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Original Article

Deposition of carbon based materials by continuous and pulsed discharges

Pages 141-148 | Received 11 Mar 2011, Accepted 27 Sep 2011, Published online: 12 Nov 2013

References

  • Gicquel A, Hassouni K, Silva F, Achard J: Curr. Appl. Phys., 2001, 1, 479–496.
  • Nebel CE, Ristein (eds.) J: ‘Thin film diamond I’, in ‘Semiconductors and semimetals’, Vol. 76, 1st edn; 2003, New York, Elsevier.
  • Sussmann R S, ed (ed.): in ‘CVD diamond for electronic devices and sensors’; 2009, Chichester, John Wiley & Sons.
  • Cicala G, Milella A, Palumbo F, Rossini P, Favia P, d’Agostino R: Macromolecules, 2002, 35, 8920–8922.
  • Chen X, Rajeshwar K, Timmons RB, Chen J.-J, Chyan OMR: Chem. Mater., 1996, 8, 1067–1077.
  • Limb SJ, Lau KK, Edell D, Gleason JEF, Gleason KK: Plasma Polym., 1999, 4, 21–32.
  • Hugon R, Fabry M, Henrion G: J. Phys. D, 1996, 29D, 761–768.
  • Cicala G, Losurdo M, Capezzuto P, Bruno G: Plasma Sources Sci. Technol., 1992, 1, 156–165.
  • Hassouni K, Duten X, Rousseau A, Gicquel A: Plasma Sources Sci. Technol., 2001, 10, 61–75.
  • Cicala G, Creatore M, Favia P, Lambendola R, d’Agostino R: Appl. Phys. Lett., 1999, 75, 37–39.
  • Cicala G, Bruno G, Capezzuto P, Manodoro P: J. Vac. Sci. Technol. A, 1993, 12A, 690–698.
  • Bénédic F, Duten X, Syll O, Lombardi G, Hassouni K, Gicquel A: Chem. Vap. Deposition, 2008, 14, 173–180.
  • Brinza O, Achard J, Silva F, Duten X, Michau A, Hassouni K, Gicquel A: Phys. Status Solidi A, 2007, 204A, 2847–2853.
  • Cicala G, Flamm DL, Ibbotson DE, Mucha JA: in‘Plasma–surface interactions and processing of materials’(, Auciello O, et al..), Series E: Applied Sciences, Vol. 176, 171–173; 1990, Dordrecht, Kluwer Academic Publishers.
  • Park SK, Economu DJ: J. Electrochem. Soc., 1990, 137, 2103–2116.
  • Yoshida T, Ichikawa Y, Sokai H:Proc. 9th European PV Solar Energy Conf(, Palz W, et al..), 1006–1009; 1989, Freiburg, Kluwer Academic Publishers.
  • Ryan ME, Hynes AM, Badyal JPS: Chem. Mater., 1996, 8, 37–42.
  • Panchalingam V, Chen X, Savage CR, Timmons RB, Eberhart RC: J.Appl. Polymer Sci.:Appl. Polymer Symp., 1994, 54, 123–141.
  • Favia P, Cicala G, Milella A, Palumbo F, Rossini P, d’Agostino R: Surf. Coat. Technol., 2003, 169–170, 609–612.
  • Cicala G, Milella A, Palumbo F, Favia P, d’Agostino R: Diamond Relat. Mater., 2003, 12, 2020–2025.
  • Cicala G, Brescia R, Nitti MA, Romeo A, Ambrico M, Schiavulli L, Perna G, Capozzi V: Diamond Relat. Mater., 2010, 19, 470–473.
  • Cicala G, Brescia R, Nitti MA, Romeo A, Altamura D, Giannini C, Capitelli M, Spinelli P, Schutzmann S: Surf. Coat. Technol., 2010, 204, 1884–1888.
  • Laimer J, Shimokawa M, Matsumoto M: Diamond Relat. Mater., 1994, 3, 231–238.
  • Khachan J, Gardner D: J. Appl. Phys., 1999, 86, 6576–6579.
  • Milella A, Palumbo F, Favia P, Cicala G, d’Agostino R: Pure Appl. Chem., 2005, 77, 399–414.
  • Ikeda M, Aiso K, Hori M, Goto T: Jpn J. Appl. Phys., 1995, 34, 3273.

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