
• S. W. HWANG et al., “Effect of Electron Monte Carlo Collisions on a Hybrid Simulation of a Low-Pressure Capacitively Coupled Plasma,” Plasma Sources Sci. Tech., 23, 65040 (2014); https://doi.org/10.1088/0963-0252/23/6/065040.
   Web of Science ®Google Scholar
• M. SURENDRA and D. VENDER, “Collisionless Electron Heating by Radio-Frequency Plasma Sheaths,” Appl. Phys. Lett., 65, 153 (1994); https://doi.org/10.1063/1.112656.
   Web of Science ®Google Scholar
• M. SURENDRA et al., “Self Consistent DC Glow-Discharge Simulations Applied to Diamond Film Deposition Reactors,” J. Appl. Phys., 71, 5189 (1992); https://doi.org/10.1063/1.350575.
   Web of Science ®Google Scholar