164
Views
7
CrossRef citations to date
0
Altmetric
Research Paper

Combinatorial synthesis of Cr1 − xAlxN and Ta1 − xAlxN coatings using industrial scale co-sputtering

, , , , , , , , & show all
Pages 252-257 | Received 02 Oct 2014, Accepted 29 Mar 2015, Published online: 23 Feb 2016

References

  • KawateM., KimuraA. and SuzukiT.: ‘Microhardness and lattice parameter of Cr1 − xAlxN films’, J. Vac. Sci. Technol. A, 2002, 20A, 569–571. doi: 10.1116/1.1448510
  • DingX. Z. and ZengX. T.: ‘Structural, mechanical and tribological properties of CrAlN coatings deposited by reactive unbalanced magnetron sputtering’, Surf. Coat. Technol., 2005, 200, 1372–1376. doi: 10.1016/j.surfcoat.2005.08.072
  • ReiterA. E., DerflingerV. H., HanselmannB., BachmannT. and SartoryB.: ‘Investigation of the properties of Al1 − xCrxN coatings prepared by cathodic arc evaporation’, Surf. Coat. Technol., 2005, 200, 2114–2122. doi: 10.1016/j.surfcoat.2005.01.043
  • KhamsehS., NoseM., KawabataT., SaikiA., MatsudaK., TerayamaK. and IkenoS.: ‘Effect of deposition conditions on the structure and properties of CrAlN films’, Mater. Trans., 2008, 49, 2082–2090. doi: 10.2320/matertrans.MRA2008604
  • FranzR., LechthalerM., PolcikP., Rebelo de FigueiredoM. and MittererC.: ‘Tribological properties of arc-evaporated NbAlN hard coatings’, Tribol. Lett., 2012, 45, 143–152. doi: 10.1007/s11249-011-9876-5
  • FranzR., LechthalerM., PolzerC. and MittererC.: ‘Oxidation behaviour and tribological properties of arc-evaporated ZrAlN hard coatings’, Surf. Coat. Technol., 2012, 206, 2337–2345. doi: 10.1016/j.surfcoat.2011.10.023
  • LembkeM. I., LewisD. B., MünzW. -D. and TitchmarshJ. M.: ‘Significance of Y and Cr in TiAlN hard coatings for dry high speed cutting’, Surf. Eng., 2001, 17, (2), 153–158. doi: 10.1179/026708401101517656
  • TritremmelC., DanielR., LechthalerM., RudigierH., PolcikP. and MittererC.: ‘Microstructure and mechanical properties of nanocrystalline Al–Cr–B–N thin films’, Surf. Coat. Technol., 2012, 213, 1–7. doi: 10.1016/j.surfcoat.2012.09.055
  • PfeilerM., FontalvoG. A., WagnerJ., KutschejK., PenoyM., MichotteC., MittererC. and KathreinM.: ‘Arc evaporation of Ti-Al-Ta-N coatings: The effect of bias voltage and Ta on high-temperature tribological properties’, Tribol. Lett., 2008, 30, 91–97. doi: 10.1007/s11249-008-9313-6
  • GebhardtT., MusicD., TakahashiT. and SchneiderJ. M.: ‘Combinatorial thin film materials science: From alloy discovery and optimization to alloy design’, Thin Solid Films, 2012, 520, (17), 5491–5499. doi: 10.1016/j.tsf.2012.04.062
  • WeiratherT., CzettlC., PolcikP., KathreinM. and MittererC.: ‘Industrial-scale sputter deposition of Cr1 − xAlxN coatings with 0·21 ≤  x ≤  0·74 from segmented targets’, Surf. Coat. Technol., 2013, 232, 303–310. doi: 10.1016/j.surfcoat.2013.05.022
  • WeiratherT., FianA., SartoryB., CaliskanogluD., KölkerW. and MittererC.: ‘Duplex processing for increased adhesion of sputter deposited Ti1 − xAlxN coatings on a Fe-25%Co-15%Mo tool material’, Surf. Coat. Technol., 2012, 206, 3601–3606. doi: 10.1016/j.surfcoat.2012.02.049
  • BrandesE. A.: ‘Smithells Metals Reference Book’, 6th edn.1983, Stoneham, Butterworth Publishers.
  • RovereF., MusicD., ErshovS., to BabenM., FussH. -G., MayrhoferP. H. and SchneiderJ. M.: ‘Experimental and computational study on the phase stability of Al-containing cubic transition metal nitrides’, J. Phys. D, 2010, 43D, 035302. doi: 10.1088/0022-3727/43/3/035302
  • MatsunamiN., YamamuraY., ItikawaY., ItohN., KazumataY., MiyagawaS., MoritaK., ShimizuR. and TwaraH.: ‘Engery dependence of ion-induced sputtering yields of monoatomic solids’, At. Data Nucl. Data, 1984, 31, 1–80. doi: 10.1016/0092-640X(84)90016-0
  • International Center for Diffraction Data, PDF-2/Release 2007, card numbers 00-025-1495, 03-065-2899, 00-038-1420, 00-049-1283, 01-076-0702.
  • HörlingA., HultmanL., OdénM., SjölénJ. and KarlssonL.: ‘Thermal stability of arc evaporated high aluminum-content Ti1 − xAlxN thin films’, J. Vac. Sci. Technol. A, 2002, 20A, (5), 1815–1823. doi: 10.1116/1.1503784
  • ReiterA. E., MittererC. and SartoryB.: ‘Oxidation of arc-evaporated Al1 − xCrxN coatings’, J. Vac. Sci. Technol. A, 2007, 25A, (4), 711–720. doi: 10.1116/1.2738492
  • YuC. Y., WangS. B., LiT. B. and ZhangZ. X.: ‘Tribological behaviour of CrAlN coatings at 600°C’, Surf. Eng., 2013, 29, (4), 318–321. doi: 10.1179/1743294412Y.0000000100
  • FranzR., NeidhardtJ., SartoryB., KaindlR., TessadriR., PolcikP., DerflingerV. H. and MittererC.: ‘High-temperature low-friction properties of vanadium-alloyed AlCrN coatings’, Tribol. Lett., 2006, 23, 101–107. doi: 10.1007/s11249-006-9064-1
  • TkadletzM., MittererC., SartoryB., Letofsky-PapstI., CzettlC. and MichotteC.: ‘The effect of droplets in arc evaporated TiAlTaN hard coatings on the wear behavior’, Surf. Coat. Technol., 2014, 257, 95–101. doi: 10.1016/j.surfcoat.2014.01.010

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.