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Surface Engineering Volume 15, 1999 - Issue 2
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Regular Papers

Thermalstability of Al–O–N PVD films and comparison with Al2O3 films as diffusion barriers: Shortlisted

K. ReichertThe Lehrstuhl für Theoretische Hüttenkunde, Rheinisch-Westfälische TechnischeHochschule Aachen,
Pages 163-167 | Published online: 19 Jul 2013

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