Worker Exposure to Methanol Vapors During Cleaning of Semiconductor Wafers in a Manufacturing Setting

REFERENCES

• California Department of Industrial Relations, Division of Occupational Safety and Health . 1981 . Semiconductor Industry Study , Edited by: Wade , R. , Williams , M. , Mitchell , T. , Wong , J. and Tuse , B. Sacramento , Calif. : California Department of Industrial Relations .
   Google Scholar
• Pastides , H. , Calabrese , E. J. , Hosmer , D. W. Jr. and Harris , D. R. Jr. 1988 . Spontaneous abortion and general illness symptoms among semiconductor manufacturers . J. Occup. Med. , 30 : 543 – 551 .
   PubMedGoogle Scholar
• Schenker , M. B. , Gold , E. B. Beaumont , J. J. 1995 . Association of spontaneous abortion and other reproductive effects with work in the semiconductor industry . Am. J. Ind. Med. , 28 : 639 – 659 .
   PubMed Web of Science ®Google Scholar
• Swan , S. H. , Beaumont , J. J. Hammond , S. K. 1995 . Historical cohort study of spontaneous abortion among fabrication workers in the Semiconductor Health Study: Agent-level analysis . Am. J. Ind. Med. , 28 : 751 – 769 .
   PubMed Web of Science ®Google Scholar
• Paustenbach , D. J. 1988 . Assessment of the developmental risks resulting from occupational exposure to select glycol ethers within the semiconductor industry . J. Toxicol. Environ. Health , 23 ( 1 ) : 29 – 75 .
   PubMed Web of Science ®Google Scholar
• Holton , C. 1997 . Solvent solution . Environ. Health Perspect , 105 ( 9 ) : 924 – 926 .
   Web of Science ®Google Scholar
• Woskie , S. R. , Hammond , S. K. , Hines , C. J. , Hallock , M. F. , Kenyon , E. and Schenker , M. B. 2000 . Personal fluoride and solvent exposures, and their determinants, in semiconductor manufacturing . Appl. Occup. Environ. Hyg. , 15 : 354 – 361 .
   PubMedGoogle Scholar
• American Conference of Government Industrial Hygienists (ACGIH®) . 2001 . Methanol TLV , 1 – 4 . Cincinnati , , Ohio : ACGIH .
   Google Scholar
• McKone , T. E. 1989 . Household exposure models . Toxicol. Lett. , 49 ( 2–3 ) : 321 – 339 .
   Web of Science ®Google Scholar
• U.S. Environmental Protection Agency (USEPA) . 1991 . “ Chapter 4: Modeling Worker Exposure ” . In Chemical Engineering Branch Manual for the Preparation of Engineering Assessments (68D8-0112) , Washington , D.C. : USEPA .
   Google Scholar
• Drivas , P. J. , Valberg , P. A. , Murphy , B. L. and Wilson , R. 1996 . Modeling indoor air exposure from short-term point source releases . Indoor Air , 6 : 271 – 277 .
   Web of Science ®Google Scholar
• Keil , C. B. , ed. 2000 . Mathematical Models for Estimating Occupational Exposure to Chemicals , Fairfax , Va. : American Industrial Hygiene Association (AIHA) .
   Google Scholar
• Guo , Z. 2002 . Review of indoor emission source models. Part 1. Overview . Environ. Pollut. , 120 ( 3 ) : 533 – 549 .
   PubMed Web of Science ®Google Scholar
• Guo , Z. 2002 . Review of indoor emission source models. Part 2. Parameter estimation . Environ. Pollut. , 120 ( 3 ) : 551 – 564 .
   Web of Science ®Google Scholar
• Keil , C. B. and Nicas , M. 2003 . Predicting room vapor concentrations due to spills of organic solvents . AIHAJ , 64 : 445 – 454 .
   Web of Science ®Google Scholar
• Nicas , M. , Plisko , M. J. and Spencer , J. W. 2006 . Estimating benzene exposure at a solvent parts washer . J. Occup. Environ. Hyg. , 3 : 284 – 291 .
   PubMed Web of Science ®Google Scholar
• “Exposure Assessment Tools and Models.” . [Online] Available at http://www.epa.gov/opptintr/exposure/index.htm (Accessed March 23, 2007)
   Google Scholar
• “Indoor air quality modeling.” . [Online] Available at http://www.epa.gov/ appcdwww/iemb/model.htm (Accessed March 23, 2007)
   Google Scholar
• Nicas , M. 1996 . Estimating exposure intensity in an imperfectly mixed room . Am. Ind. Hyg. Assoc. J. , 57 : 542 – 550 .
   PubMed Web of Science ®Google Scholar
• Cherrie , J. W. 1999 . The effect of room size and general ventilation on the relationship between near and far-field concentrations . Appl. Occup. Environ. Hyg. , 14 : 539 – 546 .
   PubMedGoogle Scholar
• Keil , C. B. 2000 . A tiered approach to deterministic models for indoor air exposures . Appl. Occup. Environ. Hyg. , 15 : 145 – 151 .
   PubMedGoogle Scholar
• Boelter , F. W. , Crawford , G. N. and Podraza , D. M. 2002 . Airborne fiber exposure assessment of dry asbestos-containing gaskets and packings found in intact industrial and maritime fittings . AIHAJ , 63 : 732 – 740 .
   Web of Science ®Google Scholar
• Madl , A. K. and Paustenbach , D. J. 2002 . Airborne concentrations of benzene and mineral spirits (stoddard solvent) during cleaning of a locomotive generator and traction motor . J. Toxicol. Environ. Health A , 65 ( 23 ) : 1965 – 1979 .
   PubMed Web of Science ®Google Scholar
• Madl , A. K. and Paustenbach , D. J. 2002 . Airborne concentrations of benzene due to diesel locomotive exhaust in a roundhouse . J. Toxicol. Environ. Health A , 65 ( 23 ) : 1945 – 1964 .
   PubMed Web of Science ®Google Scholar
• Fedoruk , M. J. , Bronstein , R. and Kerger , B. D. 2003 . Benzene exposure assessment for use of a mineral spirits-based degreaser . Appl. Occup. Environ. Hyg. , 18 : 764 – 771 .
   PubMedGoogle Scholar
• Mangold , C. , Clark , K. , Madl , A. and Paustenbach , D. 2006 . An exposure study of bystanders and workers during the installation and removal of asbestos gaskets and packing . J. Occup. Environ. Hyg. , 3 : 87 – 98 .
   PubMed Web of Science ®Google Scholar
• Williams , P.R.D. , Knutsen , J. S. , Atkinson , C. , Madl , A. K. and Paustenbach , D. J. 2007 . Airborne concentrations of benzene associated with the historical use of some formulations of Liquid Wrench . J. Occup. Environ. Hyg. , 4 : 547 – 561 .
   PubMed Web of Science ®Google Scholar
• “Hazardous Substance Data Bank. Methanol CASRN 67-56-1.” . [Online] Available at http://toxnet.nlm.nih.gov/ (Accessed March 9, 2007)
   Google Scholar
• “International Programme on Chemical Safety. Health and Safety Guide No. 105: Methanol.” . [Online] Available at http://www.inchem.org/ documents/hsg/hsg/v105hsg.htm (Accessed March 9, 2007)
   Google Scholar
• Holmberg , P. 1979 . Central nervous system defects in children born to mothers exposed to organic solvents during pregnancy . Lancet , 2 ( 8135 ) : 177 – 179 .
   PubMed Web of Science ®Google Scholar
• Kavet , R. and Nauss , KM. 1990 . The toxicity of inhaled methanol vapors . Crit. Rev. Toxicol. , 21 : 21 – 50 .
   PubMed Web of Science ®Google Scholar
• Tenenbein , M. 1997 . Methanol poisoning during pregnancy— prediction of risk and suggestions for management (commentary) . J. Toxicol. Clin. Toxicol. , 35 ( 2 ) : 193 – 195 .
   PubMed Web of Science ®Google Scholar
• Sutton , T. L. , Foster , R. L. and Liner , S. R. 2002 . Acute methanol ingestion . Pediatr. Emerg. Care , 18 : 360 – 363 .
   PubMed Web of Science ®Google Scholar
• “International Programme on Chemical Safety. Environmental Health Criteria 196: Methanol.” . [Online] Available at http://www.inchem.org/ documents/ehc/ehc/ehc196.htm (Accessed March 9, 2007)
   Google Scholar
• Klaassen , C. , ed. 2001 . Casarret and Doull's Toxicology , 894 – 895 . New York : McGraw-Hill .
   Google Scholar
• Henson , E. V. 1960 . The toxicology of some aliphatic alcohols — Part II . J. Occup. Med. , 2 : 497 – 502 .
   PubMedGoogle Scholar
• McAllister , R. 1954 . Exposure to methanol from spirit duplicating machines . Am. Ind. Hyg. Assoc. J. , 15 : 26 – 28 .
   Google Scholar
• Bevan , C. and Monohydric alcohols—C1 to C6 . 2001 . Patty's Toxicology , Edited by: Bingham , E. , Cohrssen , B. and Powell , C. 365 – 460 . New York : John Wiley & Sons, Inc. .
   Google Scholar
• U.S. Environmental Protection Agency (USEPA) . 1995 . Profile of the Electronics and Computer Industry (EPA/310-R-95-002) , Washington , , D.C. : USEPA .
   Google Scholar
• Baldwin , D. G. , Gerami , A. and Rubin , J. R. 1998 . International Labor Organization (ILO) Encyclopedia of Occupational Health and Safety, , Fourth Edition , Geneva : International Labor Organization . Section III-IV: Semiconductor Manufacturing.
   Google Scholar
• National Institute for Occupational Safety and Health (NIOSH) . 1998 . “ Methanol, Method 2000 ” . In NIOSH Manual of Analytical Methods (NMAM) , Fourth Edition , Edited by: Schlecht , P. C. and O'Connor , P. F. NIOSH .
   Google Scholar
• U.S. Environmental Protection Agency (USEPA) . 2000 . Simulation Tool Kit for Indoor Air Quality and Inhalation Exposure (IAQX) Version 1.0, User's Guide (EPA-600/R-00-094; NTIS PB2001-101221) , Edited by: Zhishi , Guo . 76 Research Triangle Park , N.C. : National Risk Management Research Laboratory .
   Google Scholar
• Baldwin , P. E. and Maynard , A. D. 1998 . A survey of wind speeds in indoor workplaces . Ann. Occup. Hyg. , 42 ( 5 ) : 303 – 313 .
   PubMed Web of Science ®Google Scholar
• American Society of Heating Refrigerating and Air-Conditioning Engineers (ASHRAE) . 2003 . “ Heating, ventilating, and air-conditioning applications ” . In 2003 ASHRAE Handbook , 14.8 Atlanta , Ga. : ASHRAE .
   Google Scholar
• Kawai , T. , Yasugi , T. Mizunuma , K. 1992 . Comparative evaluation of urinalysis and blood analysis as means of detecting exposure to organic solvents at low concentrations . Int. Arch. Occup. Environ. Health , 64 ( 4 ) : 223 – 234 .
   PubMed Web of Science ®Google Scholar
• Frederick , L. , Schulte , P. and Apol , A. 1984 . Investigation and control of occupational hazards associated with the use of spirit duplicators . Am. Ind. Hyg. Assoc. J. , 45 : 54 – 55 .
   Google Scholar
• Cox , J. D. and Rossi , D. A. 1984 . “ LSI semiconductor manufacturing ” . In Industrial Hygiene Aspects of Plant Operations , Edited by: Cralley , L. J. and Cralley , L. V. Volume 2 , 442 – 488 . New York : Macmillan Publishing Co. . Unit Operations and Product Fabrication
   Google Scholar