High-resolution material structuring using ultrafast laser non-diffractive beams

References

• Russbueldt P, Mans T, Rotarius G, et al. 400 W Yb: YAGInnoslab fs-amplifier. Opt Express. 2009;17:839–868.
   Web of Science ®Google Scholar
• Sugioka K, Cheng Y. Ultrafast lasers–reliable tools for advanced materials processing. Light: Sci Appl. 2014;3:e149.
   Web of Science ®Google Scholar
• Malinauskas M, Žukauskas A, Hasegawa S, et al. Ultrafast laser processing of materials: from science to industry. Light: Sci Appl. 2016;5:e16133.
   PubMed Web of Science ®Google Scholar
• Poprawe R, Hinke C, Meiners W, et al. Digital photonic production along the lines of industry 4.0. SPIE Proceedings, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII; 2018;10519. p. 1051907.
   Google Scholar
• Abbe E, Lawson H. ed. A contribution to the theory of the microscope and the nature of microscopic vision. Proceedings of the Bristol Naturalists’ Society. Translated by Fripp HE. Vol. 1; London, UK: Williams & Northgate; 1876. pp. 200–261.
   Google Scholar
• Ashkenasi D, Rosenfeld A, Varel H. Wähmer, and Campbell EEB. Laser processing of sapphire with picosecond and sub-picosecond pulses. Appl Surf Sci. 1997;120:65–80.
   Web of Science ®Google Scholar
• Joglekar AP, Liu H, Meyhöfer E, et al. Optics at critical intensity: Applications to nanomorphing. Proc Nat Acad Sci. 2004;101:5856–5861.
   PubMed Web of Science ®Google Scholar
• Korte F, Serbin J, Koch J, et al. Towards nanostructuring with femtosecond laser pulses. Appl Phys A: Mater Sci Process. 2003;77:229–235.
   Web of Science ®Google Scholar
• Klein-Wiele JH, Simon P. Sub-wavelength pattern generation by laser direct writing via repeated irradiation. Opt Express. 2013;21:626–630.
   PubMed Web of Science ®Google Scholar
• Qin F, Huang K, Wu J, et al. A supercritical lens optical label-free microscopy: sub-diffraction resolution and ultra-long working distance. Adv Mater. 2017;29:1602721.
   Web of Science ®Google Scholar
• Mishchik K, Petit Y, Brasselet E, et al. Patterning linear and nonlinear optical properties of photosensitive glasses by femtosecond structured light. Opt Lett. 2015;40:201–204.
   PubMed Web of Science ®Google Scholar
• Korte F, Nolte S, Chichkov BN, et al. Far-field and near-field material processing with femtosecond laser pulses. Appl Phys A: Mater Sci Process. 1999;69:S7–S11.
   Web of Science ®Google Scholar
• Chimmalgi A, Choi TY, Grigoropoulos CP, Komvopoulos K. Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy. Appl Phys Lett. 2003;82:11461148.
   Web of Science ®Google Scholar
• Falcón Casas I, Kautek W. Subwavelength nanostructuring of gold films by apertureless scanning probe lithography assisted by a femtosecond fiber laser oscillator. Nanomat. 2018;8:536.
   Web of Science ®Google Scholar
• Piglmayer K, Denk R, Bäuerle D. Laser-induced surface patterning by means of microspheres. Appl Phys Lett. 2002;80:4693–4695.
   Web of Science ®Google Scholar
• Ulmeanu M, Petkov P, Ursescu D, et al. Pattern formation on silicon by laser-initiated liquid-assisted colloidal lithography. Nanotechnology. 2015;26:455303.
   PubMed Web of Science ®Google Scholar
• White YV, Li X, Sikorski Z, et al. Single-pulse ultrafast-laser machining of high aspect nano-holes at the surface of SiO2. Opt Express. 2008;16:14411–14420.
   PubMed Web of Science ®Google Scholar
• Englert L, Rethfeld B, Haag L, et al. Control of ionization processes in high band gap materials via tailored femtosecond pulses. Opt Express. 2007;15:17855–17862.
   PubMed Web of Science ®Google Scholar
• Rudenko A, Colombier JP, Höhm S, et al. Spontaneous periodic ordering on the surface and in the bulk of dielectrics irradiated by ultrafast laser: a shared electromagnetic origin. Sci Rep. 2017;7:12306.
   PubMed Web of Science ®Google Scholar
• Shimotsuma Y, Kazansky PG, Qiu J, et al. Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys Rev Lett. 2003;91:247405.
   PubMed Web of Science ®Google Scholar
• Abere MJ, Zhong M, Krüger J, et al. Ultrafast laser-induced morphological transformations. MRS Bull. 2016;41:969–974.
   Web of Science ®Google Scholar
• Birnbaum M. Semiconductor surface damage produced by ruby lasers. J Appl Phys. 1965;36:3688–3689.
   Web of Science ®Google Scholar
• Skoulas E, Manousaki A, Fotakis C, et al. Biomimetic surface structuring using cylindrical vector femtosecond laser beams. Sci Rep. 2017;7:45114.
   PubMed Web of Science ®Google Scholar
• Dusser B, Sagan Z, Soder H, et al. Controlled nanostructrures formation by ultra fast laser pulses for color marking. Opt Express. 2010;18:2913–2924.
   PubMed Web of Science ®Google Scholar
• Vorobyev AY, Guo C. Metal pumps liquid uphill. Appl Phys Lett. 2009;94:224102.
   Web of Science ®Google Scholar
• Cheng G, Mishchik K, Mauclair C, et al. Ultrafast laser photoinscription of polarization sensitive devices in bulk silica glass. Opt Express. 2009;17:9515–9525.
   PubMed Web of Science ®Google Scholar
• Taylor R, Hnatovsky C, Simova E. Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass. Laser Photonics Rev. 2008;2:26–46.
   Web of Science ®Google Scholar
• Zhang J, Gecevičius M, Beresna M, et al. Seemingly unlimited lifetime data storage in nanostructured glass. Phys Rev Lett. 2014;112:033901.
   PubMed Web of Science ®Google Scholar
• Her TH, Finlay RJ, Wu C, et al. Microstructuring of silicon with femtosecond laser pulses. Appl Phys Lett. 1998;73:1673–1675.
   Web of Science ®Google Scholar
• Halbwax M, Sarnet T, Delaporte P, et al. Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication. Thin Solid Films. 2008;516:6791–6795.
   Web of Science ®Google Scholar
• Sipe JE, Young JF, Preston JS, et al. Laser-induced periodic surface structures. I Theory Phys Rev B. 1983;27:1141–1154.
   Web of Science ®Google Scholar
• Grady DE. The spall strength of condensed matter J. Mech Phys Solids. 1988;36:353–384.
   Web of Science ®Google Scholar
• Stoian R, Wollenhaupt M, Baumert T, et al. Temporal pulse tailoring in ultrafast laser manufacturing technologies. In: Sugioka K, Meunier M, Pique A, editors. Laser precision microfabrication, springer series in optical sciences. Vol. 135. Heidelberg: Springer Verlag; 2010. p. 121–144.
   Google Scholar
• Marcinkevičius A, Juodkazis S, Matsuo S, et al. Application of Bessel beams for microfabrication of dielectrics by femtosecond Laser. Jpn J Appl Phys. 2001;40:L1197–L1199.
   Web of Science ®Google Scholar
• Zambon V, McCarthy N, Piché M Laser micromachining of transparent glass using ultrafast Bessel beams. Proc. SPIE 7386; Aug 4; Photonics North; 2009. p. 738632.
   Google Scholar
• Mitra S, Chanal M, Clady R, et al. Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining. Appl Opt. 2015;54:7358–7365.
   PubMed Web of Science ®Google Scholar
• Yang L, Qian D, Xin C, et al. Two-photon polymerization of microstructures by a non-diffraction multifoci pattern generated from a superposed Bessel beam. Opt Lett. 2017;42:743–746.
   PubMed Web of Science ®Google Scholar
• Matushiro Y, Watanabe W. Femtosecond laser processing of polymethyl methacrylate with an axicon. J Las Micro Nanoeng. 2016;11:59–65.
   Web of Science ®Google Scholar
• Tsampoula X, Garcés-Chávez V, Comrie M, et al. Femtosecond cellular transfection using a nondiffracting light beam. Appl Phys Lett. 2007;91:053902.
   Web of Science ®Google Scholar
• Dudutis J, Gečys P, Račiukaitis G. Non-ideal axicon-generated Bessel beam application for intra-volume glass modification. Opt Express. 2016;25:28433–28443.
   Google Scholar
• Durnin J, Miceli JJ, Eberly JH. Diffraction-free beams. Phys Rev Lett. 1987;58:1499–1501.
   PubMed Web of Science ®Google Scholar
• Sheppard C, Wilson T. Gaussian-beam theory of lenses with annular aperture. IEE J Microw Opt Acoust. 1978;2:105–112.
   Web of Science ®Google Scholar
• McLeod JH. The axicon: a new type of optical element. J Opt Soc Am. 1954;44:592–597.
   Web of Science ®Google Scholar
• Herman RM, Wiggins TA. Production and uses of diffractionless beams. J Opt Soc Am A. 1991;8:932–942.
   Google Scholar
• Gori F, Guattari G, Padovani C. Bessel-Gauss beams. Opt Commun. 1987;64:491–495.
   Web of Science ®Google Scholar
• Velpula PK, Bhuyan MK, Courvoisier F, et al. Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring. Laser Photonics Rev. 2016;2:230–244.
   Google Scholar
• McGloin D, Dholakia K. Bessel beams: diffraction in a new light. Contemp Phys. 2005;46:15–28.
   Web of Science ®Google Scholar
• Duocastella D, Arnold C. Bessel and annular beams for materials processing. Laser Photonics Rev. 2012;6:607–621.
   Web of Science ®Google Scholar
• Čižmár T, Dholakia K. Tunable Bessel light modes: engineering the axial propagation. Opt Express. 2009;17:15558–15570.
   PubMed Web of Science ®Google Scholar
• He F, Yu J, Tan Y, et al. Tailoring femtosecond 1.5 µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias. Sci Rep. 2017;7:40785.
   PubMed Web of Science ®Google Scholar
• Bhuyan MK, Velpula PK, Somayaji M, et al. 3D Nano-fabrication using controlled Bessel–glass interaction in ultrafast modes. J Las Micro Nanoeng. 2017;12:274–280.
   Web of Science ®Google Scholar
• Meyer R, Froehly L, Giust R, et al. Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass. Appl Phys Lett. 2019;114:201105.
   Web of Science ®Google Scholar
• Mcleod E, Arnold CB. Subwavelength direct-write nanopatterning using optically trapped microspheres. Nat Nanotechnol. 2008;3:413–417.
   PubMed Web of Science ®Google Scholar
• Bhuyan MK, Courvoisier F, Lacourt PA, et al. High aspect ratio nanochannel machining using single shot femtosecond Bessel beams. Appl Phys Lett. 2010;97:081102.
   Web of Science ®Google Scholar
• Amako J, Sawaki D, Fujii E. Microstructuring transparent materials by use of nondiffracting ultrashort pulse beams generated by diffractive optics. J Opt Soc Am B. 2003;20:2562.
   Web of Science ®Google Scholar
• Mikutis M, Kudrius T, Šlekys G, et al. High 90% efficiency Bragg gratings formed in fused silica by femtosecond Gauss-Bessel laser beams. Opt Mat Express. 2013;3:1862–1871.
   Web of Science ®Google Scholar
• Mishchik K, Beuton R, Dematteo–Caulier O, et al. Improved laser glass cutting by spatio-temporal control of energy deposition using bursts of femtosecond pulses. Opt Express. 2017;25:33271–33282.
   Web of Science ®Google Scholar
• Rapp L, Meyer R, Furfaro L, et al. High speed cleaving of crystals with ultrafast Bessel beams. Opt Express. 2017;25:9312–9317.
   PubMed Web of Science ®Google Scholar
• Dudutis J, Stonys R, Račiukaitis G, et al. Glass dicing with elliptical Bessel beam. Opt Laser Technol. 2019;111:331–337.
   Web of Science ®Google Scholar
• Zhang G, Stoian R, Zhao W, et al. Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone. Opt Express. 2018;26:917–926.
   PubMed Web of Science ®Google Scholar
• Jenne M, Flamm D, Ouaj T, et al. Glass cutting optimization with pump-probe microscopy and Bessel beam profiles. Proc SPIE. 2018;10522:1052216.
   Google Scholar
• Jenne M, Flamm D, Ouaj T, et al. High-quality tailored-edge cleaving using aberration-corrected Bessel-like beams. Opt Lett. 2018;43:2164–2167.
   Web of Science ®Google Scholar
• Stoian R, Bhuyan MK, Cheng G, et al. Ultrafast Bessel beams; advanced tools for laser material processing. Adv Opt Technol. 2018;7:165–174.
   Google Scholar
• Meyer R, Jacquot M, Giust R, et al. Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams. Opt Lett. 2017;43:4307–4310.
   Google Scholar
• Orlov S, Vosylius V, Gotovski P, et al. Vector beams with parabolic and elliptic cross-sections for laser material processing applications. J Las Micro Nanoeng. 2018;13:280–286.
   Web of Science ®Google Scholar
• Alexeev I, Leitz HK, Otto A, et al. Application of Bessel beams for ultrafast laser volume structuring of non transparent media. Phys Procedia. 2010;5:533–540.
   Google Scholar
• Nguyen HD, Sedao X, Faure N, et al. Advanced ultrafast laser Bessel beam for machining metallic materials. Paper presented at: LAMP 2019 International Congress on Laser Advanced Materials Processing; 2019 May 21–24; Hiroshima, Japan.
   Google Scholar
• Liu X, Li Q, Sikora A, et al. Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics. Opt Express. 2019;27:6996–7008.
   PubMed Web of Science ®Google Scholar
• Zhang Y, Zhang GD, Chen C, et al. Transmission volume phase holographic gratings in photo-thermo-refractive glass written with femtosecond laser Bessel beams. Opt Mat Express. 2016;6:3491–3499.
   Web of Science ®Google Scholar
• Zhang G, Cheng G, D’Amico C, et al. Efficient point-by-point Bragg gratings fabricated in embedded laser-written silica waveguides using ultrafast Bessel beams. Opt Lett. 2018;43:2161–2164.
   PubMed Web of Science ®Google Scholar
• Martin G, Bhuyan MK, Troles J, et al. and Le Coarer E. Near infrared spectro-interferometer using femtosecond laser written GLS embedded waveguides and nano-scatterers. Opt Express. 2017;25:8386–8397.
   PubMed Web of Science ®Google Scholar
• Le Coarer E, Blaize S, Benech P, et al. Wavelength-scale stationary-wave integrated Fourier-transform spectrometry. Nat Photonics. 2007;1:473–478.
   Web of Science ®Google Scholar
• Gadonas R, Jarutis V, Paškauskas R, et al. Self-action of Bessel beam in nonlinear medium. Opt Commun. 2001;196:309–316.
   Web of Science ®Google Scholar
• Faccio D, Rubino E, Lotti A, et al. Nonlinear light-matter interaction with femtosecond high-angle Bessel beams. Phys Rev A. 2012;85:033829.
   Web of Science ®Google Scholar
• Polesana P, Franco M, Couairon A, et al. Filamentation in Kerr media from pulsed Bessel beams. Phys Rev A. 2008;77:043814.
   Web of Science ®Google Scholar
• Itoh K, Watanabe W, Nolte S, et al. Ultrafast processes for bulk modification of transparent materials. MRS Bull. 2006;31:620–625.
   Web of Science ®Google Scholar
• Balling P, Schou J. Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films. Rep Prog Phys. 2013;76:036502.
   PubMed Web of Science ®Google Scholar
• Gattass RR, Mazur E. Femtosecond laser micromachining in transparent materials. Nat Photonics. 2008;2:219–225.
   Web of Science ®Google Scholar
• Davis KM, Miura K, Sugimoto N, et al. Writing waveguides in glass with a femtosecond laser. Opt Lett. 1996;21:1729–1731.
   PubMed Web of Science ®Google Scholar
• Glezer EN, Mazur E. Ultrafast-laser driven micro-explosions in transparent materials. Appl Phys Lett. 1997;71:882–884.
   Web of Science ®Google Scholar
• Martin P, Guizard S, Daguzan P, et al. Subpicosecond study of carrier trapping dynamics in wide-band-gap crystals. Phys Rev B. 1997;55:5799–5810.
   Web of Science ®Google Scholar
• Audebert P, Daguzan P, Dos Santos A, et al. Space-time observations of an electron gas in SiO2. Phys Rev Lett. 1994;73:1990–1993.
   PubMed Web of Science ®Google Scholar
• Watanabe M, Juodkazis S, Sun H, et al. Luminescence and defect formation by visible and near-infrared irradiation of vitreous silica. Phys Rev B. 1999;60:9959–9964.
   Web of Science ®Google Scholar
• Chan J, Huser T, Risbud S, et al. Modification of the fused silica glass network associated with waveguide fabrication using femtosecond laser pulses. Appl Phys A: Mater Sci Process. 2003;76:367–372.
   Web of Science ®Google Scholar
• Mishchik K, D’Amico C, Velpula PK, et al. Ultrafast laser induced electronic and structural modifications in bulk fused silica. J Appl Phys. 114:133502.
   Web of Science ®Google Scholar
• Lancry M, Poumellec B, Chahid-Erraji A, et al. Dependence of the femtosecond laser refractive index change thresholds on the chemical composition of doped-silica glasses. Opt Mat Express. 2011;1:711–723.
   Web of Science ®Google Scholar
• Eaton SM, Zhang H, Herman PR, et al. Heat accumulation effects in femtosecond laser written waveguides with variable repetition rate. Opt Express. 2005;13:4708–4716.
   PubMed Web of Science ®Google Scholar
• Liu Y, Shimizu M, Zhu B, et al. Micromodification of element distribution in glass using femtosecond laser irradiation. Opt Lett. 2009;34:136–138.
   PubMed Web of Science ®Google Scholar
• Yu Y, Jian L, Cao Q, et al. Pump-probe imaging of the fs-ps-ns dynamics during femtosecond laser Bessel beam drilling in PMMA. Opt Express. 2015;23:32728–32735.
   PubMed Web of Science ®Google Scholar
• Ahn S, Choi J, Noh J, et al. High aspect ratio nanoholes in glass generated by femtosecond laser pulses with picosecond intervals. Opt Laser Eng. 2018;101:85–88.
   Web of Science ®Google Scholar
• Bhuyan MK, Velpula PK, Colombier JP, et al. Single-shot high aspect ratio bulk nanostructuring of fused silica using chirpcontrolled ultrafast laser Bessel beams. Appl Phys Lett. 2014;104:021107.
   Web of Science ®Google Scholar
• Bhuyan MK, Somayaji M, Mermillod-Blondin A, et al. Ultrafast laser nanostructuring in bulk silica, a “slow” microexplosion. Optica. 2017;4:951–958.
   Web of Science ®Google Scholar
• Vailionis A, Gamaly EG, Mizeikis V, et al. Evidence of super-dense aluminium synthesized by ultrafast microexplosion. Nat Comm. 2011;2:445.
   PubMed Web of Science ®Google Scholar
• Rapp L, Haberl B, Pickard CJ, et al. Evidence of new tetragonal polymorphs of silicon formed through ultrafast laser-induced microexplosion. Nat Comm. 2015;6:7555.
   PubMed Web of Science ®Google Scholar
• Juodkazis S, Nishimura K, Tanaka S, et al. Laser-induced microexplosion in the bulk of a sapphire crystal: Evidence of Mb pressures. Phys Rev Lett. 2006;96:166101.
   PubMed Web of Science ®Google Scholar
• Beuton R, Chimier B, Brei J, et al. Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica. Appl Phys A: Mater Sci Process. 2018;124:324.
   Web of Science ®Google Scholar
• Wang J, Rajendran AM, Dongare AM. Atomic scale modeling of shock response of fused silica and a-quartz. J Mater Sci. 2015;50:8128–8141.
   Web of Science ®Google Scholar
• Juodkazis S, Misawa H, Gamaly EG, et al. Is the nano-explosion really microscopic? J. Non-Cryst Solids. 2009;355:1160–1162.
   Web of Science ®Google Scholar
• Kraus RG, Stewart ST, Swift DC, et al. Shock vaporization of silica and the thermodynamics of planetary impact events. J Geophys Res. 2012;117:E09009.
   Web of Science ®Google Scholar
• Melosh H. A hydrocode equation of state for SiO2. Meteorit Planet Sci. 2007;42:2079–2098.
   Web of Science ®Google Scholar
• Medvedev AB. Equation of state of silicon dioxide with allowance for evaporation, dissociation, and ionization. Combust Explos Shock Waves. 2016;52:463–475.
   Web of Science ®Google Scholar
• Eggers J. Nonlinear dynamics and breakup of free-surface flows. Rev Mod Phys. 1997;69:865–930.
   Web of Science ®Google Scholar
• Rapp L, Meyer R, Giust R, et al. High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams. Sci Rep. 2016;6:34286.
   PubMed Web of Science ®Google Scholar
• Rudenko A, Colombier JP, Itina TE. From random inhomogeneities to periodic nanostructures induced in bulk silica by ultrashort laser. Phys Rev B. 2016;93:075427.
   Web of Science ®Google Scholar
• Lancry M, Poumellec B, Canning J, et al. Ultrafast nanoporous silica formation driven by femtosecond laser irradiation. Laser Photonics Rev. 2013;7:953–962.
   Web of Science ®Google Scholar
• Rudenko A, Colombier JP, Itina TE. Nanopore-mediated ultrashort laser-induced formation and erasure of volume nanogratings in glass. Phys Chem Chem Phys. 2018;20:5887–5899.
   PubMed Web of Science ®Google Scholar
• Cheng G, Rudenko A, DAmico C, et al. Embedded nanogratings in bulk fused silica under non-diffractive Bessel ultrafast laser irradiation. Appl Phys Lett. 2017;110:261901.
   Web of Science ®Google Scholar
• Gil-Villalba A, Xie C, Salut R, et al. Deviation from threshold model in ultrafast laser ablation of graphene at sub-micron scale. Appl Phys Lett. 2015;107:061103.
   Web of Science ®Google Scholar
• Kumar S, Eaton SM, Bollani M, et al. Laser surface structuring of diamond by means of pulsed Bessel beams. Sci Rep. 2018;8:14021.
   PubMed Web of Science ®Google Scholar
• Xie15 Xie C, Jukna V, Milián C, et al. Tubular filamentation for laser material processing. Sci Rep. 2015;5:8914.
   PubMed Web of Science ®Google Scholar