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Surface Engineering Volume 24, 2008 - Issue 5
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Articles

Structural characterisation of anodic SiO2 thin films on n-type Si

W. S. WoonElectronic Materials Research Group, School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, 14300 Nibong Tebal, Penang, Malaysia
,
S. D. HutagalungElectronic Materials Research Group, School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, 14300 Nibong Tebal, Penang, Malaysia
&
K. Y. CheongElectronic Materials Research Group, School of Materials and Mineral Resources Engineering, Universiti Sains Malaysia, 14300 Nibong Tebal, Penang, Malaysia
Pages 388-391 | Published online: 19 Jul 2013

  • S. L. Wu, D. M. Chiao, C. L. Lee and T. F. Lei: IEEE Trans. Electron Dev., 1996, 43, 287–294.
  • K. Ghowsi and R. J. Gale: J. Electrochem. Soc., 1989, 136, 867–871.
  • M. Ivanda, H. Gebavi, D. Ristié, K. Furié, S. Musk, M. Ristié, S. Zonja, P. Biljanovié, O. Gamulin, M. Balarin, M. Montagna, M. Ferarri and G.C. Righini: J. Mot Structure, 2007, 834-836, 461-464.
  • V. Q. Ho and T. Sugano: IEEE J. Solid-State Circuits, 1980, 15, 501–508.
  • M. Grecea, C. Rotaru, N. Nastase and G. Craciun: J Mot Structure, 1999, 480-481, 607-610.
  • F. Gaspard and A. Halimaoui: ‘Insulating films on semiconductor’, 251–254; 1986, Elsevier Science Publication.
  • G. C. Jain, A. Prasad and B. C. Chakravarty: J. Electrochem. Soc., 1979, 122, 89–92.
  • W. D. Mackintosh and H. H. Plattner: J. Electrochem. Soc., 1977,124, 396–400.
  • V. G. Marathe, R. Paily, A. Dasgupta and N. Dasgupta: IEEE Trans. Electron Dev., 2005, 52, 118–121.
  • T. Cahyadi, H. S. Tan, E. B. Namdas, S. G. Mhaisalkar, P. S. Lee, Z. K. Chen, C. M. Ng and F. Y. C. Boey: Organic Electron., 2007, 8, 455–459.
  • A. H. M. Kamal, S. Nomura and T. Endoh: J. Electrochem. Soc., 1994, 166, 2227–2230.
  • A. G. Munoz, A. Moehring and M. M. Lohrengel: Electrochim. Acta, 2002, 47, 2751–2760.
  • J. Rappich: Microelectron. Rehab., 2000, 40, 815–819.
  • W. S. Lau: ‘Infrared characterization for microelectronics’, 56–59; 1999, Singapore, World Scientific Pub.
  • D. R. Sidney, F. Manuel and R. F. Eric: ‘Anodic oxidation’, 3–21; 1975, New York, Academic Press Inc.

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