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Surface Engineering Volume 22, 2006 - Issue 2
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Articles

Process–microstructure–properties relationship during formation of AlN layers by physical vapour deposition

U. FigueroaInstituto Tecnológico y de Estudios Superiores de Monterrey-Campus Estado de México, Carretera a Lago de Guadalupe km 3.5, Atizapán, 52926, México
,
O. SalasInstituto Tecnológico y de Estudios Superiores de Monterrey-Campus Estado de México, Carretera a Lago de Guadalupe km 3.5, Atizapán, 52926, MéxicoCorrespondence[email protected]
&
J. OsegueraInstituto Tecnológico y de Estudios Superiores de Monterrey-Campus Estado de México, Carretera a Lago de Guadalupe km 3.5, Atizapán, 52926, México
Pages 109-120 | Published online: 19 Jul 2013

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