Modeling and Simulation of the Interface Temperature Between a Heated Silicon Tip and a Substrate

REFERENCES

• Binnig , G. , Despont , M. , Drechsler , U. , Haberle , W. , Lutwyche , M. , Vettiger , P. , Mamin , H.J. , Chui , B.W. and Kenny , T.W. 1999 . Ultrahigh-Density Atomic Force Microscopy Data Storage with Erase Capability . Applied Physics Letters , 74 : 1329 – 1331 .
   Web of Science ®Google Scholar
• Vettiger , P. , Cross , G. , Despont , M. , Drechsler , U. , Durig , U. , Gotsman , B. , Haberle , W. , Lantz , M. , Rothuizen , H. , Stutz , R. and Binnig , G. 2002 . The “Millipede”—Nanotechnology Entering Data Storage . IEEE Transactions on Nanotechnology , 1 : 39 – 55 .
   Web of Science ®Google Scholar
• Nelson , B.A. , King , W.P. , Laracuente , A.R. , Sheehan , P.E. and Whitman , L.J. 2006 . Direct Deposition of Continuous Metal Nanostructures by Thermal Dip-Pen Nanolithography . Applied Physics Letters , 88 : 033104
   Web of Science ®Google Scholar
• Sheehan , P.E. , Whitman , LJ , King , WP and Nelson , B.A. 2004 . Nanoscale Deposition of Solid Inks via Thermal Dip Pen Nanolithography . Applied Physics Letters , 85 : 1589 – 1591 .
   Web of Science ®Google Scholar
• Yang , M. , Sheehan , PE , King , WP and Whitman , L.J. 2006 . Direct Writing of a Conducting Polymer with Molecular-Level Control of Physical Dimensions and Orientation . Journal of the American Chemical Society , 128 : 6774 – 6775 .
   PubMed Web of Science ®Google Scholar
• Bakbak , S. , Leech , PJ , Carson , BE , Saxena , S , King , WP and Bunz , U.H.F. 2006 . 1,3-Dipolar Cycloaddition for the Generation of Nanostructured Semiconductors by Heated Probe Tips . Macromolecules , 39 : 6793 – 6795 .
   Web of Science ®Google Scholar
• Gotsmann , B. , Duerig , U , Frommer , J and Hawker , C.J. 2006 . Exploiting Chemical Switching in a Diels-Alder Polymer for Nanoscale Probe Lithography and Data Storage . Advanced Functional Materials , 16 : 1499 – 1505 .
   Web of Science ®Google Scholar
• Szoszkiewicz , R. , Okada , T , Jones , SC , Li , TD , King , WP , Marder , SR and Riedo , E. 2007 . High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography . Nano Letters , 7 : 1064 – 1069 .
   PubMed Web of Science ®Google Scholar
• Haeberle , W. , Pantea , M and Hoerber , J.K.H. 2006 . Nanometer-Scale Heat-Conductivity Measurements on Biological Samples . Ultramicroscopy , 106 : 678 – 686 .
   Google Scholar
• King , W.P. , Saxena , S , Nelson , BA , Pitchimani , R and Weeks , B.L. 2006 . Nanoscale Thermal Analysis of an Energetic Material . Nano Letters , 6 : 2145 – 2149 .
   PubMed Web of Science ®Google Scholar
• Nelson , B.A. and King , W.P. 2007 . Measuring Material Softening with Nanoscale Spatial Resolution Using Heated Silicon Probes . Review of Scientific Instruments , 78 : 023702
   Web of Science ®Google Scholar
• Lee , J. , Wright , TL , Abel , MR , Sunden , EO , Marchenkov , A , Graham , S and King , W.P. 2007 . Thermal Conduction from Microcantilever Heaters in Partial Vacuum . Journal of Applied Physics , 101 : 014906
   Web of Science ®Google Scholar
• Gotsmann , B. and Durig , U. 2005 . Experimental Observation of Attractive and Repulsive Thermal Forces on Microcantilevers . Applied Physics Letters , 87 : 194102
   Google Scholar
• Lee , J. , Beechem , T , Wright , TL , Nelson , BA , Graham , S and King , W.P. 2006 . Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever-Heaters . Journal of Microelectromechanical Systems , 15 : 1644 – 1655 .
   Web of Science ®Google Scholar
• Nelson , B.A. and King , W.P. 2007 . Temperature Calibration of Heated Silicon Atomic Force Microscope Cantilevers . Sensors and Actuators A , 140 : 51 – 59 .
   Web of Science ®Google Scholar
• King , W.P. and Goodson , K.E. 2007 . Thermomechanical Formation of Nanoscale Polymer Indents with a Heated Silicon Tip . Journal of Heat Transfer , 129 : 1600 – 1604 .
   Web of Science ®Google Scholar
• Gotsmann , B. and Durig , U. 2004 . Thermally Activated Nanowear Modes of a Polymer Surface Induced by a Heated Tip . Langmuir , 20 : 1495 – 1500 .
   PubMed Web of Science ®Google Scholar
• Lantz , M.A. , Gotsmann , B , Durig , UT , Vettiger , P , Nakayama , Y , Shimizu , T and Tokumoto , H. 2003 . Carbon Nanotube Tips for Thermomechanical Data Storage . Applied Physics Letters , 83 : 1266 – 1268 .
   Google Scholar
• Remmert , J.L. , Wu , Y , Lee , JC , Shannon , MA and King , W.P. Contact Potential Measurement Using a Heated Atomic Force Microscope Tip . Applied Physics Letters , 91 2007
   Google Scholar
• Prasher , R. 2005 . Predicting the Thermal Resistance of Nanosized Constrictions . Nano Letters , 5 : 2155 – 2159 .
   PubMed Web of Science ®Google Scholar
• Saha , S.K. and Shi , L. 2007 . Molecular Dynamics Simulation of Thermal Transport at a Nanometer Scale Constriction in Silicon . Journal of Applied Physics , 101 : 074304
   Google Scholar
• Weber , L. , Gmelin , E and Queisser , H.J. 1989 . Thermal-Resistance of Silicon Point Contacts . Physical Review B , 40 : 1244 – 1249 .
   Google Scholar
• Rowland , H.D. , King , WP , Sun , AC , Schunk , PR and Cross , G.L.W. 2007 . Predicting Polymer Flow during High-Temperature Atomic Force Microscope Nanoindentation . Macromolecules , 40 : 8096 – 8103 .
   Google Scholar
• Shi , L. and Majumdar , A. 2002 . Thermal Transport Mechanisms at Nanoscale Point Contacts . Journal of Heat Transfer-Transactions of the ASME , 124 : 329 – 337 .
   Web of Science ®Google Scholar
• Chapuis , P.O. , Greffet , JJ , Joulain , K and Volz , S. 2006 . Heat Transfer between a Nano-Tip and a Surface . Nanotechnology , 17 : 2978 – 2981 .
   Web of Science ®Google Scholar
• Mamin , H.J. , Ried , RP , Terris , BD and Rugar , D. 1999 . High-Density Data Storage Based on the Atomic Force Microscope . Proceedings of the IEEE , 87 : 1014 – 1027 .
   Google Scholar
• Terris , B.D. , Rishton , SA , Mamin , HJ , Ried , RP and Rugar , D. 1998 . Atomic Force Microscope-Based Data Storage: Track Servo and Wear Study . Applied Physics a-Materials Science & Processing , 66 : S809 – S813 .
   Google Scholar
• Bae , J.H. , Ono , T and Esashi , M. 2003 . Scanning Probe with an Integrated Diamond Heater Element for Nanolithography . Applied Physics Letters , 82 : 814
   Google Scholar
• Li , M.-H. and Gianchandani , Y.B. 2003 . Applications of a Low Contact Force Polyimide Shank Bolometer Probe for Chemical and Biological Diagnostics . Sensors and Actuators A , 104 : 236 – 245 .
   Google Scholar
• Casimir , H.B.G. 1938 . Note on the Conduction of Heat in Crystals . Physica , 5 : 495 – 500 .
   Google Scholar
• Ashcroft , N.W. and Mermin , N.D. 1976 . Solid State Physics , Orlando, Fla : Harcourt College Publishers .
   Google Scholar
• Ju , Y.S. 2005 . Phonon Heat Transport in Silicon Nanostructures . Applied Physics Letters , 87 : 153106
   Web of Science ®Google Scholar
• Chen , G. 1998 . Thermal Conductivity and Ballistic-Phonon Transport in the Cross-Plane Direction of Superlattices . Physical Review B , 57 : 14958 – 14973 .
   Web of Science ®Google Scholar
• Li , D.Y. , Wu , YY , Kim , P , Shi , L , Yang , PD and Majumdar , A. 2003 . Thermal Conductivity of Individual Silicon Nanowires . Applied Physics Letters , 83 : 2934 – 2936 .
   Web of Science ®Google Scholar
• Liu , W.J. and Asheghi , M. 2006 . Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Layers . Journal of Heat Transfer-Transactions of the ASME , 128 : 75 – 83 .
   Web of Science ®Google Scholar
• Richardson , R.A. and Nori , F. 1993 . Transport and Boundary Scattering in Confined Geometries—Analytical Results . Physical Review B , 48 : 15209 – 15217 .
   Google Scholar
• Asheghi , M. , Kurabayashi , K , Kasnavi , R and Goodson , K.E. 2002 . Thermal Conduction in Doped Single-Crystal Silicon Films . Journal of Applied Physics , 91 : 5079 – 5088 .
   Web of Science ®Google Scholar
• Liu , W.J. and Asheghi , M. 2005 . Thermal Conduction in Ultrathin Pure and Doped Single-Crystal Silicon Layers at High Temperatures . Journal of Applied Physics , 98 : 123523
   Google Scholar
• Myers , G.E. 1998 . Analytical Methods in Conduction Heat Transfer , 2nd , Madison, Wis : AMCHT Publications .
   Google Scholar
• Zhang , Z.M. 2007 . Nano/Microscale Heat Transfer , New York : McGraw Hill .
   Google Scholar
• Sneddon , I.N. 1965 . The Relation between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile . International Journal of Engineering Science , 3 : 47 – 57 .
   Google Scholar
• Johnson , K.L. 1987 . Contact Mechanics , Cambridge : Cambridge University Press .
   Google Scholar
• Swartz , E.T. and Pohl , R.O. 1989 . Thermal-Boundary Resistance . Reviews of Modern Physics , 61 : 605 – 668 .
   Web of Science ®Google Scholar
• Stoner , R.J. and Maris , H.J. 1993 . Kapitza Conductance and Heat-Flow between Solids at Temperatures from 50 to 300 K . Physical Review B , 48 : 16373 – 16387 .
   PubMed Web of Science ®Google Scholar
• Cahill , D.G. , Ford , WK , Goodson , KE , Mahan , GD , Majumdar , A , Maris , HJ , Merlin , R and Phillpot , S.R. 2003 . Nanoscale Thermal Transport . Journal of Applied Physics , 93 : 793 – 818 .
   Web of Science ®Google Scholar
• Cahill , D.G. 1997 . Heat Transport in Dielectric Thin Films and at Solid-Solid Interfaces . Microscale Thermophysical Engineering , 1 : 85 – 109 .
   Web of Science ®Google Scholar
• Beechem , T. , Graham , S , Hopkins , P and Norris , P. 2007 . Role of Interface Disorder on Thermal Boundary Conductance Using a Virtual Crystal Approach . Applied Physics Letters , 90 : 054104
   Google Scholar
• Incropera , F.P. and DeWitt , D.P. 2002 . Fundamentals of Heat and Mass Transfer , 5th , New York : Wiley .
   Google Scholar
• Prasher , R.S. and Phelan , P.E. 2006 . Microscopic and Macroscopic Thermal Contact Resistances of Pressed Mechanical Contacts . Journal of Applied Physics , 100 : 063538
   Google Scholar
• Palisoc , A.L. and Lee , C.C. 1988 . Thermal-Properties of the Multilayer Infinite-Plate Structure . Journal of Applied Physics , 64 : 410 – 415 .
   Web of Science ®Google Scholar
• Gysin , U. , Rast , S , Ruff , P , Meyer , E , Lee , DW , Vettiger , P and Gerber , C. 2004 . Temperature Dependence of the Force Sensitivity of Silicon Cantilevers . Physical Review B , 69
   Google Scholar