A novel valve-less piezoelectric micropump generating recirculating flow

References

• Aleman, J., George, S. K., Herberg, S., Devarasetty, M., Porada, C. D., Skardal, A., & Almeida-Porada, G. (2019). Deconstructed microfluidic bone marrow on-a-chip to study normal and malignant hemopoietic cell-niche interactions. Small, 15(43), 1902971. https://doi.org/https://doi.org/10.1002/smll.201902971.
   Web of Science ®Google Scholar
• Atencia, J., & Beebe, D. J. (2006). Steady flow generation in microcirculatory systems. Lab on a Chip, 6(4), 567–574. https://doi.org/https://doi.org/10.1039/b514070f
   PubMed Web of Science ®Google Scholar
• Bao, Q., Zhang, J., Tang, M., Huang, Z., Lai, L., Huang, J., & Wu, C. (2019). A novel PZT pump with built-in compliant structures. Sensors, 19(6), 1301. https://doi.org/https://doi.org/10.3390/s19061301.
   Web of Science ®Google Scholar
• Bussmann, A. B., Durasiewicz, C. P., Kibler, S. H. A., & Wald, C. K. (2021). Piezoelectric titanium based microfluidic pump and valves for implantable medical applications. Sensors and Actuators a-Physical, 323, 112649. https://doi.org/https://doi.org/10.1016/j.sna.2021.112649.
   Web of Science ®Google Scholar
• Carrozza, M. C., Croce, N., Magnani, B., & Dario, P. (1995). A piezoelectric-driven stereolithography-fabricated micropump. Journal of Micromechanics and Microengineering, 5(2), 177–179. https://doi.org/https://doi.org/10.1088/0960-1317/5/2/032
   Web of Science ®Google Scholar
• Chen, S., Liu, H., Ji, J., Kan, J., Jiang, Y., & Zhang, Z. (2020). An indirect drug delivery device driven by piezoelectric pump. Smart Materials and Structures, 29(7), 075030. https://doi.org/https://doi.org/10.1088/1361-665X/ab8c23.
   Web of Science ®Google Scholar
• Clime, L., Li, K., Geissler, M., Hoa, X. D., Robideau, G. P., Bilodeau, G. J., & Veres, T. (2017). Separation and concentration of Phytophthora ramorum sporangia by inertial focusing in curving microfluidic flows. Microfluidics and Nanofluidics, 21(1), 5. https://doi.org/https://doi.org/10.1007/s10404-016-1844-9.
   Web of Science ®Google Scholar
• Dong, J. S., Liu, R. G., Liu, W. S., Chen, Q. Q., Yang, Y., Wu, Y., Yang, Z. G., & Lin, B. S. (2017). Design of a piezoelectric pump with dual vibrators. Sensors and Actuators a-Physical, 257, 165–172. https://doi.org/https://doi.org/10.1016/j.sna.2017.02.001
   Web of Science ®Google Scholar
• Feng, G. H., & Kim, E. S. (2004). Micropump based on PZT unimorph and one-way parylene valves. Journal of Micromechanics and Microengineering, 14(4), 429–435. https://doi.org/https://doi.org/10.1088/0960-1317/14/4/001
   Web of Science ®Google Scholar
• Ghalandari, M., Koohshahi, E. M., Mohamadian, F., Shannshirband, S., & Chau, K. W. (2019). Numerical simulation of nanofluid flow inside a root canal. Engineering Applications of Computational Fluid Mechanics, 13(1), 254–264. https://doi.org/https://doi.org/10.1080/19942060.2019.1578696
   Web of Science ®Google Scholar
• Haber, J. M., Gascoyne, P. R. C., & Sokolov, K. (2017). Rapid real-time recirculating PCR using localized surface plasmon resonance (LSPR) and piezo-electric pumping. Lab on a Chip, 17(16), 2821–2830. https://doi.org/https://doi.org/10.1039/c7lc00211d
   PubMed Web of Science ®Google Scholar
• He, L., Wu, X., Zhao, D., Li, W., Cheng, G., & Chen, S. (2020). Exploration on relationship between flow rate and sound pressure level of piezoelectric pump. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, 26(2), 609–616. https://doi.org/https://doi.org/10.1007/s00542-019-04553-6
   Web of Science ®Google Scholar
• He, X., Zhu, J., Zhang, X., Xu, L., & Yang, S. (2017). The analysis of internal transient flow and the performance of valveless piezoelectric micropumps with planar diffuser/nozzles elements. Microsystem Technologies, 23(1), 23–37. https://doi.org/https://doi.org/10.1007/s00542-015-2695-0
   Web of Science ®Google Scholar
• Huang, J., Zhang, J., Xun, X., & Wang, S. (2013). Theory and experimental verification on valveless piezoelectric pump with multistage Y-shape treelike bifurcate tubes. Chinese Journal of Mechanical Engineering, 26(3), 462–468. https://doi.org/https://doi.org/10.3901/CJME.2013.03.462
   Web of Science ®Google Scholar
• Huang, J., Zhang, J. H., Shi, W. D., & Wang, Y. (2016). 3D FEM analyses on flow field characteristics of the valveless piezoelectric pump. Chinese Journal of Mechanical Engineering, 29(4), 825–831. https://doi.org/https://doi.org/10.3901/cjme.2016.0427.061
   Web of Science ®Google Scholar
• Huang, J., Zou, L., Tian, P., Zhang, Q., Wang, Y., & Zhang, J. H. (2019). A valveless piezoelectric micropump based on projection micro litho stereo exposure technology. Ieee Access, 7, 77340–77347. https://doi.org/https://doi.org/10.1109/access.2019.2919691
   Web of Science ®Google Scholar
• Izzo, I., Accoto, D., Menciassi, A., Schmitt, L., & Dario, P. (2007). Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves. Sensors and Actuators a-Physical, 133(1), 128–140. https://doi.org/https://doi.org/10.1016/j.sna.2006.01.049
   Web of Science ®Google Scholar
• Jiang, X. R., Shao, N., Jing, W. W., Tao, S. C., Liu, S. X., & Sui, G. D. (2014). Microfluidic chip integrating high throughput continuous-flow PCR and DNA hybridization for bacteria analysis. Talanta, 122, 246–250. https://doi.org/https://doi.org/10.1016/j.talanta.2014.01.053
   PubMed Web of Science ®Google Scholar
• Kan, J., Tang, K., Liu, G., Zhu, G., & Shao, C. (2008). Development of serial-connection piezoelectric pumps. Sensors and Actuators a-Physical, 144(2), 321–327. https://doi.org/https://doi.org/10.1016/j.sna.2008.01.016
   Web of Science ®Google Scholar
• Kan, J. W., Yang, Z. G., Peng, T. J., Cheng, G. M., & Wu, B. (2005). Design and test of a high-performance piezoelectric micropump for drug delivery. Sensors and Actuators a-Physical, 121(1), 156–161. https://doi.org/https://doi.org/10.1016/j.sna.2004.12.002
   Web of Science ®Google Scholar
• Kaynak, M., Ozcelik, A., Nama, N., Nourhani, A., Lammert, P. E., Crespi, V. H., & Huang, T. J. (2016). Acoustofluidic actuation of in situ fabricated microrotors. Lab on a Chip, 16(18), 3532–3537. https://doi.org/https://doi.org/10.1039/c6lc00443a
   PubMed Web of Science ®Google Scholar
• Kim, H., Astle, A. A., Najafi, K., Bernal, L. P., & Washabaugh, P. D. (2015). An integrated electrostatic peristaltic 18-stage gas micropump with active microvalves. Journal of Microelectromechanical Systems, 24(1), 192–206. https://doi.org/https://doi.org/10.1109/jmems.2014.2327096
   Web of Science ®Google Scholar
• Leng, X. F., Zhang, J. H., Jiang, Y., Zhang, J. Y., Sun, X. C., & Lin, X. G. (2013). Theory and experimental verification of spiral flow tube-type valveless piezoelectric pump with gyroscopic effect. Sensors and Actuators a-Physical, 195, 1–6. https://doi.org/https://doi.org/10.1016/j.sna.2013.02.026
   Web of Science ®Google Scholar
• Li, B., Fan, J., Li, J., Chu, J., & Pan, T. (2015). Piezoelectric-driven droplet impact printing with an interchangeable microfluidic cartridge. Biomicrofluidics, 9(5), 054101. https://doi.org/https://doi.org/10.1063/1.4928298
   PubMed Web of Science ®Google Scholar
• Li, H., Liu, J., Li, K., Systems, Y. L. J. M., & Processing, S. (2021). A review of recent studies on piezoelectric pumps and their applications. Mechanical Systems and Signal Processing, 151, 77340–77347. https://doi.org/https://doi.org/10.1016/j.ymssp.2020.107393
   Web of Science ®Google Scholar
• Liao, Z., Wang, J., Zhang, P., Zhang, Y., Miao, Y., Gao, S., Deng, Y., & Geng, L. (2018). Recent advances in microfluidic chip integrated electronic biosensors for multiplexed detection. Biosensors and Bioelectronics, 121, 272–280. https://doi.org/https://doi.org/10.1016/j.bios.2018.08.061
   PubMed Web of Science ®Google Scholar
• Ma, T., Sun, S. X., Li, B. Q., & Chu, J. R. (2019). Piezoelectric peristaltic micropump integrated on a microfluidic chip. Sensors and Actuators a-Physical, 292, 90–96. https://doi.org/https://doi.org/10.1016/j.sna.2019.04.005
   Web of Science ®Google Scholar
• MacDonald, M. P., Spalding, G. C., & Dholakia, K. (2003). Microfluidic sorting in an optical lattice. Nature, 426(6965), 421–424. https://doi.org/https://doi.org/10.1038/nature02144
   PubMed Web of Science ®Google Scholar
• Mach, P., Dolinski, M., Baldwin, K. W., Rogers, J. A., Kerbage, C., Windeler, R. S., & Eggleton, B. J. (2002). Tunable microfluidic optical fiber. Applied Physics Letters, 80(23), 4294–4296. https://doi.org/https://doi.org/10.1063/1.1483384
   Web of Science ®Google Scholar
• Mohith, S., Karanth, P. N., & Kulkarni, S. M. (2019). Recent trends in mechanical micropumps and their applications: A review. Mechatronics, 60, 34–55. https://doi.org/https://doi.org/10.1016/j.mechatronics.2019.04.009
   Web of Science ®Google Scholar
• Nguyen, N. T., & Truong, T. Q. (2004). A fully polymeric micropump with piezoelectric actuator. Sensors and Actuators B-Chemical, 97(1), 137–143. https://doi.org/https://doi.org/10.1016/s0925-4005(03)00521-5
   Web of Science ®Google Scholar
• Opekar, F., Nesmerak, K., & Tuma, P. (2016). Electrokinetic injection of samples into a short electrophoretic capillary controlled by piezoelectric micropumps. Electrophoresis, 37(4), 595–600. https://doi.org/https://doi.org/10.1002/elps.201500464
   PubMed Web of Science ®Google Scholar
• Quang, L., Bui, T., Hoang, B., Nhu, C., Thuy, H., Jen, C., & Duc, T. (2020). Biological living cell in-flow detection based on microfluidic chip and compact signal processing circuit. Ieee Transactions on Biomedical Circuits and Systems, 14(6), 1371–1380. https://doi.org/https://doi.org/10.1109/tbcas.2020.3030017
   PubMed Web of Science ®Google Scholar
• Rosenberger, H. (1930). An electromagnetic pump. Science, 71(1844), 463–464. https://doi.org/https://doi.org/10.1126/science.71.1844.463
   PubMedGoogle Scholar
• Salih, S., Aldlemy, M., Rasani, M., Ariffin, A., Ya, T., Al-Ansari, N., Yaseen, Z., & Chau, K. (2019). Thin and sharp edges bodies-fluid interaction simulation using cut-cell immersed boundary method. Engineering Applications of Computational Fluid Mechanics, 13(1), 860–877. https://doi.org/https://doi.org/10.1080/19942060.2019.1652209
   Google Scholar
• Saren, A., Smith, A. R., & Ullakko, K. (2018). Integratable magnetic shape memory micropump for high-pressure, precision microfluidic applications. Microfluidics and Nanofluidics, 22(4), 38. https://doi.org/https://doi.org/10.1007/s10404-018-2058-0.
   Web of Science ®Google Scholar
• Shim, S., Belanger, M. C., Harris, A. R., Munson, J. M., & Pompano, R. R. (2019). Two-way communication between ex vivo tissues on a microfluidic chip: Application to tumor-lymph node interaction. Lab on a Chip, 19(6), 1013–1026. https://doi.org/https://doi.org/10.1039/c8lc00957k
   PubMed Web of Science ®Google Scholar
• Tang, Y., Jia, M., Ding, X., Li, Z., Wan, Z., Lin, Q., & Fu, T. (2019). Experimental investigation on thermal management performance of an integrated heat sink with a piezoelectric micropump. Applied Thermal Engineering, 161, 114053. https://doi.org/https://doi.org/10.1016/j.applthermaleng.2019.114053.
   Web of Science ®Google Scholar
• Teymoori, M. M., & Abbaspour-Sani, E. (2005). Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications. Sensors and Actuators a-Physical, 117(2), 222–229. https://doi.org/https://doi.org/10.1016/j.sna.2004.06.025
   Web of Science ®Google Scholar
• Tsao, C. W., Lei, I. C., Chen, P. Y., & Yang, Y. L. (2018). A piezo-ring-on-chip microfluidic device for simple and low-cost mass spectrometry interfacing. The Analyst, 143(4), 981–988. https://doi.org/https://doi.org/10.1039/c7an01548h
   PubMed Web of Science ®Google Scholar
• Tseng, L. Y., Yang, A. S., Lee, C. Y., Cheng, C. H. J. S. M., & Structures. (2013). Investigation of a piezoelectric valveless micropump with an integrated stainless-steel diffuser/nozzle bulge-piece design. Smart Materials and Structures, 22(8), 085023. https://doi.org/https://doi.org/10.1088/0964-1726/22/8/085023
   Web of Science ®Google Scholar
• Ullakko, K., Wendell, L., Smith, A., Muellner, P., & Hampikian, G. (2012). A magnetic shape memory micropump: Contact-free, and compatible with PCR and human DNA profiling. Smart Materials and Structures, 21(11), 115020. https://doi.org/https://doi.org/10.1088/0964-1726/21/11/115020.
   Web of Science ®Google Scholar
• Valdovinos, J., Williams, R. J., Levi, D. S., & Carman, G. P. (2014). Evaluating piezoelectric hydraulic pumps as drivers for pulsatile pediatric ventricular assist devices. Journal of Intelligent Material Systems and Structures, 25(10), 1276–1285. https://doi.org/https://doi.org/10.1177/1045389x13504476
   Web of Science ®Google Scholar
• Wang, J. T., Zhao, X. L., Chen, X. F., & Yang, H. R. (2019). A piezoelectric resonance pump based on a flexible support. Micromachines, 10(3), 12, Article 169. https://doi.org/https://doi.org/10.3390/mi10030169
   Web of Science ®Google Scholar
• Wang, Y. I., & Shuler, M. L. (2018). Unichip enables long-term recirculating unidirectional perfusion with gravity-driven flow for microphysiological systems. Lab on a Chip, 18(17), 2563–2574. https://doi.org/https://doi.org/10.1039/c8lc00394g
   PubMed Web of Science ®Google Scholar
• Wang, Y.-N., & Fu, L.-M. (2018). Micropumps and biomedical applications - A review. Microelectronic Engineering, 195, 121–138. https://doi.org/https://doi.org/10.1016/j.mee.2018.04.008
   Web of Science ®Google Scholar
• Wu, X., He, L., Hou, Y., Tian, X., & Zhao, X. (2021). Advances in passive check valve piezoelectric pumps. Sensors and Actuators a-Physical, 323, 112647. https://doi.org/https://doi.org/10.1016/j.sna.2021.112647.
   Web of Science ®Google Scholar
• Xia, Q. X., Zhang, J. H., Lei, H., & Cheng, W. (2012). Analysis on flow field of the valveless piezoelectric pump with Two inlets and One outlet and a rotating unsymmetrical slopes element. Chinese Journal of Mechanical Engineering, 25(3), 474–483. https://doi.org/https://doi.org/10.3901/cjme.2012.03.474
   Web of Science ®Google Scholar
• Yin, Y., Zhou, C., Zhao, F., Wang, L., Ye, Z., & Jin, J. (2020). Design and investigation on a novel piezoelectric screw pump. Smart Materials and Structures, 29(8), 085013. https://doi.org/https://doi.org/10.1088/1361-665X/ab98ec.
   Web of Science ®Google Scholar
• Zeng, P., Li, L. a., Dong, J., Cheng, G., Kan, J., & Xu, F. (2016). Structure design and experimental study on single-bimorph double-acting check-valve piezoelectric pump. Proceedings of the Institution of Mechanical Engineers Part C-Journal of Mechanical Engineering Science, 230(14), 2339–2344. https://doi.org/https://doi.org/10.1177/0954406215596357
   Web of Science ®Google Scholar
• Zhang, W., & Eitel, R. E. (2013). An integrated multilayer ceramic piezoelectric micropump for microfluidic systems. Journal of Intelligent Material Systems and Structures, 24(13), 1637–1646. https://doi.org/https://doi.org/10.1177/1045389 ( 13483023
   Web of Science ®Google Scholar
• Zhang, X.-D., Zhou, Y.-X., & Liu, J. (2020). A novel layered stack electromagnetic pump towards circulating metal fluid: Design, fabrication and test. Applied Thermal Engineering, 179, 115610. https://doi.org/https://doi.org/10.1016/j.applthermaleng.2020.115610.
   Web of Science ®Google Scholar
• Zhao, B., Cui, X., Ren, W., Xu, F., Liu, M., & Ye, Z. (2017). A controllable and integrated pump-enabled microfluidic chip and its application in droplets generating. Scientific Reports, 7, 11319. https://doi.org/https://doi.org/10.1038/s41598-017-10785-1.
   PubMed Web of Science ®Google Scholar
• Zhu, J. Y., Suarez, S. A., Thurgood, P., Nguyen, N., Mohammed, M., Abdelwahab, H., Needham, S., Pirogova, E., Ghorbani, K., Baratchi, S., & Khoshmanesh, K. (2019). Reconfigurable, self-sufficient convective heat exchanger for temperature control of microfluidic systems. Analytical Chemistry, 91(24), 15784–15790. https://doi.org/https://doi.org/10.1021/acs.analchem.9b04066
   PubMed Web of Science ®Google Scholar