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Research articles

Perfluorocompounds emission reduction by the semiconductor industry

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Pages 201-210 | Received 29 Oct 2009, Accepted 11 Jan 2010, Published online: 18 Aug 2010

References

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  • Reduction of perfluorocompound (PFC) emissions . 2005 . 2005 State-of-the-Technology Report Technology Transfer #05104693A-ENG, International SEMATECH
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  • Jochen , H , (Ecofys) , Winfried , S and (Öko-Recherche) . 2003 . Costs and the impact on emissions of potential regulatory framework for reducing emissions of hydrofluorocarbons perfluorocarbons and sulphur hexafluoride; [cited 20 January 2010]. Available from: http://www.oekorecherche.de/english/berichte/kurzfassungen/kurzRestrict.html

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