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Original Articles

Kinetic Approach to Gas Flows in Microchannels

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Pages 211-226 | Published online: 01 Jun 2007

REFERENCES

  • Nguyen , T.T.C. , Katehi , L.P.B. and Rebeiz , G.M. 1988 . Micromachined Devices for Wireless Communications . Proc. Symp. IEEE , 86 : 1756 – 1768 .
  • Lin , L. , Howe , R.T. and Pisano , A.P. 1998 . Microelectromechanical Filters for Signal Processing . Journal of Microelectromechanical Systems , 7 : 286 – 294 .
  • Zhang , X. and Tang , W.C. 1995 . Viscous Air Damping in Laterally Driven Microresonators . Sensors and Materials , 7 : 415 – 430 .
  • Cho , Y. , Pisano , A.P. and Howe , R.T. 1994 . Viscous Damping Model for Laterally Oscillating Microstructures . Journal of Microelectromechanical Systems , 3 : 81 – 87 .
  • Cho , Y. , Kwak , B.M. , Pisano , A.P. and Howe , R.T. 1993 . Slide Film Damping in Laterally Driven Microstructures . Sensors and Actuators A , 40 : 31 – 39 .
  • Cercignani , C. 1969 . Mathematical Methods in Kinetic Theory , New York : Plenum .
  • Cercignani , C. 1988 . The Boltzmann Equation and Its Applications , New York : Springer .
  • Cercignani , C. 2000 . Rarefied Gas Dynamics , Cambridge : Cambridge University Press .
  • Cercignani , C. 2006 . Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems , Birkhäuser : Basel .
  • Veijola , P. , Kuisma , H. , Lahdenperä , J. and Ryhänen , P. 1995 . Equivalent-Circuit model of the Squeezed Gas Film in a Silicon Accelerometer . Sensors and Actuators A , 48 : 239 – 248 .
  • Veijola , T. , Kuisma , H. and Lahdenperä , J. 1998 . The Influence of Gas-Surface Interaction on Gas-Film Damping in a Silicon Accelerometer . Sensors and Actuators A , 66 : 83 – 92 .
  • Veijola , T. and Turowski , M. 2001 . Compact Damping Models for Laterally Moving Microstructures with Gas-Rarefaction Effects . Journal of Microelectromechanical Systems , 10 : 263 – 273 .
  • Bhatnagar , P.L. , Gross , E.P. and Krook , M. 1954 . A Model for Collision Processes in Gases, I. Small Amplitude Processes in Charged and Neutral One-Component Systems . Physical Review , 94 : 511 – 525 .
  • Williams , M.M.R. 2001 . A Review of the Rarefied Gas Dynamics Theory Associated with Some Classical Problems in Flow and Heat Transfer . Zeitschrift für Angewandte Mathematik und Physik , 52 : 500 – 516 .
  • Frezzotti , A. 1991 . Numerical Investigation of the Strong Evaporation of a Polyatomic Gas . Proc. 17th Symp. Rarefied Gas Dynamics , : 1243 – 1250 .
  • Gross , E.P. , Jackson , E.A. and Ziering , S. 1957 . Boundary Value Problems in Kinetic Theory of Gases . Annals of Physics , 1 : 141 – 167 .
  • Cercignani , C. and Daneri , A. 1963 . Flow of a Rarefied Gas between Two Parallel Plates . Journal of Applied Physics , 34 : 3509 – 3513 .
  • Dong , W. University of California Report UCRL-3353 . 1956 .
  • Sharipov , F. 1999 . Non-Isothermal Gas Flow through Rectangular Microchannels . Journal of Micromechanics and Microengineering , 9 : 394 – 401 .
  • Karniadakis , G.E. , Beskok , A. and Aluru , A. 2002 . Microflows and Nanoflows: Fundamentals and Simulation , New York : Springer .
  • Cercignani , C. , Lampis , M. and Lorenzani , S. 2004 . Variational Approach to Gas Flows in Microchannels . Physics of Fluids , 16 : 3426 – 3437 .

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