References
- Wang YN, Fu LM. Micropumps and biomedical applications – a review. Microelectron Eng. 2018;195:121–138.
- Mohith S, Karanth PN, Kulkarni SM. Recent trends in mechanical micropumps and their applications: a review. Mechatronics. 2019;60:34–55. November 2018. DOI:10.1016/j.mechatronics.2019.04.009.
- Vante AB, Kanish TC. Experimental investigation on digital offset switching strategy for precise dosing using digital multiple micropump infusion system. Microfluid Nanofluidics. 2022;26(12). DOI:10.1007/s10404-022-02591-7
- Nisar A, Afzulpurkar N, Mahaisavariya B, et al. MEMS-based micropumps in drug delivery and biomedical applications. Sensors and Actuat B Chem. 2008;130(2):917–942.
- Tsai N, Sue C. Review of MEMS-based drug delivery and dosing systems. Sens Actuators A. 2007;134(2):555–564.
- Amirouche F, Zhou Y, Johnson T. Current micropump technologies and their biomedical applications. Microsyst Technol. 2009;15(5):647–666.
- Paul SR, Nayak SK, Anis A, et al. MEMS-Based controlled drug delivery systems: a short review. Polym Plast Technol Eng. 2016;55(9):965–975.
- Asadi Dereshgi H, Dal H, Yildiz MZ. Piezoelectric micropumps: state of the art review. Microsyst Technol. 2021 Jan;27(12):4127–4155.
- Nguyen N-T, Truong T-Q, Wong K-K, et al. Micro check valves for integration into polymeric microfluidic devices. J Micromech Microeng. 2004 Jan;14(1):69–75.
- Azarbadegan A, Eames I, Wojcik A, et al. Combination rules for multichamber valveless micropumps. Journal of Microelectromechanical Systems. 2013;22(5):1133–1139.
- Mazloum J, Shamsi A. 3D design and numerical simulation of a check-valve micropump for lab-on-a-chip applications. J Micro-Bio Robot. 2020 Dec;16(2):237–248.
- Kang J, Mantese JV, Auner GW. A self-priming, high performance, check valve diaphragm micropump made from SOI wafers. J Micromech Microeng. 2008 Dec;18(12):125021.
- Kang J, Auner GW. Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design. Sens Actuators A Phys. 2011 Jun;167(2):512–516.
- Bui GT, Wang JH, Lin JL. Optimization of micropump performance utilizing a single membrane with an active check valve. Micromach. 2018;9(1):1.
- Pourmand A, Shaegh SAM, Ghavifekr HB, et al. Fabrication of whole-thermoplastic normally closed microvalve, micro check valve, and micropump. Sens Actuators B Chem. 2018 Jun;262:625–636.
- Mohith S, Karanth PN, Kulkarni SM. Experimental investigation on performance of disposable micropump with retrofit piezo stack actuator for biomedical application. Microsyst Technol. 2019;2:4741–4752.
- Junwu K, Zhigang Y, Taijiang P, et al. Design and test of a high-performance piezoelectric micropump for drug delivery. Sensors and Actuators A : Physical. 2005;121:156–161.
- Zhang T, Wang Q. Valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices. J Power Sources. 2005;140(1):72–80.
- Haldkar RK, Gupta VK, Sheorey T. Modeling and flow analysis of piezoelectric based micropump with. J Mech Sci Technol. 2017;31(6):2933–2941.
- Johari J, Majlis BY. Design Simulations of MEMS Micropump by 3D fluid-structure interaction analysis. NSTI- Nanotech. 2010;2:677–680.
- Li Y, Le VT, Goo NS, et al. High actuation force of piezoelectric hybrid actuator with multiple piezoelectric pump design. J Intell Mater Syst Struct. 2017;28(18):2557–2571.
- Singh S, Kumar N, George D, et al. Analytical modeling, simulations and experimental studies of a PZT actuated planar valveless PDMS micropump. Sens Actuators A Phys. 2015;225:81–94.
- Yazdi SAFF, Corigliano A, Ardito R. 3-D design and simulation of a piezoelectric micropump. Micromach. 2019;10(4):1–17.
- Johari J, Majlis BY. Flow behaviour of fluid-structure interaction (FSI) system of piezoelectric actuated valveless micropump (PAVM). IEEE International Conference on Semiconductor Electronics. 2008;216–220. DOI:10.1109/SMELEC.2008.4770311
- Johari J, Yunas J, Majlis BY. Piezoelectric Micropump with Nanoliter per Minute Flow for Drug Delivery Systems. Sains Malaysiana. 2010;40(3):275–281.
- Johari J, Majlis BY. MEMS-based piezoelectric micropump for precise liquid handling. International Conference on System Engineering and Technology. 2012;1–4. DOI:10.1109/ICSEngT.2012.6339327
- Takaddus AT, Chandy AJ. A three‐dimensional (3D) two‐way coupled fluid‐structure interaction (FSI) study of peristaltic flow in obstructed ureters. Int J Numer Method Biomed Eng. 2018 Oct;34(10):1–13.
- Benra F, Dohmen HJ, Pei J, et al. A comparison of one-way and two-way coupling methods for numerical analysis of fluid-structure interactions. Journal of Applied Mathematics. 2011;2011:1–16.
- MEMS Module user’s Guide. COMSOL Multiphysics Pvt. Ltd. Bengaluru, India. 2018;13.Available from: https://doc.comsol.com/5.4/doc/com.comsol.help.mems/MEMSModuleUsersGuide.pdf