Mim Capacitor Modeling by Support Vector Regression

Z. Q. Yang Microwave Center, University of Electronic Science and Technology of China, Chengdu 610054, China

T. Yang Microwave Center, University of Electronic Science and Technology of China, Chengdu 610054, China

Y. Liu Microwave Center, University of Electronic Science and Technology of China, Chengdu 610054, China

S. H. Han Microwave Center, University of Electronic Science and Technology of China, Chengdu 610054, China

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