Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

References

• Muralt P, Polcawich RG, Trolier-McKinstry S. Piezoelectric thin films for sensors, actuators, and energy harvesting. MRS Bull. 2009;34:658–664.
   Web of Science ®Google Scholar
• Gebhardt S, Steffner L, Schlenkrich F, et al. PZT thick films for sensor and actuator applications. J Eur Ceram Soc. 2007;27:4177–4180.
   Web of Science ®Google Scholar
• Khanna PK, Hornbostel B, Grimme R, et al. Miniature pressure sensor and micromachined actuator structure based on low–temperature–cofired ceramics and piezoelectric material. Mater Chem Phys. 2004;87:173–178.
   Web of Science ®Google Scholar
• Kucera M, Wistrela E, Pfusterschmied G, et al. Design–dependent performance of self–actuated and self–sensing piezoelectric–AlN cantilevers in liquid media oscillating in the fundamental in–plane bending mode. Sensor Actuat B-Chem. 2014;200:235–244.
   Web of Science ®Google Scholar
• Lee C, Itoh T, Suga T. Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities. Sensor Actuat A-Phys. 1999;72:179–188.
   Web of Science ®Google Scholar
• Giessibl FJ. The qPlus sensor, a powerful core for the atomic force microscope. Rev Sci Instrum. 2019;90:011101.
   PubMed Web of Science ®Google Scholar
• Schneider M, Bittner A, Schmid U. Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface. J Phys D: Appl Phys. 2015;48:405301.
   Web of Science ®Google Scholar
• Tonisch K, Cimalla V, Foerster C, et al. Piezoelectric properties of polycrystalline AlN thin films for MEMS application. Sensors Actuat A–Phys. 2006;132:658–663.
   Web of Science ®Google Scholar
• Dick AJ. Characterizing effective d31 values for PZT from the nonlinear oscillations of clamped-clamped micro–resonators. Stroj Vestn–J Mech Eng. 2013;59(1):50–55.
   Web of Science ®Google Scholar
• Jona F, Shirane G. Ferroelectric crystals. New York: Dover; 1993.
   Google Scholar
• Furukawa T, Seo N. Electrostriction as the origin of piezoelectricity in ferroelectric polymers. Jpn J Appl Phys. 1990;29(4):675–680.
   Web of Science ®Google Scholar
• Sundar V, Newnham RE. Electrostriction and polarization. Ferroelectrics. 1992;135:431–446.
   Web of Science ®Google Scholar
• Newnham RE, Sundar V, Yimnirun R, et al. Electrostriction: nonlinear electromechanical coupling in solid dielectrics. J Phys Chem B. 1997;101:10141–10150.
   Web of Science ®Google Scholar
• Newnham RE. Properties of materials: anisotropy, symmetry, structure. Oxford University Press, Oxford; 2005.
   Google Scholar
• Li F, Jin L, Xu Z, et al. Electrostrictive effect in ferroelectrics: An alternative approach to improve piezoelectricity. Appl Phys Rev. 2014;1:011103.
   Web of Science ®Google Scholar
• Kuwata J, Uchino K, Nomura S. Electrostrictive coefficients of Pb(Mg1/3Nb1/3)O3 ceramics. Jpn J Appl Phys. 1980;19(11):2099–2103.
   Web of Science ®Google Scholar
• Ma W, Cross LE. Tunable electric-field-induced piezoelectricity in high strain relaxor ferroelectric P(VDF-TrFE) copolymer. J Phys: Condens Matter. 2005;17:1011–1018.
   Web of Science ®Google Scholar
• Venet M, Zabotto F, Eiras JA, et al. High and tunable piezoelectric coefficients in 0.675Pb(Mg1/3 Nb1/3)O3-0.325PbTiO3 ceramics. Mater Res Bull 2012;47:2219–2221.
   Web of Science ®Google Scholar
• Liu Y, Aziguli H, Zhang B, et al. Ferroelectric polymers exhibiting behaviour reminiscent of a morphotropic phase boundary. Nature. 2018;562:96–100.
   PubMed Web of Science ®Google Scholar
• Zhang QM, Bharti V, Zhao X. Giant electrostriction and relaxor ferroelectric behaviour in electron-irradiated poly(vinylidene fluoride-trifluoroethylene) copolymer. Science. 1998;280:2101–2104.
   PubMed Web of Science ®Google Scholar
• Oh SR, Yao K, Zhang l, et al. Asymmetric electrode design for significant performance enhancement of piezoelectric P(VDF-TrFE) polymer microcantilevers. Smart Mater Struct. 2015;25:045035.
   Google Scholar
• Toprak A, Tigli O. MEMS scale PVDF-TrFE-based piezoelectric energy harvesters. J Microelectromech Syst. 2015;24:1989–1997.
   Web of Science ®Google Scholar
• Ducrot PH, Dufour I, Ayela C. Optimization of PVDF-TrFE processing conditions for the fabrication of organic MEMS resonators. Sci Rep. 2016;6:19426.
   PubMed Web of Science ®Google Scholar
• Rashmi KR, Rao AS, Jayarama A, et al. Low frequency piezoelectric P(VDF-TrFE) micro-cantilevers with novel MEMS process for vibration sensor and energy harvester applications. Smart Mater Struct. 2019;28:065022.
   Web of Science ®Google Scholar
• Rashmi KR, Rao AS, Jayarama A, et al. Piezoelectric P(VDF-TrFE) micro cantilevers and beams for low frequency vibrations sensors and energy harvesters. Sens Actuator A. 2019;295:574–585.
   Web of Science ®Google Scholar
• Kim S, Dong Y, Hossain MM, et al. Piezoresistive Graphene/P(VDF-TrFE) heterostructure based highly sensitive and flexible pressure sensor. ACS Appl Mater Interfaces. 2019;11(160006):16017.
   Google Scholar
• Safari A, Akdogan EK. Piezoelectric and acoustic materials for transducer applications. Springer, New York; 2008.
   Google Scholar
• Hafner J, Teuschel M, Schneider M, et al. Origin of the strong temperatur effect on the piezoelectric response of the ferroelectric (co-)polymer P(VDF70-TrFE30). Polymer. 2019;170:1–6.
   Web of Science ®Google Scholar
• Tashiro K. Crystal structure and phase transition of PVDF and related copolymers. In: Nalwa HS, editor. Ferroelectric polymers: chemistry, physics, and applications. New York: Marcel Dekker; 1995. p. 63–182. Chapter 2,
   Google Scholar
• Katsouras I, Asadi K, Li M, et al. The negative piezoelectric effect of the ferroelectric polymer poly(vinylidene fluoride). Nat Mater. 2016;15:78–84.
   PubMed Web of Science ®Google Scholar
• Schmid S, Villanueva LG, Roukes ML. Fundamentals of nanomechanical resonators. Springer, New York; 2016.
   Google Scholar
• Kucera M, Wistrela E, Pfusterschmid G, et al. Characterization of a roof tile-shaped out-of-plane vibrational mode in aluminium-nitride-actuated self-sensing micro-resonators for liquid monitoring purposes. Appl Phys Lett. 2014;104:233501.
   Web of Science ®Google Scholar
• Mayrhofer PM, Wistrela E, Kucera M, et al. Fabrication and characterisation of ScAlN-based piezoelectric MEMS cantilevers. Proceedings of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). 2015 June, p. 2144–2147.
   Google Scholar
• Krupa K, Gorecki C, Jóźwicki R, et al. Interferometric study of reliability of microcantilevers driven by AlN sandwiched between two metal layers. Sensor Actuat A-Phys. 2011;171(2):306–316.
   Web of Science ®Google Scholar
• Dufour I, Lochon F, Heinrich SM, et al. Effect of coating viscoelasticity on quality factor and limit of detection of microcantilever chemical sensors. IEEE Sens. J. 2007;7:230–236.
   Web of Science ®Google Scholar
• Cross LE, Jang SJ, Newnham RE, et al. Large electrostrictive effects in relaxor ferroelectrics. Ferroelectrics. 1980;23(1):187–191.
   Web of Science ®Google Scholar
• Xu T-B, Cheng Z-Y, Zhang QM. High–performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymer. Appl Phys Lett. 2002;80:1082.
   Web of Science ®Google Scholar
• Khudiyev T, Clayton J, Levy E, et al. Electrostrictive microelectromechanical fibres and textiles. Nat Commun 2017;8:1435.
   PubMed Web of Science ®Google Scholar